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Dingbang Xiao

Bio: Dingbang Xiao is an academic researcher from National University of Defense Technology. The author has contributed to research in topics: Gyroscope & Resonator. The author has an hindex of 14, co-authored 145 publications receiving 928 citations.


Papers
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Journal ArticleDOI
TL;DR: A team led by Xuezhong Wu at the National University of Defense Technology, China, reports what they claim are record quality factors and decay times for MEMS silicon disk gyroscopes.
Abstract: The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes. This gyroscope consists of a sensor and readout electronics, and the characteristics of the sensor directly determine the performance. For the sensor, a high-quality factor and long decaying time constant are the most important characteristics required to achieve high performance. We report a disk resonator gyroscope with a measured quality factor of 510 k and decaying time constant of 74.9 s, which is a record for MEMS silicon disk resonator gyroscopes, to the best of our knowledge. To improve the quality factor of the DRG, the quality factor improvement mechanism is first analyzed, and based on this mechanism two stiffness-mass decoupled methods, i.e., spoke length distribution optimization and lumped mass configuration design, are proposed and demonstrated. A disk resonator gyroscope prototype is fabricated based on these design strategies, and the sensor itself shows an angle random walk as low as 0.001°/√h, demonstrating true potential to achieve navigation-grade performance. The gyroscope with readout electronics shows an angle random walk of 0.01°/√h and a bias instability of 0.04°/h at room temperature without compensation, revealing that the performance of the gyroscope is severely limited by the readout electronics, which should be further improved. We expect that the quality factor improvement methods can be used in the design of other MEMS gyroscopes and that the newly designed DRG can be further improved to achieve navigation-grade performances for high-end industrial, transportation, aerospace, and automotive applications. A disk resonator gyroscope demonstrates a high-quality factor of 510 k and decay time constant of 74.9 s. High-performance MEMS gyroscopes are in demand for a range of high-end applications. Disk resonator gyroscopes are particularly promising candidates due to inherent mode matching and high thermal stability. However, many applications demand high-quality factors and long decay times. Now, a team led by Xuezhong Wu at the National University of Defense Technology, China, reports what they claim are record quality factors and decay times for MEMS silicon disk gyroscopes. Two mechanisms for stiffness-mass decoupling are attributed to the high performance, which the authors say could be used for the design of other MEMS gyroscopes.

78 citations

Journal ArticleDOI
TL;DR: Elect electrically tunable modal coupling in capacitive microelectromechanical gyroscopic ring resonators is demonstrated that allows for improving the performance micro/nano-sensors relying on precise control of the degree ofModal coupling.
Abstract: Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. Electrostatic pump based sideband coupling is demonstrated, and compared to conventional strain-mediated sideband operations. Electrostatic coupling is shown to be very efficient, enabling strong, tunable dynamical coupling.

54 citations

Journal ArticleDOI
TL;DR: In this paper, the authors presented the mechanical sensitivity improvement of a disk resonator gyroscope (DRG) by optimizing the thickness distribution of the nested rings, and the results suggest that the ring thickness distribution has great influence on the performance of the DRG.
Abstract: In this paper, we present the mechanical sensitivity improvement of a disk resonator gyroscope (DRG) by optimizing the thickness distribution of the nested rings. The mechanical sensitivities of the DRGs with uniform, linearly changing, and step changing rings have been simulated. The results suggest that the ring thickness distribution has great influence on the performance of the DRG. Then, the optimized ring thickness distribution was obtained by using the traditional method of moving asymptotes (MMA), which result in a 24% improvement of the mechanical sensitivity. Finally, the bio-inspired particle swarm optimization (PSO) algorithm has also been used. The optimization results of PSO coincide well with that of MMA, and the optimized result is the global optimum. Meanwhile, the optimized distribution rules can be used on the series of DRGs and the optimization methods can be widely used on other microelectromechanical systems (MEMS) devices. [2015-0310]

52 citations

Journal ArticleDOI
TL;DR: In this paper, a novel ring vibratory gyroscope based on piezoelectric effect has been proposed, which consists of a simple millimeter-scale resonator.
Abstract: This work presents the design, analysis, simulation and experiment of a novel ring vibratory gyroscope based on piezoelectric effect. The gyroscope has a simple millimeter-scale resonator which comprises of a metallic structure and eight piezoelectric elements. The piezoelectric elements attached to the metallic structure excite the primary mode of the resonator, sense the second mode caused by Coriolis force and output signal proportional to input angular velocity. A theoretical analysis on the proposed gyroscope is performed using the AMM method and DM method for the forced vibration solution of active mode and sense mode with the inclusion of the Coriolis force coupling. The sensitivity of the gyroscope and its dependence on some geometry parameters are obtained. The working principle is validated by using FEM simulation. The metallic structure of the prototypal gyroscope was machined by precision turning and electrical charge technologies, as a result, the adherence process of the piezoelectric elements is simplified and the positioning precision is improved, which ensures the high axial symmetry of the resonator. A prototypal gyroscope is selected for practical experiments. The natural frequencies of active mode and sense mode of the prototype are close, the frequency split is 0.06 Hz, and the quality factor is approximately 5000 in atmosphere. Therefore, the gyroscope can work properly without a vacuum package. A control circuit was specially designed to activate the resonator and readout the angular velocity signal. The performance of the gyroscope is characterized on a precision rate table. The experimentally obtained scale factor is 65.5 mV/°/s, the nonlinearity is 1323 ppm in range of ±150°/s, the angle random walk is about 0.05°/h1/2, and the zero-bias instability is about 1.5°/h at room temperature. There is a good linear relation between the sensing voltage and the angular velocity, suggesting that the novel ring vibratory gyroscope is a good candidate for low and medium rotation speed measurements.

48 citations

Journal ArticleDOI
TL;DR: In this article, a utility algorithm was proposed to reduce the permanent frequency mismatch of the primary wineglass modes in a disk resonator gyroscope via stiffness perturbation, where each tuning electrode is regarded as two rows of radial springs with negative stiffness.
Abstract: This paper introduces a utility algorithm to reduce the permanent frequency mismatch of the primary wineglass modes in a disk resonator gyroscope via stiffness perturbation. In this algorithm, each tuning electrode is regarded as two rows of radial springs with negative stiffness. On the basis of the tuning model for a ring with radial springs, we can obtain the functional relation between equivalent stiffness or voltage of each tuning electrode and the frequency split. Corresponding simulations are conducted to demonstrate the performance of the algorithm. Finally, the electrostatic tuning experiment is presented to further verify the algorithm and illustrate the use of the tuning procedure. Results of experiment show that the frequency split of resonator is decreased to smaller than 0.03 Hz from original about 15 Hz.

37 citations


Cited by
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Journal Article
TL;DR: The combined use of ultrasensitive magnetic resonance force microscopy (MRFM) with 3D image reconstruction to achieve magnetic resonance imaging (MRI) with resolution <10 nm demonstrates the potential of MRFM as a tool for 3D, elementally selective imaging on the nanometer scale.
Abstract: We have combined ultrasensitive magnetic resonance force microscopy (MRFM) with 3D image reconstruction to achieve magnetic resonance imaging (MRI) with resolution <10 nm. The image reconstruction converts measured magnetic force data into a 3D map of nuclear spin density, taking advantage of the unique characteristics of the “resonant slice” that is projected outward from a nanoscale magnetic tip. The basic principles are demonstrated by imaging the 1H spin density within individual tobacco mosaic virus particles sitting on a nanometer-thick layer of adsorbed hydrocarbons. This result, which represents a 100 million-fold improvement in volume resolution over conventional MRI, demonstrates the potential of MRFM as a tool for 3D, elementally selective imaging on the nanometer scale.

402 citations

Journal ArticleDOI
14 Jan 2014-Sensors
TL;DR: This review surveys micromachined gyroscope structure and circuitry technology and the characteristics of various typical gyroscopes are discussed and investigated in detail.
Abstract: This review surveys micromachined gyroscope structure and circuitry technology The principle of micromachined gyroscopes is first introduced Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes Next, the control electronics of micromachined gyroscopes are analyzed The control circuits are categorized into typical circuitry and special circuitry technologies The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail

178 citations

01 Jan 2016
TL;DR: The analysis and design principles of mems devices is universally compatible with any devices to read, and is available in the digital library an online access to it is set as public so you can get it instantly.
Abstract: Thank you very much for downloading analysis and design principles of mems devices. Maybe you have knowledge that, people have search hundreds times for their favorite novels like this analysis and design principles of mems devices, but end up in malicious downloads. Rather than reading a good book with a cup of coffee in the afternoon, instead they cope with some infectious bugs inside their laptop. analysis and design principles of mems devices is available in our digital library an online access to it is set as public so you can get it instantly. Our digital library hosts in multiple locations, allowing you to get the most less latency time to download any of our books like this one. Kindly say, the analysis and design principles of mems devices is universally compatible with any devices to read.

125 citations

Journal ArticleDOI
29 Mar 2012
TL;DR: In this paper, the use of the optomechanical nonlinearity as a new way of controlling the velocity of light via engineered photon-phonon interactions was proposed and demonstrated.
Abstract: Controlling the interaction between localized optical and mechanical excitations is now possible following advances in micro- and nano-fabrication techniques. To date, most experimental studies of optomechanics have focused on measurement and control of the mechanical subsystem through its interaction with optics, and have led to the experimental demonstration of dynamical back-action cooling and optical rigidity of the mechanical system. However, the optical response of these systems is also modified in the presence of mechanical interactions, leading to effects such as Electromagnetically Induced Transparency (EIT) and parametric normal-mode splitting, and thus a platform for strongly nonlinear optics. In this talk we propose and demonstrate the use of the optomechanical nonlinearity as a new way of controlling the velocity of light via engineered photon-phonon interactions. Our results demonstrate EIT and tunable optical delays on a nanoscale optomechanical crystal device, fabricated by simply etching holes into a thin film of Silicon. At low temperature (8.7 K), we show an optically-tunable delay of 50 ns with near-unity optical transparency, and superluminal light with a 1.4 μs signal advance. These results, while indicating significant progress towards an integrated quantum optomechanical memory, are also relevant to classical signal processing applications.

110 citations