Clayton C. Williams

Bio: Clayton C. Williams is an academic researcher from University of Utah. The author has contributed to research in topics: Scanning capacitance microscopy & Microscopy. The author has an hindex of 29, co-authored 96 publications receiving 4829 citations. Previous affiliations of Clayton C. Williams include Foundation University, Islamabad & Utah State University.

Atomic force microscope–force mapping and profiling on a sub 100‐Å scale

Abstract: A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip‐sample distance range of 30–150 A. As an application, the force signal is used to maintain the tip‐sample spacing constant, so that profiling can be achieved with a spatial resolution of 50 A. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material‐dependent information from surfaces of electronic materials.

Apertureless near field optical microscopy

Abstract: A near field optical microscopy method and apparatus eliminates the necessity of an aperture for scanning a sample surface (18) and greatly reduces the detected background signal. A small dimension tip (14), on the order of atomic dimension, is disposed in close promity to the sample surface (18). A dither motion is applied to the tip (14) at a first frequency in a direction substantially normal (22) to the plane of the sample surface (18). Dither motion is simultaneously applied to the sample (20) at a second frequency in a direction substantially parallel (24) to the plane of the sample surface (18). The amplitude of the motions are chosen to be comparable to the desired measurement resolution. The end (12) of the tip (14) is illuminated by optical energy. The scattered light from the tip (14) and surface (18) is detected at the difference frequency for imaging the sample surface (18) at sub-wavelength resolution without the use of an aperture. Alternatively, the tip (14) is maintained stationary and the sample (20) undergoes motion in the two directions.

Scanning thermal profiler

Abstract: A new high‐resolution profilometer has been demonstrated based upon a noncontacting near‐field thermal probe. The thermal probe consists of a thermocouple sensor with dimensions approaching 100 nm. Profiling is achieved by scanning the heated sensor above but close to the surface of a solid. The conduction of heat between tip and sample via the air provides a means for maintaining the sample spacing constant during the lateral scan. The large difference in thermal properties between air and solids makes the profiling technique essentially independent of the material properties of the solid. Noncontact profiling of resist and metal films has shown a lateral resolution of 100 nm and a depth solution of 3 nm. The basic theory of the new probe is described and the results presented.

Scanning capacitance microscopy on a 25 nm scale

Abstract: A near‐field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub‐100‐nm tip and surface with a sensitivity of 1×10−19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.

Two-dimensional dopant profiling by scanning capacitance microscopy

Abstract: ▪ Abstract The scanning capacitance microscope (SCM) provides a direct method for mapping the dopant distribution in a semiconductor device on a 10 nm scale. This capability is critical for the development, optimization, and understanding of future ULSI processes and devices. The basic elements of the SCM and its application to nanometer scale metal oxide semiconductor (MOS) capacitor measurements are described. Experimental SCM methods are reviewed. Basic measurements show that nanometer scale capacitance-voltage relations are understood. High-quality probe tips and surfaces are critical for obtaining accurate measurements of two-dimensional dopant profiles. Quantitative modeling of SCM measurement is described for converting raw SCM data to dopant density. An inverse modeling method is presented. Direct comparison between secondary ion mass spectroscopy (SIMS) and SCM-measured dopant profiles are made. Quantitative junction measurements and models are discussed and images of small transistors are presented.

Calibration of atomic‐force microscope tips

Abstract: Images and force measurements taken by an atomic‐force microscope (AFM) depend greatly on the properties of the spring and tip used to probe the sample’s surface. In this article, we describe a simple, nondestructive procedure for measuring the force constant, resonant frequency, and quality factor of an AFM cantilever spring and the effective radius of curvature of an AFM tip. Our procedure uses the AFM itself and does not require additional equipment.

Nanoscale thermal transport

Abstract: Rapid progress in the synthesis and processing of materials with structure on nanometer length scales has created a demand for greater scientific understanding of thermal transport in nanoscale devices, individual nanostructures, and nanostructured materials. This review emphasizes developments in experiment, theory, and computation that have occurred in the past ten years and summarizes the present status of the field. Interfaces between materials become increasingly important on small length scales. The thermal conductance of many solid–solid interfaces have been studied experimentally but the range of observed interface properties is much smaller than predicted by simple theory. Classical molecular dynamics simulations are emerging as a powerful tool for calculations of thermal conductance and phonon scattering, and may provide for a lively interplay of experiment and theory in the near term. Fundamental issues remain concerning the correct definitions of temperature in nonequilibrium nanoscale systems. Modern Si microelectronics are now firmly in the nanoscale regime—experiments have demonstrated that the close proximity of interfaces and the extremely small volume of heat dissipation strongly modifies thermal transport, thereby aggravating problems of thermal management. Microelectronic devices are too large to yield to atomic-level simulation in the foreseeable future and, therefore, calculations of thermal transport must rely on solutions of the Boltzmann transport equation; microscopic phonon scattering rates needed for predictive models are, even for Si, poorly known. Low-dimensional nanostructures, such as carbon nanotubes, are predicted to have novel transport properties; the first quantitative experiments of the thermal conductivity of nanotubes have recently been achieved using microfabricated measurement systems. Nanoscale porosity decreases the permittivity of amorphous dielectrics but porosity also strongly decreases the thermal conductivity. The promise of improved thermoelectric materials and problems of thermal management of optoelectronic devices have stimulated extensive studies of semiconductor superlattices; agreement between experiment and theory is generally poor. Advances in measurement methods, e.g., the 3ω method, time-domain thermoreflectance, sources of coherent phonons, microfabricated test structures, and the scanning thermal microscope, are enabling new capabilities for nanoscale thermal metrology.

Molecular self-assembly and nanochemistry: A chemical strategy for the synthesis of nanostructures

Abstract: Molecular self-assembly is the spontaneous association of molecules under equilibrium conditions into stable, structurally well-defined aggregates joined by noncovalent bonds. Molecular self-assembly is ubiquitous in biological systems and underlies the formation of a wide variety of complex biological structures. Understanding self-assembly and the associated noncovalent interactions that connect complementary interacting molecular surfaces in biological aggregates is a central concern in structural biochemistry. Self-assembly is also emerging as a new strategy in chemical synthesis, with the potential of generating nonbiological structures with dimensions of 1 to 10(2) nanometers (with molecular weights of 10(4) to 10(10) daltons). Structures in the upper part of this range of sizes are presently inaccessible through chemical synthesis, and the ability to prepare them would open a route to structures comparable in size (and perhaps complementary in function) to those that can be prepared by microlithography and other techniques of microfabrication.

Exploitation of Localized Surface Plasmon Resonance

Abstract: Recent advances in the exploitation of localized surface plasmons (charge density oscillations confined to metallic nanoparticles and nanostructures) in nanoscale optics and photonics, as well as in the construction of sensors and biosensors, are reviewed here. In particular, subsequent to brief surveys of the most-commonly used methods of preparation and arraying of materials with localized surface plasmon resonance (LSPR), and of the optical manifestations of LSPR, attention will be focused on the exploitation of metallic nanostructures as waveguides; as optical transmission, information storage, and nanophotonic devices; as switches; as resonant light scatterers (employed in the different near-field scanning optical microscopies); and finally as sensors and biosensors.