Chun Zhao

Bio: Chun Zhao is an academic researcher from Huazhong University of Science and Technology. The author has contributed to research in topics: Resonator & Noise floor. The author has an hindex of 19, co-authored 80 publications receiving 1121 citations. Previous affiliations of Chun Zhao include University of Cambridge & University of Southampton.

A vibrating beam MEMS accelerometer for gravity and seismic measurements

Abstract: This paper introduces a differential vibrating beam MEMS accelerometer demonstrating excellent long-term stability for applications in gravimetry and seismology The MEMS gravimeter module demonstrates an output Allan deviation of 9 μGal for a 1000 s integration time, a noise floor of 100 μGal/√Hz, and measurement over the full ±1 g dynamic range (1 g = 981 ms−2) The sensitivity of the device is demonstrated through the tracking of Earth tides and recording of ground motion corresponding to a number of teleseismic events over several months These results demonstrate that vibrating beam MEMS accelerometers can be employed for measurements requiring high levels of stability and resolution with wider implications for precision measurement employing other resonant-output MEMS devices such as gyroscopes and magnetometers

A review on coupled MEMS resonators for sensing applications utilizing mode localization

Abstract: In this paper, we review a recent technology development based on coupled MEMS resonators that has the potential of fundamentally transforming MEMS resonant sensors. Conventionally MEMS resonant sensors use only a single resonator as the sensing element, and the output of the sensor is typically a frequency shift caused by the external stimulus altering the mechanical properties, i.e. the mass or stiffness, of the resonator. Recently, transduction techniques utilizing additional coupled resonators have emerged. The mode-localized resonant sensor is one example of such a technique. If the mode localization effect is utilized, the vibrational amplitude pattern of the resonators changes as a function of the quantity to be measured. Compared to using frequency shift as an output signal, the sensitivity can be improved by several orders of magnitude. Another feature of the mode-localized sensors is the common mode rejection abilities due to the differential structure. These advantages have opened doors for new sensors with unprecedented sensitivity.

A force sensor based on three weakly coupled resonators with ultrahigh sensitivity

Abstract: A proof-of-concept force sensor based on three degree-of-freedom (DoF) weakly coupled resonators was fabricated using a silicon-on-insulator (SOI) process and electrically tested in 20 μTorr vacuum. Compared to the conventional single resonator force sensor with frequency shift as output, by measuring the amplitude ratio of two of the three resonators, the measured force sensitivity of the 3DoF sensor was 4.9 × 106/N, which was improved by two orders magnitude. A bias stiffness perturbation was applied to avoid mode aliasing effect and improve the linearity of the sensor. The noise floor of the amplitude ratio output of the sensor was theoretically analyzed for the first time, using the transfer function model of the 3DoF weakly coupled resonator system. It was shown based on measurement results that the output noise was mainly due to the thermal–electrical noise of the interface electronics. The output noise spectral density was measured, and agreed well with theoretical estimations. The noise floor of the force sensor output was estimated to be approximately 1.39nN for an assumed 10 Hz bandwidth of the output signal, resulting in a dynamic range of 74.8 dB.

A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiffness Sensitivity

Abstract: This paper reports a three degree-of-freedom (3DoF) microelectromechanical systems (MEMS) resonant sensing device consisting of three weakly coupled resonators with enhanced sensitivity to stiffness change. If one resonator of the system is perturbed by an external stimulus, mode localization occurs, which can be detected by a change of modal amplitude ratio. The perturbation can be, for example, a change in stiffness of one resonator. A detailed theoretical investigation revealed that a mode aliasing effect, along with the thermal noise floor of the sensor and the associated electrical system ultimately limit the dynamic range of the sensor. The nonlinearity of the 3DoF sensor was also analyzed theoretically. The 3DoF resonator device was fabricated using a silicon on insulator process. Measurement results from a prototype device agreed well with the predictions of the analytical model. A significant, namely 49 times, improvement in sensitivity to stiffness change was evident from the fabricated 3DoF resonator sensor compared with the existing state-of-the-art 2DoF resonator sensors, while the typical nonlinearity was smaller than ±2% for a wide span of stiffness change. In addition, measurements indicate that a dynamic range of at least 39.1 dB is achievable, which could be further extended by decreasing the noise of the device and the interface electronics. [2015-0020]

Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators.

Abstract: Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. Electrostatic pump based sideband coupling is demonstrated, and compared to conventional strain-mediated sideband operations. Electrostatic coupling is shown to be very efficient, enabling strong, tunable dynamical coupling.

A Review of Piezoelectric Energy Harvesting Based on Vibration

Abstract: This paper reviews energy harvesting technology from mechanical vibration. Recent advances on ultralow power portable electronic devices and wireless sensor network require limitless battery life for better performance. People searched for permanent portable power sources for advanced electronic devices. Energy is everywhere around us and the most important part in energy harvesting is energy transducer. Piezoelectric materials have high energy conversion ability from mechanical vibration. A great amount of researches have been conducted to develop simple and efficient energy harvesting devices from vibration by using piezoelectric materials. Representative piezoelectric materials can be categorized into piezoceramics and piezopolymers. This paper reviews key ideas and performances of the reported piezoelectric energy harvesting from vibration. Various types of vibration devices, piezoelectric materials and mathematical modeling of vibrational energy harvestings are reviewed.

The 2016 terahertz science and technology roadmap

Abstract: Science and technologies based on terahertz frequency electromagnetic radiation (100 GHz–30 THz) have developed rapidly over the last 30 years. For most of the 20th Century, terahertz radiation, then referred to as sub-millimeter wave or far-infrared radiation, was mainly utilized by astronomers and some spectroscopists. Following the development of laser based terahertz time-domain spectroscopy in the 1980s and 1990s the field of THz science and technology expanded rapidly, to the extent that it now touches many areas from fundamental science to 'real world' applications. For example THz radiation is being used to optimize materials for new solar cells, and may also be a key technology for the next generation of airport security scanners. While the field was emerging it was possible to keep track of all new developments, however now the field has grown so much that it is increasingly difficult to follow the diverse range of new discoveries and applications that are appearing. At this point in time, when the field of THz science and technology is moving from an emerging to a more established and interdisciplinary field, it is apt to present a roadmap to help identify the breadth and future directions of the field. The aim of this roadmap is to present a snapshot of the present state of THz science and technology in 2017, and provide an opinion on the challenges and opportunities that the future holds. To be able to achieve this aim, we have invited a group of international experts to write 18 sections that cover most of the key areas of THz science and technology. We hope that The 2017 Roadmap on THz science and technology will prove to be a useful resource by providing a wide ranging introduction to the capabilities of THz radiation for those outside or just entering the field as well as providing perspective and breadth for those who are well established. We also feel that this review should serve as a useful guide for government and funding agencies.

Smart Textiles for Electricity Generation.

Abstract: Textiles have been concomitant of human civilization for thousands of years. With the advances in chemistry and materials, integrating textiles with energy harvesters will provide a sustainable, environmentally friendly, pervasive, and wearable energy solution for distributed on-body electronics in the era of Internet of Things. This article comprehensively and thoughtfully reviews research activities regarding the utilization of smart textiles for harvesting energy from renewable energy sources on the human body and its surroundings. Specifically, we start with a brief introduction to contextualize the significance of smart textiles in light of the emerging energy crisis, environmental pollution, and public health. Next, we systematically review smart textiles according to their abilities to harvest biomechanical energy, body heat energy, biochemical energy, solar energy as well as hybrid forms of energy. Finally, we provide a critical analysis of smart textiles and insights into remaining challenges and future directions. With worldwide efforts, innovations in chemistry and materials elaborated in this review will push forward the frontiers of smart textiles, which will soon revolutionize our lives in the era of Internet of Things.