scispace - formally typeset
Search or ask a question
Author

Chenming Hu

Other affiliations: Motorola, National Chiao Tung University, Semtech  ...read more
Bio: Chenming Hu is an academic researcher from University of California, Berkeley. The author has contributed to research in topics: MOSFET & Gate oxide. The author has an hindex of 119, co-authored 1296 publications receiving 57264 citations. Previous affiliations of Chenming Hu include Motorola & National Chiao Tung University.
Topics: MOSFET, Gate oxide, CMOS, Gate dielectric, Transistor


Papers
More filters
Journal ArticleDOI
TL;DR: In this article, the effects of surface treatment before the cap dielectric deposition on low-k surface damage and Cu surface cleaning were systematically investigated, and the results showed that the optimized NH"3 plasma condition such as high RF power and high pressure exhibited the high efficiency for oxygen removal from the Cu surface without increasing the k-value of low k film.

12 citations

Proceedings ArticleDOI
15 Jun 2004
TL;DR: The first 45nm node planar-SOI technology has been developed with 6T-SRAM cell of 0.296 /spl mu/m/sup 2/. An adequate static noise margin of 120mV is obtained even at 0.6V operation as discussed by the authors.
Abstract: The first 45nm node planar-SOI technology has been developed with 6T-SRAM cell of 0.296 /spl mu/m/sup 2/. An adequate static noise margin of 120mV is obtained even at 0.6V operation. Fine patterning with line pitch of 130nm and contact pitch of 140nm by optical lithography is demonstrated. Transistors with 30nm gate length and 27nm slim spacer operate at 1V/0.85V with excellent drive currents of 1000/740 and 530/420 /spl mu/A//spl mu/m for N-FET and P-FET, respectively. The P-FET current is the best reported so far.

12 citations

Journal ArticleDOI
TL;DR: In this paper, the metal T-gate structure in FD-SOI MOSFETs was investigated from the RF perspective, and the results revealed that the T-gated structure results in an extra 40% and 80% increase in the parasitic capacitances C/sub gs/ and C/ sub gd/ respectively.
Abstract: The metal T-gate structure in fully-depleted (FD) silicon-on-insulator (SOI) MOSFET's is investigated from the RF perspective. With the expected low gate resistance R/sub G/, the metal T-gate FD-SOI MOSFET achieves a higher f/sub max/ of 67 GHz as compared with 12.5 GHz in the silicided polysilicon gate counterpart. However, the metal T-gate FD-SOI MOSFET has a lower f/sub T/ of 35 GHz as compared with 44 GHz for the self-aligned polysilicon gate. The extracted parameters reveal that the T-gate structure results in an extra 40% and 80% increase in the parasitic capacitances C/sub gs/ and C/sub gd/ respectively. The metal gate structure together with the source-drain structure have to be co-optimized to boost the RF performance of FD-SOI MOSFET. A simple guideline to optimize the structure is included.

12 citations

Proceedings ArticleDOI
03 Oct 1994
TL;DR: In this article, the authors compared the performance of silicon-on-insulator (SOI) starting wafers to that of bulk CMOS. And they found that the SOI performance and yield were comparable to the conventional CMOS and the SIMO material.
Abstract: As it becomes more difficult to increase MOSFET current drive through standard scaling techniques, other methods to improve performance are being pursued. One such technique is to use silicon-on-insulator (SOI) starting wafers. Performance enhancements using SOI have been demonstrated by a number of authors. Most of the reported work has used SIMOX material. Bonded SOI material is an alternative to SIMOX, which potentially has lower material defect density. The purpose of this work was to compare bonded SOI performance and yield to that of bulk CMOS.

12 citations

Journal ArticleDOI
Chenming Hu1, M. B. Small1, Paul S. Ho1
TL;DR: In this paper, mass transport by electromigration in sputtered Cu line segments on a continuous W line has been measured using the drift velocity technique at temperatures from 166 to 396 °C.
Abstract: Mass transport by electromigration in sputtered Cu line segments on a continuous W line has been measured using the drift velocity technique at temperatures from 166 to 396 °C. The Ta/Cu/Ta line segments are patterned by dry etching techniques. Cu mass depletion (voids) at the cathode end and accumulation (hillocks) at the anode were measured as a function of time from scanning electron microscope micrographs. The edge displacement of Cu was found to increase linearly with time. The activation energy for Cu electromigration drift velocity, which relates to the product of effective charge number and diffusivity, Z*D, is found to be 0.6 eV.

12 citations


Cited by
More filters
Journal ArticleDOI

[...]

08 Dec 2001-BMJ
TL;DR: There is, I think, something ethereal about i —the square root of minus one, which seems an odd beast at that time—an intruder hovering on the edge of reality.
Abstract: There is, I think, something ethereal about i —the square root of minus one. I remember first hearing about it at school. It seemed an odd beast at that time—an intruder hovering on the edge of reality. Usually familiarity dulls this sense of the bizarre, but in the case of i it was the reverse: over the years the sense of its surreal nature intensified. It seemed that it was impossible to write mathematics that described the real world in …

33,785 citations

28 Jul 2005
TL;DR: PfPMP1)与感染红细胞、树突状组胞以及胎盘的单个或多个受体作用,在黏附及免疫逃避中起关键的作�ly.
Abstract: 抗原变异可使得多种致病微生物易于逃避宿主免疫应答。表达在感染红细胞表面的恶性疟原虫红细胞表面蛋白1(PfPMP1)与感染红细胞、内皮细胞、树突状细胞以及胎盘的单个或多个受体作用,在黏附及免疫逃避中起关键的作用。每个单倍体基因组var基因家族编码约60种成员,通过启动转录不同的var基因变异体为抗原变异提供了分子基础。

18,940 citations

Journal ArticleDOI
TL;DR: In this paper, a review of the literature in the area of alternate gate dielectrics is given, based on reported results and fundamental considerations, the pseudobinary materials systems offer large flexibility and show the most promise toward success.
Abstract: Many materials systems are currently under consideration as potential replacements for SiO2 as the gate dielectric material for sub-0.1 μm complementary metal–oxide–semiconductor (CMOS) technology. A systematic consideration of the required properties of gate dielectrics indicates that the key guidelines for selecting an alternative gate dielectric are (a) permittivity, band gap, and band alignment to silicon, (b) thermodynamic stability, (c) film morphology, (d) interface quality, (e) compatibility with the current or expected materials to be used in processing for CMOS devices, (f) process compatibility, and (g) reliability. Many dielectrics appear favorable in some of these areas, but very few materials are promising with respect to all of these guidelines. A review of current work and literature in the area of alternate gate dielectrics is given. Based on reported results and fundamental considerations, the pseudobinary materials systems offer large flexibility and show the most promise toward success...

5,711 citations

Book
01 Jan 1999
TL;DR: The analysis and design techniques of CMOS integrated circuits that practicing engineers need to master to succeed can be found in this article, where the authors describe the thought process behind each circuit topology, but also consider the rationale behind each modification.
Abstract: The CMOS technology area has quickly grown, calling for a new text--and here it is, covering the analysis and design of CMOS integrated circuits that practicing engineers need to master to succeed. Filled with many examples and chapter-ending problems, the book not only describes the thought process behind each circuit topology, but also considers the rationale behind each modification. The analysis and design techniques focus on CMOS circuits but also apply to other IC technologies. Table of contents 1 Introduction to Analog Design 2 Basic MOS Device Physics 3 Single-Stage Amplifiers 4 Differential Amplifiers 5 Passive and Active Current Mirrors 6 Frequency Response of Amplifiers 7 Noise 8 Feedback 9 Operational Amplifiers 10 Stability and Frequency Compensation 11 Bandgap References 12 Introduction to Switched-Capacitor Circuits 13 Nonlinearity and Mismatch 14 Oscillators 15 Phase-Locked Loops 16 Short-Channel Effects and Device Models 17 CMOS Processing Technology 18 Layout and Packaging

4,826 citations

Journal ArticleDOI
TL;DR: Nanocrystals (NCs) discussed in this Review are tiny crystals of metals, semiconductors, and magnetic material consisting of hundreds to a few thousand atoms each that are among the hottest research topics of the last decades.
Abstract: Nanocrystals (NCs) discussed in this Review are tiny crystals of metals, semiconductors, and magnetic material consisting of hundreds to a few thousand atoms each. Their size ranges from 2-3 to about 20 nm. What is special about this size regime that placed NCs among the hottest research topics of the last decades? The quantum mechanical coupling * To whom correspondence should be addressed. E-mail: dvtalapin@uchicago.edu. † The University of Chicago. ‡ Argonne National Lab. Chem. Rev. 2010, 110, 389–458 389

3,720 citations