Carlo Magro

TL;DR: An approach is proposed for removing the wavefront curvature introduced by the microscope imaging objective in digital holography, which otherwise hinders the phase contrast imaging at reconstruction planes and it is shown that a correction effect can be obtained at all reconstruction planes.

TL;DR: Digital holography is proposed as a non-contact method for the inspection and characterization of MEMS and can be useful for assessing the fabrication process and the functionality as well as the reliability of micromachined structures.

TL;DR: The high sensitivity of the proposed method enables us to precisely determine the structure morphology and calculate the intrinsic stress and bending moment, in good agreement with an analytical model, and can be exploited to assess the fabrication process and the functionality as well as the reliability of micromachined structures.

TL;DR: In this article, the use of digital holography (DH) as a metrological tool for inspection and characterization of MEMS structures was proposed, which can be efficiently employed to assess the fabrication process of micro structures as well as to test their behaviour in operative conditions.

TL;DR: In this article, a galvanic-isolated coupling of circuit portions is accomplished on the basis of a stacked chip configuration, which can be fabricated on any appropriate process technology, thereby incorporating one or more coupling elements, such as primary or secondary coils of a micro transformer, wherein the final characteristics of the micro transformer are adjusted during the wafer bond process.