C
Christophe Pierrat
Publications - 1
Citations - 241
Christophe Pierrat is an academic researcher. The author has contributed to research in topics: Phase-shift mask & Phase (waves). The author has an hindex of 1, co-authored 1 publications receiving 241 citations.
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Phase shift masking for complex patterns with proximity adjustments
TL;DR: In this paper, techniques for extending the use of phase shift techniques to implementation of masks used for complex layouts in the layers of integrated circuits, beyond selected critical dimension features, are presented.