A. Sanli Ergun

Bio: A. Sanli Ergun is an academic researcher from Stanford University. The author has contributed to research in topics: Capacitive micromachined ultrasonic transducers & Ultrasonic sensor. The author has an hindex of 6, co-authored 9 publications receiving 157 citations.

Air-coupled nondestructive evaluation using micromachined ultrasonic transducers

Abstract: Nondestructive evaluation techniques which use conventional piezoelectric transducers typically require liquid coupling fluids to improve the impedance mismatch between piezoelectric materials and air. Air-coupled ultrasonic systems can eliminate this requirement if the dynamic range of the system is large enough such that the losses at the air-solid interfaces are tolerable. Capacitive micromachined ultrasonic transducers (cMUTs) have been shown to have more than 100 dB dynamic range when used in bistatic transmission mode. This dynamic range, along with the ability to transmit ultrasound efficiently into air, makes cMUTs ideally suited for air-coupled nondestructive evaluation applications. These transducers can be used either in through transmission experiments at normal incidence to the sample or to excite and detect guided waves in aluminum and composite plates. In this paper, we present results of a pitch-catch transmission system using cMUTs that achieves a dynamic range in excess of 100 dB. The pair of transducers is modeled with an equivalent electrical circuit which predicts the transmission system's insertion loss and dynamic range. We also demonstrate the feasibility of Lamb wave defect detection for one-sided nondestructive evaluation applications. A pair of cMUTs excites and detects the so mode in a 1.2 mm-thick aluminum plate with a received signal-to-noise ratio of 28 dB without signal averaging.

Wideband micromachined capacitive microphones with radio frequency detection

Abstract: Silicon microphones based on capacitive micromachined ultrasonic transducer membranes and radio frequency detection overcome many of the limitations in bandwidth, uniformity of response, and durability associated with micromachined condenser microphones. These membranes are vacuum-sealed to withstand submersion in water and have a flat mechanical response from dc up to ultrasonic frequencies. However, a sensitive radio frequency detection scheme is necessary to detect the small changes in membrane displacement that result from utilizing small membranes. In this paper we develop a mathematical model for calculating the expected output signal and noise level and verifies the model with measurements on a fabricated microphone. Measurements on a sensor with 1.3 mm2 area demonstrate less than 0.5 dB variation in the output response between 0.1 Hz to 100 kHz under electrostatic actuation and an A-weighted equivalent noise level of 63.6 dB(A) SPL in the audio band. Because the vacuum-sealed membrane structure has a low mechanical noise floor, there is the potential for improved sensitivity using higher carrier frequencies and more sophisticated detection circuitry.

Integrated ultrasound imaging systems based on capacitive micromachined ultrasonic transducer arrays

Abstract: Capacitive micromachined ultrasonic transducers (CMUTs) overcome many limitations of existing ultrasound transducer technologies enabling new applications of ultrasound, especially for medical imaging and treatment. Some of the most important of these advancements are the ability to fabricate transducer arrays with two dimensional geometries and high operating frequencies. Over the past decade, extensive research has been conducted on the fabrication, characterization, and modelling of CMUTs. Current research efforts focus on the integration of CMUTs in systems for new medical imaging tools. This paper briefly reviews CMUT technology and presents imaging results from two CMUT-based imaging systems. The first system is designed for use within a 5-mm endoscopic channel and is based on a two dimensional, 16-element times 16-element, 5-MHz CMUT array. To provide a means of integrating the CMUT array with electronics, each element of the array is connected to a flip-chip bond pad on the back side of the array via a through-wafer interconnect. The array is flip-chip bonded to a custom-designed integrated circuit (IC) that comprises the frontend circuitry for the transducer elements. The array and IC are connected to an FPGA-based data acquisition system that can acquire volumetric imaging data in real time. Volumetric pulse-echo and photoacoustic images obtained with this system are presented. The second system is based on a 64-element, 20-MHz, 2-mm diameter CMUT ring array. This array is also designed for use in catheter-based imaging applications. Ring arrays have the advantage of providing space in the center for a guidewire or other catheter-based instrument. Volumetric images obtained with the ring-array system are also presented

Capacitive Micromachined Ultrasonic Transducer Arrays for Integrated Diagnostic/Therapeutic Catheters

Abstract: In recent years, medical procedures have become increasingly non‐invasive. These include endoscopic procedures and intracardiac interventions (e.g., pulmonary vein isolation for treatment of atrial fibrillation and plaque ablation for treatment of arteriosclerosis). However, current tools suffer from poor visualization and difficult coordination of multiple therapeutic and imaging devices. Dual‐mode (imaging and therapeutic) ultrasound arrays provide a solution to these challenges. A dual‐mode transducer can provide focused, noncontact ultrasound suitable for therapy and can be used to provide high quality real‐time images for navigation and monitoring of the procedure. In the last decade, capacitive micromachined ultrasonic transducers (CMUTs), have become an attractive option for ultrasonic imaging systems due to their fabrication flexibility, improved bandwidth, and integration with electronics. The CMUT’s potential in therapeutic applications has also been demonstrated by surface output pressures as high as 1MPa peak to peak and continuous wave (CW) operation. This paper reviews existing interventional CMUT arrays, demonstrates the feasibility of CMUTs for high intensity focused ultrasound (HIFU), and presents a design for the next‐generation CMUTs for integrated imaging and HIFU endoscopic catheters.

Capacitive micromachined ultrasonic transducers: fabrication technology

Abstract: Capacitive micromachined ultrasonic transducer (MUT) technology is a prime candidate for next generation imaging systems. Medical and underwater imaging and the nondestructive evaluation (NDE) societies have expressed growing interest in cMUTs over the years. Capacitive micromachined ultrasonic transducer technology is expected to make a strong impact on imaging technologies, especially volumetric imaging, and to appear in commercial products in the near future. This paper focuses on fabrication technologies for cMUTs and reviews and compares variations in the production processes. We have developed two main approaches to the fabrication of cMUTs: the sacrificial release process and the recently introduced wafer-bonding method. This paper gives a thorough review of the sacrificial release processes, and it describes the new wafer-bonding method in detail. Process variations are compared qualitatively and quantitatively whenever possible. Through these comparisons, it was concluded that wafer-bonded cMUT technology was superior in terms of process control, yield, and uniformity. Because the number of steps and consequent process time were reduced (from six-mask process to four-mask process), turn-around time was improved significantly.

A Micromachined Dual-Backplate Capacitive Microphone for Aeroacoustic Measurements

Abstract: This paper presents the development of a micro-machined dual-backplate capacitive microphone for aeroacoustic measurements. The device theory, fabrication, and characterization are discussed. The microphone is fabricated using the five-layer planarized-polysilicon SUMMiT V process at Sandia National Laboratories. The microphone consists of a 0.46-mm-diameter 2.25-mum-thick circular diaphragm and two circular backplates. The diaphragm is separated from each backplate by a 2-mum air gap. Experimental characterization of the microphone shows a sensitivity of 390 muV/Pa. The dynamic range of the microphone interfaced with a charge amplifier extends from the noise floor of 41 dB/ radicHz up to 164 dB and the resonant frequency is 178 kHz.

Catheter for intravascular ultrasound and photoacoustic imaging

Abstract: A design and a fabrication method for an intravascular imaging and therapeutic catheters for combined ultrasound, photoacoustic, and elasticity imaging and for optical and/or acoustic therapy of hollow organs and diseased blood vessels and tissues are disclosed in the present invention. The invention comprises both a device—optical fiber-based intravascular catheter designs for combined IVUS/IVPA, and elasticity imaging and for acoustic and/or optical therapy—and a method of combined ultrasound, photoacoustic, and elasticity imaging and optical and/or acoustic therapy. The designs of the catheters are based on single-element catheter-based ultrasound transducers or on ultrasound array-based units coupled with optical fiber, fiber bundles or a combination thereof with specially designed light delivery systems. One approach uses the side fire fiber, similar to the one utilized for biomedical optical spectroscopy. The second catheter design uses the micro-optics in the manner of a probe for optical coherent tomography.

Lamb waves-based impact damage monitoring of a stiffened aircraft panel using piezoelectric transducers

Abstract: The growth of the use of composite materials to replace traditional materials as primary structures remains limited by the significant inspection costs that are required to detect the appearance of internal defects. Indeed, many different damage processes can be observed in such kinds of heterogeneous media. The present article defines an in situ and nondestructive method for the impact damage monitoring of carbon/epoxy laminated composites. This structural health monitoring (SHM) method aims to improve the operational safety of the structure using integrated piezoelectric sensors. We describe the propagation of Lamb waves inside a stiffened aeronautical structure, and the definition of associated data processing systems. The detection of realistic defects thanks to the definition of a damaging parameter, based on the real time analysis of the ultrasonic signatures transmitted inside the structure is outlined.