Showing papers by "Enakshi Bhattacharya published in 2014"
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TL;DR: In this article, a surface micromachined Knudsen vacuum sensor has been simulated, fabricated and characterized, which has an area of 1 mm2 and a sensitivity of 40 fF Pa−1 in the pressure range of 0.1 −10 Pa.
Abstract: Knudsen forces are gas molecular forces which originate from the differential temperatures in rarefied gases. We report measurements of these forces at normal ambience on test structures made by surface micromachining of polysilicon. Using these results, a surface micromachined Knudsen vacuum sensor has been simulated, fabricated and characterized. The vacuum sensor has an area of 1 mm2. The fabricated device has a sensitivity of 40 fF Pa−1 in the pressure range of 0.1–10 Pa. The measured data is analysed and the magnitude of the Knudsen's force is extracted. The paper also suggests ways to enhance the range and improve the sensitivity of such sensors.
18 citations
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TL;DR: In this article, the authors have developed a complete triglyceride biochip wherein the enzyme for hydrolysis and the counter electrode for signal transduction are integrated with a miniaturized EISCAP sensor.
Abstract: This paper reports on the design and fabrication of electrolyte insulator semiconductor capacitor (EISCAP) devices to detect triglycerides in the form of microreactors fabricated by bulk micromachining of silicon. We have developed a complete triglyceride biochip wherein the enzyme for hydrolysis and the counter electrode for signal transduction are integrated with a miniaturised EISCAP sensor. A compact readout system that measures the triglyceride concentration in blood serum under test has been developed and is implemented in a Programmable System on Chip (PSoC®). The miniaturised EISCAP devices are tested using blood serum samples to estimate the triglyceride concentration within the clinical range of 50 to 150 mg dL−1 and the time taken by the readout system to calibrate the sensor and to measure the triglyceride is less than 5 minutes.
13 citations