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Enakshi Bhattacharya

Researcher at Indian Institute of Technology Madras

Publications -  83
Citations -  939

Enakshi Bhattacharya is an academic researcher from Indian Institute of Technology Madras. The author has contributed to research in topics: Silicon & Surface micromachining. The author has an hindex of 14, co-authored 80 publications receiving 873 citations. Previous affiliations of Enakshi Bhattacharya include Indian Institutes of Technology & Tata Institute of Fundamental Research.

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Space‐charge limited conduction in n+nn+ amorphous hydrogenated silicon films

TL;DR: In this article, high field conduction in n+nn+ amorphous hydrogenated silicon (α•Si:H) films has been investigated at different temperatures, and the results can be explained by assuming space charge limited conduction (SCLC) with a uniform density of traps.
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Enhancement of the sensitivity of pressure sensors with a composite Si/porous silicon membrane

TL;DR: In this paper, the authors investigated the application of porous silicon (PS) in improving the sensitivity of bulk micromachined piezoresistive pressure sensors by converting a part of the silicon membrane thickness into PS by electrochemical etching in an HF-based electrolyte.
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Knudsen force based MEMS structures

TL;DR: In this article, a surface micromachined Knudsen vacuum sensor has been simulated, fabricated and characterized, which has an area of 1 mm2 and a sensitivity of 40 fF Pa−1 in the pressure range of 0.1 −10 Pa.
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Fabrication of Ultrathin Silicon Nanoporous Membranes and Their Application in Filtering Industrially Important Biomolecules

TL;DR: In this article, the functional diameter of ultrathin silicon nanoporous membranes with multiple pores was determined by analyzing the permeability of several industrially and medically important globular biomolecules of varying sizes.