scispace - formally typeset
Search or ask a question
Author

Akiko Harasaki

Bio: Akiko Harasaki is an academic researcher from University of Arizona. The author has contributed to research in topics: Interferometry & White light interferometry. The author has an hindex of 4, co-authored 4 publications receiving 496 citations.

Papers
More filters
Journal ArticleDOI
TL;DR: A method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution ofphase-sh shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase- Shifting Interferometry is described.
Abstract: We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus frame of the correlogram acquired through vertical scanning. The two surface profiles retrieved from the phase and the modulation contrast of the correlograms are compared in the phase-unwrapping process to remove fringe-order ambiguity.

289 citations

Journal ArticleDOI
TL;DR: An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described.
Abstract: An interference fringe modulation skewing effect in white-light vertical scanning interferometry that can produce a batwings artifact in a step height measurement is described. The skewing occurs at a position on or close to the edge of a step in the sample under measurement when the step height is less than the coherence length of the light source used. A diffraction model is used to explain the effect.

174 citations

Journal ArticleDOI
TL;DR: It is shown theoretically and experimentally that the strong linear dependence of the dispersion of the phase change on reflection preserves the shape of the coherence envelope of the fringes but shifts it along the optical axis by approximately 10-40 nm for metallic surfaces.
Abstract: Different materials with different phase changes on reflection affect the surface-height measurement when interferometric techniques are employed for testing objects constructed of different materials that are adjacent to one another. We test the influence of this phase change on reflection when vertical scanning interferometry with a broadband source is used. We show theoretically and experimentally that the strong linear dependence of the dispersion of the phase change on reflection preserves the shape of the coherence envelope of the fringes but shifts it along the optical axis by approximately 10–40 nm for metallic surfaces.

58 citations

Proceedings ArticleDOI
05 Jun 2001
TL;DR: In this article, the authors proposed a method for obtaining better quality data when testing samples that have both high and low reflectivity areas, such as ball grid arrays on a low-reflective substrate or a silver step on a glass substrate.
Abstract: Non-contact, high precision interferometric techniques like phase shifting interferometry (PSI), vertical scanning interferometry (VSI) and a VSI and PSI combination are commonly used for surface topography measurement. In order to obtain quality object surface data these techniques rely on both high fringe contrast and maximum intensity, which occur when the beams reflected from the reference and object surfaces are of equal intensity and when the fringe maxima are close to the saturation level of the detector. However, these conditions are difficult to attain when testing objects that have both high and low reflectance within the tested area such as ball grid arrays on a low-reflective substrate or a silver step on a glass substrate. Our proposals allow for obtaining better quality data when testing samples that have both high and low reflectivity areas. Separate modifications are suggested first for samples with different areas of reflectivity that are significantly separated in the vertical direction and second for samples with different reflectivity areas separated by less than about 10 microns in the vertical direction.

4 citations


Cited by
More filters
Journal Article
TL;DR: In this article, a self-scanned 1024 element photodiode array and a minicomputer are used to measure the phase (wavefront) in the interference pattern of an interferometer to lambda/100.
Abstract: A self-scanned 1024 element photodiode array and minicomputer are used to measure the phase (wavefront) in the interference pattern of an interferometer to lambda/100. The photodiode array samples intensities over a 32 x 32 matrix in the interference pattern as the length of the reference arm is varied piezoelectrically. Using these data the minicomputer synchronously detects the phase at each of the 1024 points by a Fourier series method and displays the wavefront in contour and perspective plot on a storage oscilloscope in less than 1 min (Bruning et al. Paper WE16, OSA Annual Meeting, Oct. 1972). The array of intensities is sampled and averaged many times in a random fashion so that the effects of air turbulence, vibrations, and thermal drifts are minimized. Very significant is the fact that wavefront errors in the interferometer are easily determined and may be automatically subtracted from current or subsequent wavefrots. Various programs supporting the measurement system include software for determining the aperture boundary, sum and difference of wavefronts, removal or insertion of tilt and focus errors, and routines for spatial manipulation of wavefronts. FFT programs transform wavefront data into point spread function and modulus and phase of the optical transfer function of lenses. Display programs plot these functions in contour and perspective. The system has been designed to optimize the collection of data to give higher than usual accuracy in measuring the individual elements and final performance of assembled diffraction limited optical systems, and furthermore, the short loop time of a few minutes makes the system an attractive alternative to constraints imposed by test glasses in the optical shop.

1,300 citations

Journal ArticleDOI
TL;DR: A method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution ofphase-sh shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase- Shifting Interferometry is described.
Abstract: We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus frame of the correlogram acquired through vertical scanning. The two surface profiles retrieved from the phase and the modulation contrast of the correlograms are compared in the phase-unwrapping process to remove fringe-order ambiguity.

289 citations

Journal ArticleDOI
TL;DR: Recent advances considered here include performance improvements, vibration robustness, full color imaging, accommodation of highly sloped surfaces, correlation to contact methods, transparent film analysis, and international standardization of calibration and specification.
Abstract: Interference microscopy plays a central role in noncontact strategies for process development and quality control, providing full 3D measurement of surface characteristics that influence the functional behavior of manufactured parts. Here I briefly review the history and principles of this important technique, then concentrate on the details of hardware, software, and applications of interference microscopy using phase-shifting and coherence scanning measurement principles. Recent advances considered here include performance improvements, vibration robustness, full color imaging, accommodation of highly sloped surfaces, correlation to contact methods, transparent film analysis, and international standardization of calibration and specification.

283 citations

Journal ArticleDOI
03 Jun 2011-Wear
TL;DR: In this article, the effects of surface texturing on improving the tribological properties of sliding assemblies are analyzed, and the other influences of surface topography are mentioned in this paper, and various methods of their description are compared.

281 citations

Journal ArticleDOI
TL;DR: Though far from extensive, this article has been devoted to study the common methods used for the characterization of the hydrogels and to review the range of applications of the same in health care.
Abstract: Hydrogels are cross-linked polymeric networks, which have the ability to hold water within the spaces available among the polymeric chains. The hydrogels have been used extensively in various biomedical applications, e.g., drug delivery, cell carriers and/or entrapment, wound management and tissue engineering. Though far from extensive, this article has been devoted to study the common methods used for the characterization of the hydrogels and to review the range of applications of the same in health care.

269 citations