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Franck Carcenac

Researcher at University of Toulouse

Publications -  74
Citations -  2269

Franck Carcenac is an academic researcher from University of Toulouse. The author has contributed to research in topics: Resist & Electron-beam lithography. The author has an hindex of 20, co-authored 68 publications receiving 2124 citations. Previous affiliations of Franck Carcenac include Hoffmann-La Roche & Centre national de la recherche scientifique.

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Electron beam lithography: resolution limits and applications

TL;DR: In this article, the authors report on the resolution limits of EBL in the conventional polymethylmethacrylate (PMMA) organic resist and show that resolution can be pushed below 10 nm for isolated features and dense arrays of periodic structures can be fabricated at a pitch of 30 nm, leading to a density close to 700 Gbit/in2.
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A Combined Top‐Down/Bottom‐Up Approach for the Nanoscale Patterning of Spin‐Crossover Coordination Polymers

TL;DR: In this paper, the 3D spin-crossover coordination polymer Fe(pyrazine) was constructed using a combination of lift-off and bottom-up (MSA) methods.
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Study of large area high density magnetic dot arrays fabricated using synchrotron radiation based x‐ray lithography

TL;DR: In this article, large area arrays of dots have been patterned in Au/Co/Au(111) sandwiches with ultrathin Co layers and a perpendicular easy magnetization axis.
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Nanoimprint lithography for a large area pattern replication

TL;DR: In this paper, the authors report on replication of high resolution patterns over a 4 in. wafer area by imprint lithography with a commercial hydraulic press and a pair of hot plates.
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50‐nm x‐ray lithography using synchrotron radiation

TL;DR: In this article, a technology of proximity x-ray lithography has been developed to replicate patterns of sub-100-nm feature size using synchrotron radiation, and the results are analyzed in terms of a scaling rule to evaluate the resolution limit as a function of proximity gap.