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Showing papers by "Enakshi Bhattacharya published in 2017"


Journal ArticleDOI
TL;DR: In this paper, a local approach is taken to characterize statistical distribution in fracture behavior of polysilicon thin film using indentation fracture data, and the average fracture toughness was evaluated using conventional approach, that ignores the effect of other layers, to be 0.7 MPa m.

5 citations