The Al x Ga1−x As/GaAs heterostructure system is potentially useful material for high‐speed digital, high‐frequency microwave, and electro‐optic device applications Even though the basic Al x Ga1−x As/GaAs heterostructure concepts are understood at this time, some practical device parameters in this system have been hampered by a lack of definite knowledge of many material parameters Recently, Blakemore has presented numerical and graphical information about many of the physical and electronic properties of GaAs [J S Blakemore, J Appl Phys 5 3, R123 (1982)] The purpose of this review is (i) to obtain and clarify all the various material parameters of Al x Ga1−x As alloy from a systematic point of view, and (ii) to present key properties of the material parameters for a variety of research works and device applications A complete set of material parameters are considered in this review for GaAs, AlAs, and Al x Ga1−x As alloys The model used is based on an interpolation scheme and, therefore, necessitates known values of the parameters for the related binaries (GaAs and AlAs) The material parameters and properties considered in the present review can be classified into sixteen groups: (1) lattice constant and crystal density, (2) melting point, (3) thermal expansion coefficient, (4) lattice dynamic properties, (5) lattice thermal properties, (6) electronic‐band structure, (7) external perturbation effects on the band‐gap energy, (8) effective mass, (9) deformation potential, (10) static and high‐frequency dielectric constants, (11) magnetic susceptibility, (12) piezoelectric constant, (13) Frohlich coupling parameter, (14) electron transport properties, (15) optical properties, and (16) photoelastic properties Of particular interest is the deviation of material parameters from linearity with respect to the AlAs mole fraction x Some material parameters, such as lattice constant, crystal density, thermal expansion coefficient, dielectric constant, and elastic constant, obey Vegard’s rule well Other parameters, eg, electronic‐band energy, lattice vibration (phonon) energy, Debye temperature, and impurity ionization energy, exhibit quadratic dependence upon the AlAs mole fraction However, some kinds of the material parameters, eg, lattice thermal conductivity, exhibit very strong nonlinearity with respect to x, which arises from the effects of alloy disorder It is found that the present model provides generally acceptable parameters in good agreement with the existing experimental data A detailed discussion is also given of the acceptability of such interpolated parameters from an aspect of solid‐state physics Key properties of the material parameters for use in research work and a variety of Al x Ga1−x As/GaAs device applications are also discussed in detail

GaAs, AlAs, and AlxGa1−xAs: Material parameters for use in research and device applications

Thin film piezoelectric materials offer a number of advantages in microelectromechanical systems (MEMS), due to the large motions that can be generated, often with low hysteresis, the high available energy densities, as well as high sensitivity sensors with wide dynamic ranges, and low power requirements This paper reviews the literature in this field, with an emphasis on the factors that impact the magnitude of the available piezoelectric response For non-ferroelectric piezoelectrics such as ZnO and AlN, the importance of film orientation is discussed The high available electrical resistivity in AlN, its compatibility with CMOS processing, and its high frequency constant make it especially attractive in resonator applications The higher piezoelectric response available in ferroelectric films enables lower voltage operation of actuators, as well as high sensitivity sensors Among ferroelectric films, the majority of the MEMS sensors and actuators developed have utilized lead zirconate titanate (PZT) films as the transducer Randomly oriented PZT films show piezoelectric e(31, f) coefficients of about - 7 C/m(2) at the morphotropic phase boundary In PZT films, orientation, composition, grain size, defect chemistry, and mechanical boundary conditions all impact the observed piezoelectric coefficients The highest achievable piezoelectric responses can be observed in {001} oriented rhombohedrally-distorted perovskites For a variety of such films, e(31,f) coefficients of - 12 to - 27 C/m(2) have been reported

Thin Film Piezoelectrics for MEMS

This article reviews acoustic microfiuidics: the use of acoustic fields, principally ultrasonics, for application in microfiuidics. Although acoustics is a classical field, its promising, and indeed perplexing, capabilities in powerfully manipulating both fluids and particles within those fluids on the microscale to nanoscale has revived interest in it. The bewildering state of the literature and ample jargon from decades of research is reorganized and presented in the context of models derived from first principles. This hopefully will make the area accessible for researchers with experience in materials science, fluid mechanics, or dynamics. The abundance of interesting phenomena arising from nonlinear interactions in ultrasound that easily appear at these small scales is considered, especially in surface acoustic wave devices that are simple to fabricate with planar lithography techniques common in microfluidics, along with the many applications in microfluidics and nanofluidics that appear through the literature.

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Microscale acoustofluidics: Microfluidics driven via acoustics and ultrasonics

This review presents an overview of 20 years of worldwide development in the field of biosensors based on special types of surface acoustic wave (SAW) devices that permit the highly sensitive detection of biorelevant molecules in liquid media (such as water or aqueous buffer solutions). 1987 saw the first approaches, which used either horizontally polarized shear waves (HPSW) in a delay line configuration on lithium tantalate (LiTaO3) substrates or SAW resonator structures on quartz or LiTaO3 with periodic mass gratings. The latter are termed “surface transverse waves” (STW), and they have comparatively low attenuation values when operated in liquids. Later Love wave devices were developed, which used a film resonance effect to significantly reduce attenuation. All of these sensor approaches were accompanied by the development of appropriate sensing films. First attempts used simple layers of adsorbed antibodies. Later approaches used various types of covalently bound layers, for example those utilizing intermediate hydrogel layers. Recent approaches involve SAW biosensor devices inserted into compact systems with integrated fluidics for sample handling. To achieve this, the SAW biosensors can be embedded into micromachined polymer housings. Combining these two features will extend the system to create versatile biosensor arrays for generic lab use or for diagnostic purposes.

Surface acoustic wave biosensors: a review

This paper presents a state-of-the-art review on a hot topic in the literature, i.e., vibration based energy harvesting techniques, including theory, modelling methods and the realizations of the piezoelectric, electromagnetic and electrostatic approaches. To minimize the requirement of external power source and maintenance for electric devices such as wireless sensor networks, the energy harvesting technique based on vibrations has been a dynamic field of studying interest over past years. One important limitation of existing energy harvesting techniques is that the power output performance is seriously subject to the resonant frequencies of ambient vibrations, which are often random and broadband. To solve this problem, researchers have concentrated on developing efficient energy harvesters by adopting new materials and optimising the harvesting devices. Particularly, among these approaches, different types of energy harvesters have been designed with consideration of nonlinear characteristics so that the frequency bandwidth for effective energy harvesting of energy harvesters can be broadened. This paper reviews three main and important vibration-to-electricity conversion mechanisms, their design theory or methods and potential applications in the literature. As one of important factors to estimate the power output performance, the energy conversion efficiency of different conversion mechanisms is also summarised. Finally, the challenging issues based on the existing methods and future requirement of energy harvesting are discussed.

A comprehensive review on vibration energy harvesting: Modelling and realization

Direct piezoelectric coupling to surface elastic waves

Ultrasonic surface‐wave amplification in cadmium sulfide

Surface elastic waves have been generated at 60 MHz by magnetostrictive coupling in yttrium iron garnet (YIG). The transducers were evaporated aluminum meander lines. For a YIG plate with the (110) axis normal to the free surface and propagation along the (001) axis, maximum coupling occurred for the static field parallel to the direction of propagation. The effect of the internal magnetic field gradient on the transducer efficiency and the signal delay is discussed.

Magnetostrictive generation of surface elastic waves

Calculated and measured elastic surface-wave velocities are reported for α-quartz, CdS, GaAs, InSb, Ge, Si, Te, YIG (yttrium iron garnet), LiNbO 3 , ZnO, and PZT-4 (lead zirconate titanate).

http://ieeexplore.ieee.org/iel5/5/31112/01448620.pdf

F. W. Voltmer

Papers

Direct piezoelectric coupling to surface elastic waves

Ultrasonic surface‐wave amplification in cadmium sulfide

Magnetostrictive generation of surface elastic waves

Measured and calculated surface-wave velocities