D
D. Zhuang
Researcher at Kansas State University
Publications - 1
Citations - 680
D. Zhuang is an academic researcher from Kansas State University. The author has contributed to research in topics: Etching (microfabrication) & Deep reactive-ion etching. The author has an hindex of 1, co-authored 1 publications receiving 614 citations.
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Wet etching of GaN, AlN, and SiC : a review
D. Zhuang,James H. Edgar +1 more
TL;DR: The wet etching of GaN, AlN, and SiC is reviewed in this paper, including conventional etching in aqueous solutions, electrochemical etch in electrolytes and defect-selective chemical etched in molten salts.