There is, I think, something ethereal about i —the square root of minus one. I remember first hearing about it at school. It seemed an odd beast at that time—an intruder hovering on the edge of reality.

Usually familiarity dulls this sense of the bizarre, but in the case of i it was the reverse: over the years the sense of its surreal nature intensified. It seemed that it was impossible to write mathematics that described the real world in …

I and i

In situ site-specific specimen preparation for atom probe tomography.

Since the appearance of the title paper, a number of new developments have occurred which need to be included in that body of material. We present additional remarks and clarifications which supplement and update numerous aspects of the Bethe theory discussed in the earlier paper. We also bring the bibliography up to date. Plasma stopping power, the ${z}^{3}$ effect, and stopping power for particles at extreme relativistic energies are among the new topics included. We make several comments on Fano's earlier review article, Ann. Rev. Nucl. Sci. 13, 1 (1963).

Inelastic Collisions of Fast Charged Particles with Atoms and Molecules-The Bethe Theory Revisited

Fundamentals and advances in magnesium alloy corrosion

A review of focused ion beam milling techniques for TEM specimen preparation

The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.

Introduction to focused ion beams : instrumentation, theory, techniques, and practice

Introduction to Focused Ion Beams

ANALYSIS CONDITIONS. Primary Beam. Primary Beam Energy. Angle of Incidence. Sputtering Rate. Detected Area. Species Monitored. End Point. Energy Distribution. PROFILE ISSUES. Ion Beam Mixing and Depth Resolution. Segregation and Charge Driven Diffusion. Matrix Effects. Surface Effects. Particulates. Crate Shape. Microtopography. Memory Effect. Count Rate Saturation. Sample Location and Mounting. Mass Interferences. QUANTIFICATION. Procedure. Calibration Using Ion Implantation. Systematic Trends in RSFs. SPECIFIC APPLICATIONS. Bulk Analysis. Metals and Rough Surfaces. Insulators. Interfaces. Multilayers. Residual Gas Elements. Small Areas. Major Elements. Appendices. Index.

Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis

A site-specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. A focused ion beam was used to slice an electron transparent membrane from a specific area of interest within a bulk sample. Micromanipulation lift-out procedures were then used to transport the electron-transparent specimen to a carbon-coated copper grid for subsequent TEM analysis. The FIB (focused ion beam) lift-out technique is a fast method for the preparation of site-specific TEM specimens. The versatility of this technique is demonstrated by presenting cross-sectioned TEM specimens from several types of materials systems, including a multi-layered integrated circuit on a Si substrate, a galvanized steel, a polycrystalline SiC ceramic fiber, and a ZnSe optical ceramic. These specimens have both complex surface geometry and interfaces with complex chemistry. FIB milling was performed sequentially through different layers of cross-sectioned materials so that preferential sputtering was not a factor in preparing TEM specimens. The FIB lift-out method for TEM analysis is a useful technique for the study of complex materials systems for TEM analysis.

Fred A. Stevie

Papers

A review of focused ion beam milling techniques for TEM specimen preparation

Introduction to focused ion beams : instrumentation, theory, techniques, and practice

Introduction to Focused Ion Beams

Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis

Applications of the FIB lift-out technique for TEM specimen preparation.