Ali Shajii

TL;DR: In this article, the authors present a system for dividing a single mass flow, including an inlet adapted to receive the one mass flow and at least two flow lines connected to the inlet.

TL;DR: A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow control valve that is relatively insensitive to fluctuations in input pressure as discussed by the authors, where the measured pressure is used to compensate the measured inlet flow rate and to produce a compensated measure of the outlet flow rate.

TL;DR: A mass flow controller includes a network interface port and interface software that provides direct access to the mass flow controllers as discussed by the authors, and diagnostic software that permits a technician to execute diagnostics through the network interface ports.

TL;DR: In this article, a mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator to compute the time derivative of gas flow into the receptacle.

TL;DR: A mass flow controller as mentioned in this paper is an electronic controller that provides a web server that allows access to the web server through such interworking networks as the Internet, such as the internet.