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Author

Chenming Hu

Other affiliations: Motorola, National Chiao Tung University, Semtech  ...read more
Bio: Chenming Hu is an academic researcher from University of California, Berkeley. The author has contributed to research in topics: MOSFET & Gate oxide. The author has an hindex of 119, co-authored 1296 publications receiving 57264 citations. Previous affiliations of Chenming Hu include Motorola & National Chiao Tung University.
Topics: MOSFET, Gate oxide, CMOS, Gate dielectric, Transistor


Papers
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Patent
25 Apr 2003
TL;DR: A semiconductor device includes a region of semiconductor material with first and second isolation trenches formed therein this paper, where the first isolation trench is lined with a first material having a low oxygen diffusion rate and is filled with an insulating material.
Abstract: A semiconductor device includes a region of semiconductor material with first and second isolation trenches formed therein. The first isolation trench is lined with a first material having a low oxygen diffusion rate and is filled with an insulating material. The second isolation trench is not lined with the first material but is filled with an insulating material. A first transistor is formed adjacent the first isolation region and a second transistor formed adjacent the second isolation region.

150 citations

Proceedings ArticleDOI
01 Dec 1996
TL;DR: In this article, a sensitive and simple technique for parasitic interconnect capacitance measurement with 0.0l fF or 10 aF sensitivity is presented, based upon an efficient test structure design.
Abstract: In this paper, a sensitive and simple technique for parasitic interconnect capacitance measurement with 0.0l fF or 10 aF sensitivity is presented. This on-chip technique is based upon an efficient test structure design. No reference capacitor is needed. The measurement itself is also simple; only a DC current meter is required. We have applied this technique to extract various interconnect geometry capacitances, including the capacitance of a single Metal 2 over Metal 1 crossing, for an industrial double metal process.

150 citations

Patent
01 Dec 1994
TL;DR: In this paper, a DRAM device has a first semiconductor region (18) of one conductivity on the silicon film of a silicon-on-insulator substrate (22).
Abstract: A DRAM device has a first semiconductor region (18) of one conductivity on the silicon film of a silicon-on-insulator substrate (22). A second (16) and a third (14) semiconductor region of the opposite conductivity are formed in the first semiconductor region (18). A fourth semiconductor region (12) of the same conductivity type as the first semiconductor region (18) is formed within the second semiconductor region (16) with higher doping concentration. A insulating layer (11) is formed on the semiconductor surface. On top of the insulating layer (11), a gate electrode (10) is formed and is at least partially overlapped with the first (18), the second (16), the third (14), and the fourth (12) semiconductor region. A storage node (24) is formed in the first semiconductor region (18) between the second (16) and the third (14) semiconductor region where the information is stored. The amount of charge stored in the storage node (24) is controlled by a first transistor including the fourth semiconductor region (12), the second semiconductor region (16), the storage node (24), and the gate electrode (10).

149 citations

Journal ArticleDOI
Chenming Hu1, M. B. Small1, Paul S. Ho
TL;DR: In this article, the mass transport as a function of temperature was measured using a drift-velocity technique and the flux divergence at the stud contact was found to be responsible for formation of open failure in the interconnect structure.
Abstract: The electromigration characteristics and kinetics of damage formation for Al(Cu,Si) line segments on a continuous W line and Al(Cu)/W two‐level interconnect structures have been investigated. The mass transport as a function of temperature was measured using a drift‐velocity technique. The flux divergence at the line/stud contact was found to be responsible for formation of open failure in the interconnect structure, as shown by a direct correlation observed between mass depletion at the contact and resistance increase of the line/stud chain. The depletion of Al at the stud contact is preceded by an incubation period during which Cu is swept out a threshold distance from the cathode of the line. This leads to a damage formation process which is controlled by both Cu electromigration along grain boundaries and dissolution of the Al2Cu precipitates. This is distinctly different from single‐level interconnects measured using a conventional electromigration test site. Measurements of the mean failure lifetime...

149 citations

Journal ArticleDOI
TL;DR: In this paper, the authors reported a simple and accurate characterization method for the self-heating effect (SHE) in SOI MOSFETs, where the AC output conductance at a chosen bias point is measured at several frequencies to determine the thermal resistance and thermal capacitance associated with the SOI device.
Abstract: The buried-oxide in SOI MOSFET inhibits heat dissipation in the Si film and leads to increase in transistor temperature. This paper reports a simple and accurate characterization method for the self-heating effect (SHE) in SOI MOSFETs. The AC output conductance at a chosen bias point is measured at several frequencies to determine the thermal resistance (R/sub th/) and thermal capacitance (C/sub th/) associated with the SOI device. This methodology is important to remove the misleadingly large self-heating effect from the DC I-V data in device modeling. Not correcting for SHE may lead to significant error in circuit simulation. After SHE is accounted for, the frequency-dependent SHE may be disabled in circuit simulation without sacrificing the accuracy, thus providing faster circuit simulation for high-frequency circuits.

148 citations


Cited by
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Journal ArticleDOI

[...]

08 Dec 2001-BMJ
TL;DR: There is, I think, something ethereal about i —the square root of minus one, which seems an odd beast at that time—an intruder hovering on the edge of reality.
Abstract: There is, I think, something ethereal about i —the square root of minus one. I remember first hearing about it at school. It seemed an odd beast at that time—an intruder hovering on the edge of reality. Usually familiarity dulls this sense of the bizarre, but in the case of i it was the reverse: over the years the sense of its surreal nature intensified. It seemed that it was impossible to write mathematics that described the real world in …

33,785 citations

28 Jul 2005
TL;DR: PfPMP1)与感染红细胞、树突状组胞以及胎盘的单个或多个受体作用,在黏附及免疫逃避中起关键的作�ly.
Abstract: 抗原变异可使得多种致病微生物易于逃避宿主免疫应答。表达在感染红细胞表面的恶性疟原虫红细胞表面蛋白1(PfPMP1)与感染红细胞、内皮细胞、树突状细胞以及胎盘的单个或多个受体作用,在黏附及免疫逃避中起关键的作用。每个单倍体基因组var基因家族编码约60种成员,通过启动转录不同的var基因变异体为抗原变异提供了分子基础。

18,940 citations

Journal ArticleDOI
TL;DR: In this paper, a review of the literature in the area of alternate gate dielectrics is given, based on reported results and fundamental considerations, the pseudobinary materials systems offer large flexibility and show the most promise toward success.
Abstract: Many materials systems are currently under consideration as potential replacements for SiO2 as the gate dielectric material for sub-0.1 μm complementary metal–oxide–semiconductor (CMOS) technology. A systematic consideration of the required properties of gate dielectrics indicates that the key guidelines for selecting an alternative gate dielectric are (a) permittivity, band gap, and band alignment to silicon, (b) thermodynamic stability, (c) film morphology, (d) interface quality, (e) compatibility with the current or expected materials to be used in processing for CMOS devices, (f) process compatibility, and (g) reliability. Many dielectrics appear favorable in some of these areas, but very few materials are promising with respect to all of these guidelines. A review of current work and literature in the area of alternate gate dielectrics is given. Based on reported results and fundamental considerations, the pseudobinary materials systems offer large flexibility and show the most promise toward success...

5,711 citations

Book
01 Jan 1999
TL;DR: The analysis and design techniques of CMOS integrated circuits that practicing engineers need to master to succeed can be found in this article, where the authors describe the thought process behind each circuit topology, but also consider the rationale behind each modification.
Abstract: The CMOS technology area has quickly grown, calling for a new text--and here it is, covering the analysis and design of CMOS integrated circuits that practicing engineers need to master to succeed. Filled with many examples and chapter-ending problems, the book not only describes the thought process behind each circuit topology, but also considers the rationale behind each modification. The analysis and design techniques focus on CMOS circuits but also apply to other IC technologies. Table of contents 1 Introduction to Analog Design 2 Basic MOS Device Physics 3 Single-Stage Amplifiers 4 Differential Amplifiers 5 Passive and Active Current Mirrors 6 Frequency Response of Amplifiers 7 Noise 8 Feedback 9 Operational Amplifiers 10 Stability and Frequency Compensation 11 Bandgap References 12 Introduction to Switched-Capacitor Circuits 13 Nonlinearity and Mismatch 14 Oscillators 15 Phase-Locked Loops 16 Short-Channel Effects and Device Models 17 CMOS Processing Technology 18 Layout and Packaging

4,826 citations

Journal ArticleDOI
TL;DR: Nanocrystals (NCs) discussed in this Review are tiny crystals of metals, semiconductors, and magnetic material consisting of hundreds to a few thousand atoms each that are among the hottest research topics of the last decades.
Abstract: Nanocrystals (NCs) discussed in this Review are tiny crystals of metals, semiconductors, and magnetic material consisting of hundreds to a few thousand atoms each. Their size ranges from 2-3 to about 20 nm. What is special about this size regime that placed NCs among the hottest research topics of the last decades? The quantum mechanical coupling * To whom correspondence should be addressed. E-mail: dvtalapin@uchicago.edu. † The University of Chicago. ‡ Argonne National Lab. Chem. Rev. 2010, 110, 389–458 389

3,720 citations