C
C. Courteille
Researcher at École Polytechnique Fédérale de Lausanne
Publications - 10
Citations - 348
C. Courteille is an academic researcher from École Polytechnique Fédérale de Lausanne. The author has contributed to research in topics: Particle & Silane. The author has an hindex of 8, co-authored 10 publications receiving 342 citations.
Papers
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Journal ArticleDOI
Particle agglomeration study in rf silane plasmas: In situ study by polarization-sensitive laser light scattering
C. Courteille,Christoph Hollenstein,J.-L. Dorier,W. Schwarzenbach,Alan Howling,Enric Bertran,G. Viera,Rodrigo Martins,A. Maçarico +8 more
TL;DR: In this article, the authors used a Brownian free molecule coagulation model to determine the time evolution of particle size and their number density in situ multi-angle polarization-sensitive laser light scattering.
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Anionic clusters in dusty hydrocarbon and silane plasmas
TL;DR: In this paper, measurements of anions and cations are reported for hydrocarbon and silane radio frequency capacitive glow discharges. And the general role of anion in particle formation is discussed in the light of these experiments.
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Silicon oxide particle formation in RF plasmas investigated by infrared absorption spectroscopy and mass spectrometry
Ch. Hollenstein,Alan Howling,C. Courteille,D. Magni,S. M. Scholz,Gmw Gerrit Kroesen,N Niek Simons,de W Zeeuw,W Schwarzenbach +8 more
TL;DR: In situ Fourier transform infrared absorption spectroscopy has been used to study the composition of particles formed and suspended in radio-frequency discharges of silane-oxygen-argon gas mixtures.
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Partial-depth modulation study of anions and neutrals in low-pressure silane plasmas
TL;DR: In this paper, partial-depth modulation of the rf power in a capacitive discharge is used to investigate the relative importance of negative ions and neutral radicals for particle formation in low-power low-pressure silane plasmas.
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From molecules to particles in Silane plasmas
TL;DR: Particle formation has been investigated experimentally from the initial molecular precursors up to the final micron-sized particles in a low pressure silane rf capacitive discharge.