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A. Haase

Bio: A. Haase is an academic researcher from University of Wuppertal. The author has contributed to research in topics: Scattering & Scattering length. The author has an hindex of 1, co-authored 1 publications receiving 155 citations.

Papers
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Journal ArticleDOI
TL;DR: In this paper, a general expression for the kinematic scattering cross-section of X-rays and neutrons impinging on an arbitrary interfacial structure is derived based on the distorted wave Born approximation.

161 citations


Cited by
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Journal ArticleDOI
24 Feb 2000-Nature
TL;DR: A simple electrostatic technique is reported that creates and replicates lateral structures in polymer films on a submicrometre length scale, based on the fact that dielectric media experience a force in an electric field gradient.
Abstract: The wavelength of light represents a fundamental technological barrier to the production of increasingly smaller features on integrated circuits. New technologies that allow the replication of patterns on scales less than 100 nm need to be developed if increases in computing power are to continue at the present rate. Here we report a simple electrostatic technique that creates and replicates lateral structures in polymer films on a submicrometre length scale. Our method is based on the fact that dielectric media experience a force in an electric field gradient. Strong field gradients can produce forces that overcome the surface tension in thin liquid films, inducing an instability that features a characteristic hexagonal order. In our experiments, pattern formation takes place in polymer films at elevated temperatures, and is fixed by cooling the sample to room temperature. The application of a laterally varying electric field causes the instability to be focused in the direction of the highest electric field. This results in the replication of a topographically structured electrode. We report patterns with lateral dimensions of 140 nm, but the extension of the technique to pattern replication on scales smaller than 100 nm seems feasible.

734 citations

Journal ArticleDOI
TL;DR: A review of the GISAXS technique, from experimental issues to the theories underlying the data analysis, with a wealth of examples, can be found in this paper, where the authors introduce the notions of particle form factor and interference function, together with the different cases encountered according to the size/shape dispersion.

717 citations

Journal ArticleDOI
TL;DR: In this article, a review of the general requirements for process integration and material properties of low-k dielectrics are discussed, focusing on the challenge in developing materials with low dielectric constant but strong thermomechanical properties.
Abstract: ▪ Abstract As integrated circuit (IC) dimensions continue to decrease, RC delay, crosstalk noise, and power dissipation of the interconnect structure become limiting factors for ultra-large-scale integration of integrated circuits. Materials with low dielectric constant are being developed to replace silicon dioxide as interlevel dielectrics. In this review, the general requirements for process integration and material properties of low-k dielectrics are first discussed. The discussion is focused on the challenge in developing materials with low dielectric constant but strong thermomechanical properties. This is followed by a description of the material characterization techniques, including several recently developed for porous materials. Finally, the material characteristics of candidate low-k dielectrics will be discussed to illustrate their structure-property relations.

372 citations

Journal ArticleDOI
24 Feb 2000-Nature
TL;DR: A large decrease of up to 75% in the surface energy of submicrometre waves is observed that cannot be explained by capillary theory, but is in accord with the effects arising from the non-locality of attractive intermolecule interactions as predicted by a recent density functional theory.
Abstract: Liquid-vapour interfaces, particularly those involving water, are common in both natural and artificial environments. They were first described as regions of continuous variation of density, caused by density fluctuations within the bulk phases. In contrast, the more recent capillary-wave models assumes a step-like local density profile across the liquid-vapour interface, whose width is the result of the propagation of thermally excited capillary waves. The model has been validated for length scales of tenths of micrometres and larger, but the structure of liquid surfaces on submicrometre length scales--where the capillary theory is expected to break down--remains poorly understood. Here we report grazing-incidence X-ray scattering experiments that allow for a complete determination of the free surface structure and surface energy for water and a range of organic liquids. We observe a large decrease of up to 75% in the surface energy of submicrometre waves that cannot be explained by capillary theory, but is in accord with the effects arising from the non-locality of attractive intermolecule interactions as predicted by a recent density functional theory. Our data, and the results of comparable measurements on liquid solutions, metallic alloys, surfactants, lipids and wetting films should thus provide a stringent test for any new theories that attempt to describe the structure of liquid interfaces with nanometre-scale resolution.

220 citations

Journal ArticleDOI
TL;DR: In this article, the authors review both theoretical and experimental studies of atomistic configurations at solid-liquid interfaces, focusing on the issue of ordering in the liquid adjacent to crystalline solids.
Abstract: ▪ Abstract Interfaces between solids and liquids are important for a range of materials processes, including soldering and brazing, liquid-phase sintering, crystal growth, and lubrication. There is a wealth of fundamental studies on solid-liquid interfaces in materials, primarily focused on thermodynamics (relative interface energies and segregation effects) from high-temperature wetting experiments, which is often applied to processing design. Less is known about the atomistic structure at solid-liquid interfaces, mainly because of the difficulty involved in obtaining such information experimentally. This work reviews both theoretical and experimental studies of atomistic configurations at solid-liquid interfaces, focusing on the issue of ordering in the liquid adjacent to crystalline solids.

149 citations