F
Franck Carcenac
Researcher at University of Toulouse
Publications - 74
Citations - 2269
Franck Carcenac is an academic researcher from University of Toulouse. The author has contributed to research in topics: Resist & Electron-beam lithography. The author has an hindex of 20, co-authored 68 publications receiving 2124 citations. Previous affiliations of Franck Carcenac include Hoffmann-La Roche & Centre national de la recherche scientifique.
Papers
More filters
Journal ArticleDOI
Electron beam lithography: resolution limits and applications
Christophe Vieu,Franck Carcenac,A. Pépin,Yong Chen,M. Mejias,A. Lebib,L. Manin-Ferlazzo,L. Couraud,H. Launois +8 more
TL;DR: In this article, the authors report on the resolution limits of EBL in the conventional polymethylmethacrylate (PMMA) organic resist and show that resolution can be pushed below 10 nm for isolated features and dense arrays of periodic structures can be fabricated at a pitch of 30 nm, leading to a density close to 700 Gbit/in2.
Journal ArticleDOI
A Combined Top‐Down/Bottom‐Up Approach for the Nanoscale Patterning of Spin‐Crossover Coordination Polymers
Gábor Molnár,Saioa Cobo,José Antonio Real,Franck Carcenac,Emmanuelle Daran,Christophe Vieu,Azzedine Bousseksou +6 more
TL;DR: In this paper, the 3D spin-crossover coordination polymer Fe(pyrazine) was constructed using a combination of lift-off and bottom-up (MSA) methods.
Journal ArticleDOI
Study of large area high density magnetic dot arrays fabricated using synchrotron radiation based x‐ray lithography
F. Rousseaux,Dominique Decanini,Franck Carcenac,Edmond Cambril,Marie-Françoise Ravet,Claude Chappert,N. Bardou,Bernard Bartenlian,P. Veillet +8 more
TL;DR: In this article, large area arrays of dots have been patterned in Au/Co/Au(111) sandwiches with ultrathin Co layers and a perpendicular easy magnetization axis.
Journal ArticleDOI
Nanoimprint lithography for a large area pattern replication
TL;DR: In this paper, the authors report on replication of high resolution patterns over a 4 in. wafer area by imprint lithography with a commercial hydraulic press and a pair of hot plates.
Journal ArticleDOI
50‐nm x‐ray lithography using synchrotron radiation
Yong Chen,R. K. Kupka,F. Rousseaux,Franck Carcenac,Dominique Decanini,Marie-Françoise Ravet,H. Launois +6 more
TL;DR: In this article, a technology of proximity x-ray lithography has been developed to replicate patterns of sub-100-nm feature size using synchrotron radiation, and the results are analyzed in terms of a scaling rule to evaluate the resolution limit as a function of proximity gap.