Chittoor Parthasarathy

Bio: Chittoor Parthasarathy is an academic researcher from STMicroelectronics. The author has contributed to research in topics: Negative-bias temperature instability & Gate oxide. The author has an hindex of 16, co-authored 52 publications receiving 1946 citations. Previous affiliations of Chittoor Parthasarathy include Centre national de la recherche scientifique.

Review on high-k dielectrics reliability issues

Abstract: High-k gate dielectrics, particularly Hf-based materials, are likely to be implemented in CMOS advanced technologies. One of the important challenges in integrating these materials is to achieve lifetimes equal or better than their SiO/sub 2/ counterparts. In this paper we review the status of reliability studies of high-k gate dielectrics and try to illustrate it with experimental results. High-k materials show novel reliability phenomena related to the asymmetric gate band structure and the presence of fast and reversible charge. Reliability of high-k structures is influenced both by the interfacial layer as well as the high-k layer. One of the main issues is to understand these new mechanisms in order to asses the lifetime accurately and reduce them.

NBTI degradation: From transistor to SRAM arrays

Abstract: A novel composite model had been recently introduced to physically explain the mean pMOS threshold voltage shift (VTP) induced by NBTI degradation at transistor level in a quantitative way. This model is here extended to include the statistical variations introduced by intrinsic fluctuations. In a second time, the model is extrapolated up to SRAM arrays by analyzing the SRAM bitcell sensitivity to transistor degradation. This approach allows quantitative prediction of NBTI-induced VMIN variations and access time Taa degradation during burn-in operations. The key findings include (a) demonstration of non-normality of VTP shift distribution (b) NBTI contribution to product VMIN drift arises from both mean VTP drift but also from increased VTP dispersion, and (c) VTP shift non-normality is smoothed out at product level by time-zero variation of the six transistors of the SRAM bitcell.

Interface trap generation and hole trapping under NBTI and PBTI in advanced CMOS technology with a 2-nm gate oxide

Abstract: This paper gives an insight into the degradation mechanisms during negative and positive bias temperature instabilities in advanced CMOS technology with a 2-nm gate oxide. We focus on generated interface traps and oxide traps to distinguish their dependencies and effects on usual transistor parameters. negative bias temperature instability (NBTI) and positive bias temperature instability in both NMOS and PMOS have been compared and a possible explanation for all configurations has been suggested. Recovery and temperature effect under NBTI were also investigated showing different behaviors of the two components.

High dielectric constant gate oxides for metal oxide Si transistors

Abstract: The scaling of complementary metal oxide semiconductor transistors has led to the silicon dioxide layer, used as a gate dielectric, being so thin (14?nm) that its leakage current is too large It is necessary to replace the SiO2 with a physically thicker layer of oxides of higher dielectric constant (?) or 'high K' gate oxides such as hafnium oxide and hafnium silicate These oxides had not been extensively studied like SiO2, and they were found to have inferior properties compared with SiO2, such as a tendency to crystallize and a high density of electronic defects Intensive research was needed to develop these oxides as high quality electronic materials This review covers both scientific and technological issues?the choice of oxides, their deposition, their structural and metallurgical behaviour, atomic diffusion, interface structure and reactions, their electronic structure, bonding, band offsets, electronic defects, charge trapping and conduction mechanisms, mobility degradation and flat band voltage shifts The oxygen vacancy is the dominant electron trap It is turning out that the oxides must be implemented in conjunction with metal gate electrodes, the development of which is further behind Issues about work function control in metal gate electrodes are discussed

A 45nm Logic Technology with High-k+Metal Gate Transistors, Strained Silicon, 9 Cu Interconnect Layers, 193nm Dry Patterning, and 100% Pb-free Packaging

Abstract: A 45 nm logic technology is described that for the first time incorporates high-k + metal gate transistors in a high volume manufacturing process. The transistors feature 1.0 nm EOT high-k gate dielectric, dual band edge workfunction metal gates and third generation strained silicon, resulting in the highest drive currents yet reported for NMOS and PMOS. The technology also features trench contact based local routing, 9 layers of copper interconnect with low-k ILD, low cost 193 nm dry patterning, and 100% Pb-free packaging. Process yield, performance and reliability are demonstrated on 153 Mb SRAM arrays with SRAM cell size of 0.346 mum2, and on multiple microprocessors.

Power-Up SRAM State as an Identifying Fingerprint and Source of True Random Numbers

Abstract: Intermittently powered applications create a need for low-cost security and privacy in potentially hostile environments, supported by primitives including identification and random number generation. Our measurements show that power-up of SRAM produces a physical fingerprint. We propose a system of fingerprint extraction and random numbers in SRAM (FERNS) that harvests static identity and randomness from existing volatile CMOS memory without requiring any dedicated circuitry. The identity results from manufacture-time physically random device threshold voltage mismatch, and the random numbers result from runtime physically random noise. We use experimental data from high-performance SRAM chips and the embedded SRAM of the WISP UHF RFID tag to validate the principles behind FERNS. For the SRAM chip, we demonstrate that 8-byte fingerprints can uniquely identify circuits among a population of 5,120 instances and extrapolate that 24-byte fingerprints would uniquely identify all instances ever produced. Using a smaller population, we demonstrate similar identifying ability from the embedded SRAM. In addition to identification, we show that SRAM fingerprints capture noise, enabling true random number generation. We demonstrate that a 512-byte SRAM fingerprint contains sufficient entropy to generate 128-bit true random numbers and that the generated numbers pass the NIST tests for runs, approximate entropy, and block frequency.

FinFETs and Other Multi-Gate Transistors

Abstract: FinFETs and Other Multi-Gate Transistors provides a comprehensive description of the physics, technology and circuit applications of multigate field-effect transistors (FETs). It explains the physics and properties of these devices, how they are fabricated and how circuit designers can use them to improve the performances of integrated circuits. The International Technology Roadmap for Semiconductors (ITRS) recognizes the importance of these devices and places them in the "Advanced non-classical CMOS devices" category. Of all the existing multigate devices, the FinFET is the most widely known. FinFETs and Other Multi-Gate Transistors is dedicated to the different facets of multigate FET technology and is written by leading experts in the field.

A Primer on Hardware Security: Models, Methods, and Metrics

Abstract: The multinational, distributed, and multistep nature of integrated circuit (IC) production supply chain has introduced hardware-based vulnerabilities. Existing literature in hardware security assumes ad hoc threat models, defenses, and metrics for evaluation, making it difficult to analyze and compare alternate solutions. This paper systematizes the current knowledge in this emerging field, including a classification of threat models, state-of-the-art defenses, and evaluation metrics for important hardware-based attacks.