Author
D. McMurtry
Bio: D. McMurtry is an academic researcher. The author has contributed to research in topics: Dimensional metrology & NIST. The author has an hindex of 2, co-authored 2 publications receiving 297 citations.
Topics: Dimensional metrology, NIST
Papers
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TL;DR: In this article, the authors describe requirements, different principles and characteristics of tactile probing systems in dimensional metrology, with examples of several probing systems that are used in practice, as well as a survey of tactile sensing systems.
315 citations
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TL;DR: Freeform optics is the next generation of modern optics, bringing advantages of excellent optical performance and system integration as mentioned in this paper, and finds wide applications in various fields, such as new energy, illumination, aerospace and biomedical engineering.
638 citations
TL;DR: In this article, the authors present the state of the art in the metrology of freeform shapes with focus on the freeform capabilities of the most important measuring techniques and on related metrological issues.
359 citations
TL;DR: The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient as mentioned in this paper.
Abstract: The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challenges. The developments have to include new measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration. The current paper describes issues and challenges in dimensional micro and nano metrology by reviewing typical measurement tasks and available instrumentation. Traceability and calibration issues are discussed subsequently. Finally needs and gaps are identified based on these observations.
292 citations
TL;DR: Multisensor data fusion in dimensional metrology is used in order to get holistic, more accurate and reliable information about a workpiece based on several or multiple measurement values from one or more sensors.
271 citations
TL;DR: Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability.
232 citations