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C. L. Muhlstein

Bio: C. L. Muhlstein is an academic researcher from University of California, Berkeley. The author has contributed to research in topics: Brittleness & Cyclic stress. The author has an hindex of 2, co-authored 2 publications receiving 241 citations.

Papers
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TL;DR: In this paper, 12 thin-film single crystal silicon specimens were tested to failure in a controlled air environment (30/spl +mn/0.1/spl deg/C, 50/spl plusmn/2% relative humidity). Damage accumulation and failure of the notched cantilever beams were monitored electrically during the fatigue life test.
Abstract: When subjected to alternating stresses, most materials degrade, e.g., suffer premature failure, due to a phenomenon known as fatigue. It is generally accepted that in brittle materials, such as ceramics, fatigue can only take place in toughened solids, i.e., premature fatigue failure would not be expected in materials such as single crystal silicon. The results of this study, however, appear to be at odds with the current understanding of brittle material fatigue. Twelve thin-film (/spl sim/20 /spl mu/m thick) single crystal silicon specimens were tested to failure in a controlled air environment (30/spl plusmn/0.1/spl deg/C, 50/spl plusmn/2% relative humidity). Damage accumulation and failure of the notched cantilever beams were monitored electrically during the "fatigue life" test. Specimen lives ranged from about 10 s to 48 days, or 1/spl times/106 to 1/spl times/1011 cycles before failure over stress amplitudes ranging from approximately 4 to 10 GPa. A variety of mechanisms are discussed in light of the fatigue life data and fracture surface evaluation.

227 citations

Journal ArticleDOI
TL;DR: In this paper, the authors reported that the fatigue failure of polycrystalline polysilicon is reported in the present work, based on tests on thirteen thin-film (2 μm) specimens cycled to failure in laboratory air (∼25°C, 30-50% relative humidity), where damage accumulation and failure of the notched cantilever beams were monitored electrically during the test.
Abstract: When subjected to alternating stresses, most materials degrade, e.g., suffer premature failure, due to a phenomenon known as fatigue . It is generally accepted that in brittle materials, such as ceramics, cyclic fatigue can only take place where there is some degree of toughening, implying that premature fatigue failure would not be expected in polycrystalline silicon where such toughening is absent. However, the fatigue failure of polysilicon is reported in the present work, based on tests on thirteen thin-film (2 μm thick) specimens cycled to failure in laboratory air (∼25°C, 30-50% relative humidity), where damage accumulation and failure of the notched cantilever beams were monitored electrically during the test. Specimen lives ranged from about 10 seconds to 34 days (5 × 10 5 to 1 × 10 11 cycles) with the stress amplitude at failure being reduced to ∼50% of the low-cycle strength for lives in excess of 10 9 cycles.

24 citations


Cited by
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Journal ArticleDOI
TL;DR: In this article, a study of high-cycle fatigue in 2um thick structural films of n+-type, polycrystalline silicon for MEMS applications was made and the results showed that high cycle fatigue was present in 2.

237 citations

Journal ArticleDOI
TL;DR: In this paper, the authors describe the design of, and the effects of basic environmental parameters on, a microelectromechanical (MEMS) hydrogen sensor, which contains an array of 10 micromachined cantilever beams.
Abstract: This paper describes the design of, and the effects of basic environmental parameters on, a microelectromechanical (MEMS) hydrogen sensor. The sensor contains an array of 10 micromachined cantilever beams. Each cantilever is 500 μm wide×267 μm long×2 μm thick and has a capacitance readout capable of measuring cantilever deflection to within 1 nm. A 20-nm-thick coating of 90% palladium–10% nickel bends some of the cantilevers in the presence of hydrogen. The palladium–nickel coatings are deposited in ultra-high-vacuum (UHV) to ensure freedom from a “relaxation” artifact apparently caused by oxidation of the coatings. The sensor consumes 84 mW of power in continuous operation, and can detect hydrogen concentrations between 0.1 and 100% with a roughly linear response between 10 and 90% hydrogen. The response magnitude decreases with increasing temperature, humidity, and oxygen concentration, and the response time decreases with increasing temperature and hydrogen concentration. The 0–90% response time of an unheated cantilever to 1% hydrogen in air is about 90 s at 25 °C and 0% humidity.

231 citations

Journal ArticleDOI
TL;DR: It is demonstrated how electrolyte additives can heal electrode cracks and provide strategies to enhance the fracture resistance in future lithium-ion batteries from surface chemical, electrochemical and material science perspectives.
Abstract: Long-term durability is a major obstacle limiting the widespread use of lithium-ion batteries in heavy-duty applications and others demanding extended lifetime. As one of the root causes of the degradation of battery performance, the electrode failure mechanisms are still unknown. In this paper, we reveal the fundamental fracture mechanisms of single-crystal silicon electrodes over extended lithiation/delithiation cycles, using electrochemical testing, microstructure characterization, fracture mechanics and finite element analysis. Anisotropic lithium invasion causes crack initiation perpendicular to the electrode surface, followed by growth through the electrode thickness. The low fracture energy of the lithiated/unlithiated silicon interface provides a weak microstructural path for crack deflection, accounting for the crack patterns and delamination observed after repeated cycling. On the basis of this physical understanding, we demonstrate how electrolyte additives can heal electrode cracks and provide strategies to enhance the fracture resistance in future lithium-ion batteries from surface chemical, electrochemical and material science perspectives.

202 citations

Journal ArticleDOI
TL;DR: In this article, the development of tensile and bending testing techniques using microelectromechanical systems (MEMS) along with the experimental results on nanoscale aluminum specimens are discussed.
Abstract: Thin films at the micrometer and submicrometer scales exhibit mechanical properties that are different than those of bulk polycrystals. Industrial application of these materials requires accurate mechanical characterization. Also, a fundamental understanding of the deformation processes at smaller length scales is required to exploit the size and interface effects to develop new and technologically attractive materials. Specimen fabrication, small-scale force and displacement generation, and high resolution in the measurements are generic challenges in microscale and nanoscale mechanical testing. In this paper, we review small-scale materials testing techniques with special focus on the application of microelectromechanical systems (MEMS). Small size and high force and displacement resolution make MEMS suitable for small-scale mechanical testing. We discuss the development of tensile and bending testing techniques using MEMS, along with the experimental results on nanoscale aluminum specimens.

191 citations

Journal ArticleDOI
TL;DR: In this article, a 2-μm-thick polycrystalline silicon cantilever beams exhibited a time-delayed failure that was accompanied by a continuous increase in the compliance of the specimen.
Abstract: To evaluate the long-term durability properties of materials for microelectromechanical systems (MEMS), the stress-life ( S / N ) cyclic fatigue behavior of a 2-μm thick polycrystalline silicon film was evaluated in laboratory air using an electrostatically actuated notched cantilever beam resonator. A total of 28 specimens were tested for failure under high frequency (∼40 kHz) cyclic loads with lives ranging from about 10 s to 34 days (3×10 5 to 1.2×10 11 cycles) over fully reversed, sinusoidal stress amplitudes varying from ∼2.0 to 4.0 GPa. The thin-film polycrystalline silicon cantilever beams exhibited a time-delayed failure that was accompanied by a continuous increase in the compliance of the specimen. This apparent cyclic fatigue effect resulted in an endurance strength, at greater than 10 9 cycles, of ∼2 GPa, i.e. roughly one-half of the (single cycle) fracture strength. Based on experimental and numerical results, the fatigue process is attributed to a novel mechanism involving the environmentally-assisted cracking of the surface oxide film (termed reaction-layer fatigue). These results provide the most comprehensive, high-cycle, endurance data for designers of polysilicon micromechanical components available to date.

170 citations