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Dominique Drouin

Bio: Dominique Drouin is an academic researcher from Université de Sherbrooke. The author has contributed to research in topics: Electron-beam lithography & Silicon. The author has an hindex of 22, co-authored 204 publications receiving 3798 citations. Previous affiliations of Dominique Drouin include Institut national des sciences Appliquées de Lyon & STMicroelectronics.


Papers
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Journal ArticleDOI
01 May 2007-Scanning
TL;DR: The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography.
Abstract: Monte Carlo simulations have been widely used by microscopists for the last few decades. In the beginning it was a tedious and slow process, requiring a high level of computer skills from users and long computational times. Recent progress in the microelectronics industry now provides researchers with affordable desktop computers with clock rates greater than 3 GHz. With this type of computing power routinely available, Monte Carlo simulation is no longer an exclusive or long (overnight) process. The aim of this paper is to present a new user-friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography. This version uses a new architecture that provides results twice as quickly. This program is freely available to the scientific community and can be downloaded from the website: (www.gel.usherb.ca/casino).

1,295 citations

Journal ArticleDOI
07 Dec 2006-Scanning
TL;DR: The CASINO program as discussed by the authors is a single scattering Monte CArlo SImulation of electroN trajectory in sOlid specially designed for low-beam interaction in a bulk and thin foil.
Abstract: This paper is a guide to the ANSI standard C code of CASINO program which is a single scattering Monte CArlo SImulation of electroN trajectory in sOlid specially designed for low-beam interaction in a bulk and thin foil. CASINO can be used either on a DOS-based PC or on a UNIX-based workstation. This program uses tabulated Mott elastic cross sections and experimentally determined stopping powers. Function pointers are used for the most essential routine so that different physical models can easily be implemented. CASINO can be used to generate all of the recorded signals (x-rays, secondary, and backscattered) in a scanning electron microscope either as a point analysis, as a linescan, or as an image format, for all the accelerated voltages (0.1–30 kV). As an example of application, it was found that a 20 nm Guinier-Preston Mg2Si in a light aluminum matrix can, theoretically, be imaged with a microchannel backscattered detector at 5 keV with a beam spot size of 5 nm.

597 citations

Journal ArticleDOI
01 May 2011-Scanning
TL;DR: The development of the 3D version of CASINO is presented, which has an improved energy range for scanning electron microscopy and scanning transmission electron microscopeopy applications and is available freely to the scientific community.
Abstract: Monte Carlo softwares are widely used to understand the capabilities of electron microscopes. To study more realistic applications with complex samples, 3D Monte Carlo softwares are needed. In this article, the development of the 3D version of CASINO is presented. The software feature a graphical user interface, an efficient (in relation to simulation time and memory use) 3D simulation model, accurate physic models for electron microscopy applications, and it is available freely to the scientific community at this website: www.gel.usherbrooke.ca/casino/index.html. It can be used to model backscattered, secondary, and transmitted electron signals as well as absorbed energy. The software features like scan points and shot noise allow the simulation and study of realistic experimental conditions. This software has an improved energy range for scanning electron microscopy and scanning transmission electron microscopy applications.

287 citations

Journal ArticleDOI
01 Jan 1997-Scanning
TL;DR: In this article, the Mott cross section computed in the work of Czyzewski et al. is used to compute the polar angle of collision for the first 94 elements of the Periodic Table.
Abstract: This paper presents routines to compute the Mott cross section used in the CASINO program (Monte CArlo SImulation of electroN trajectory in sOlid). The routines used tabulated values of the Mott cross section computed in the work of Czyzewski et al. (1990). The cross section is available over the range 0.02 to 30 keV and for the first 94 elements of the Periodic Table. The routines are written in C language and use a binary file to interpolate the cross section. The first routine computes the total Mott cross sections; the second calculates the polar angle of collision. Backscattered coefficients computed using different cross section are compared for C, Al, Ag, and Au. The Rutherford (1911) cross section and the available empirical equations (Browning et al. 1994, Gauvin and Drouin 1993) are compared to tabulated values of Mott. Also, the energy distribution of backscattered electrons is shown for Al and Au at 10 keV. Finally, the relative computation times for the different Mott cross sections are compared. It was found that tabulated Mott cross sections are more accurate and faster than any empirical Mott cross sections. The tabulated Mott cross sections are even faster than simple Rutherford cross sections.

199 citations

Journal ArticleDOI
01 Jan 1997-Scanning
TL;DR: In this paper, the stopping power for a given element or compound of interest can easily be performed and used in the CASINO program and the resulting effect of using these stopping powers in Monte Carlo simulations is generally to increase the backscattering coefficient.
Abstract: This paper is a description of the stopping power routine utilized in the CASINO program that is based on the experimental measurement of the energy loss function (ELF). In addition, we present an ANSI C standard program that can be used to generate the data needed for the stopping power routine. Both optical and energy loss spectrum (ELS) measurements of the ELF can be used as input to compute the stopping power. For ELS, only the single scattering spectrum is needed. Hence, measurement of the stopping power for a given element or compound of interest can easily be performed and used in the CASINO program. The resulting effect of using these stopping powers in Monte Carlo simulations is generally to increase the backscattering coefficient. Except for carbon, the change of stopping power for pure elements so far compiled is relatively small. In some compounds (i.e., Al2O3 and ZnSe), the discrepancy with the Joy and Luo (1989) expression is significant.

152 citations


Cited by
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Journal ArticleDOI

[...]

08 Dec 2001-BMJ
TL;DR: There is, I think, something ethereal about i —the square root of minus one, which seems an odd beast at that time—an intruder hovering on the edge of reality.
Abstract: There is, I think, something ethereal about i —the square root of minus one. I remember first hearing about it at school. It seemed an odd beast at that time—an intruder hovering on the edge of reality. Usually familiarity dulls this sense of the bizarre, but in the case of i it was the reverse: over the years the sense of its surreal nature intensified. It seemed that it was impossible to write mathematics that described the real world in …

33,785 citations

Journal ArticleDOI
01 May 2007-Scanning
TL;DR: The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography.
Abstract: Monte Carlo simulations have been widely used by microscopists for the last few decades. In the beginning it was a tedious and slow process, requiring a high level of computer skills from users and long computational times. Recent progress in the microelectronics industry now provides researchers with affordable desktop computers with clock rates greater than 3 GHz. With this type of computing power routinely available, Monte Carlo simulation is no longer an exclusive or long (overnight) process. The aim of this paper is to present a new user-friendly simulation program based on the earlier CASINO Monte Carlo program. The intent of this software is to assist scanning electron microscope users in interpretation of imaging and microanalysis and also with more advanced procedures including electron-beam lithography. This version uses a new architecture that provides results twice as quickly. This program is freely available to the scientific community and can be downloaded from the website: (www.gel.usherb.ca/casino).

1,295 citations