Droplet microfluidics generates and manipulates discrete droplets through immiscible multiphase flows inside microchannels Due to its remarkable advantages, droplet microfluidics bears significant value in an extremely wide range of area In this review, we provide a comprehensive and in-depth insight into droplet microfluidics, covering fundamental research from microfluidic chip fabrication and droplet generation to the applications of droplets in bio(chemical) analysis and materials generation The purpose of this review is to convey the fundamentals of droplet microfluidics, a critical analysis on its current status and challenges, and opinions on its future development We believe this review will promote communications among biology, chemistry, physics, and materials science

Emerging Droplet Microfluidics

Polymers have assumed the leading role as substrate materials for microfluidic devices in recent years. They offer a broad range of material parameters as well as material and surface chemical properties which enable microscopic design features that cannot be realised by any other class of materials. A similar range of fabrication technologies exist to generate microfluidic devices from these materials. This review will introduce the currently relevant microfabrication technologies such as replication methods like hot embossing, injection molding, microthermoforming and casting as well as photodefining methods like lithography and laser ablation for microfluidic systems and discuss academic and industrial considerations for their use. A section on back-end processing completes the overview.

Polymer microfabrication technologies for microfluidic systems

SU-8 has become the favourite photoresist for high-aspect-ratio (HAR) and three-dimensional (3D) lithographic patterning due to its excellent coating, planarization and processing properties as well as its mechanical and chemical stability. However, as feature sizes get smaller and pattern complexity increases, particular difficulties and a number of material-related issues arise and need to be carefully considered. This review presents a detailed description of these effects and describes reported strategies and achieved SU-8 HAR and 3D structures up to August 2006.

https://iopscience.iop.org/article/10.1088/0960-1317/17/6/R01/pdf

SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography

Through manipulating fluids using microfabricated channeland chamber structures, microfluidics is a powerful tool to realize high sensitive, high speed, high throughput, and low cost analysis. In addition, the method can establish a well-controlled microenivroment for manipulating fluids and particles. It also has rapid growing implementations in both sophisticated chemical/biological analysis and low-cost point-of-care assays. Some unique phenomena emerge at the micrometer scale. For example, reactions are completed in a shorter amount of time as the travel distances of mass and heat are relatively small; the flows are usually laminar; and the capillary effect becomes dominant owing to large surface-to-volume ratios. In the meantime, the surface properties of the device material are greatly amplified, which can lead to either unique functions or problems that we would not encounter at the macroscale. Also, each material inherently corresponds with specific microfabrication strategies and certain native p...

Materials for Microfluidic Chip Fabrication

Microfluidics is an emerging field that has given rise to a large number of scientific and technological developments over the last few years. This review reports on the use of various materials, such as silicon, glass and polymers, and their related technologies for the manufacturing of simple microchannels and complex systems. It also presents the main application fields concerned with the different technologies and the most significant results reported by academic and industrial teams. Finally, it demonstrates the advantage of developing approaches for associating polymer technologies for manufacturing of fluidic elements with integration of active or sensitive elements, particularly silicon devices.

https://iopscience.iop.org/article/10.1088/0960-1317/17/5/R01/pdf

Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem : a review

In this paper we describe a new process for fabricating ultra-thick microfluidic devices utilizing SU-8 50 negative photoresist (PR) by standard UV lithography. Instead of using a conventional spin coater, a simple 'constant-volume-injection' method is used to create a thick SU-8 PR film up to 1.5 mm with a single coating. The SU-8 PR is self-planarized during the modified soft-baking process and forms a highly-uniform surface without any edge bead effect, which commonly occurs while using a spin coater. Photomasks can be in close contact with the PR and a better lithographic image can be generated. Experimental data show that the average thickness is 494.32 ± 17.13 μm for a 500 μm thick film (n = 7) and the uniformity is less than 3.1% over a 10 × 10 cm2 area. In this study, the temperatures for the soft-baking process and post-exposure baking are 120 °C and 60 °C, respectively. These proved to be capable of reducing the processing time and of obtaining a better pattern definition of the SU-8 structures. We also report on an innovative photomask design for fabricating ultra-deep trenches, which prevents the structures from cracking and distorting during developing and hard-baking processes. In this paper, two microfluidic structures have been demonstrated using the developed novel methods, including a micronozzle for thruster applications and a microfluidic device with micropost arrays for bioanalytical applications.

https://iopscience.iop.org/article/10.1088/0960-1317/12/5/312/pdf

A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist

This paper describes a fast, low-cost but reliable process for the fabrication of microfluidic systems on soda-lime glass substrates. Instead of using an expensive metal or polisilicon/nitride layer as an etch mask, a thin layer of AZ 4620 positive photoresist (PR) is used for buffered oxide etching (BOE) of soda-lime glass. A novel two-step baking process prolongs the survival time of the PR mask in the etchant, which avoids serious peeling problems of the PR. A new process to remove precipitated particles generated during the etching process is also reported in which the glass substrate is dipped into a 1 M hydrochloride solution. A microfluidic channel with a depth of 35.95±0.39 µm is formed after 40 min BOE in an ultrasonic bath. The resulting channel has a smooth profile with a surface roughness of less than 45.95±7.96 A. Glass chips with microfluidic channels are then bonded at 580 °C for 20 min to seal the channel while a slight pressure is applied. A new bonding process has been developed such that the whole process can be finished within 10 h. To our knowledge, this is the shortest processing time that has ever been reported. In the present study, an innovative microfluidic device, a `micro flow-through sampling chip', has been demonstrated using the fabrication method. Successful sampling and separation of Cy5-labelled bovine serum albumin (BSA) and anti-BSA has been achieved. This simple fabrication process is suitable for fast prototyping and mass production of microfluidic systems.

http://iopscience.iop.org/article/10.1088/0960-1317/11/6/316/pdf

A fast prototyping process for fabrication of microfluidic systems on soda-lime glass

This paper reports an innovative micromachine-based flow cytometer integrated with buried optical waveguides on soda-lime glass substrates. A novel optical waveguide using SU-8/spin-on-glass (SOG) double-layer structure is demonstrated, which increases light guiding efficiency due to smoother channel surface and larger difference of refractive index between SU-8 and organic-based SOG. Instead of using complex optical alignment system, detection light source is coupled with the waveguide with direct insertion of an etched optical fiber. A very high coupling efficiency can be achieved using this approach. In this study, the performance of the waveguides and insertion losses are measured. Experimental results show that the optical loss is less than 15 dB for a 40 mm long waveguide. With the integrated optical waveguides, a micro flow cytometer capable of particle counting has been realized. Data show that microparticles can be hydrodynamically focused and counted successfully without fluorescent labeling using the miniaturized flow cytometer with the integrated optical detection system.

Micro flow cytometers with buried SU-8/SOG optical waveguides

This paper reports a micro flow cytometer integrated with an innovative buried optical waveguide on soda-lime glass substrates. A novel optical waveguide using SU8/SOG (spin-on-glass) double-layer structure was demonstrated. The light guiding efficiency was improved due to smoother channel surface and larger difference of refractive index between SU-8 and organic-based SOG. Instead of using complicated optical alignment system, detection light source was coupled into the waveguide by directly inserting an etched optical fiber. A very high coupling efficiency could be achieved by this approach. In this study, the performance of the waveguides and insertion losses of the chip were measured. Results showed that the optical loss was less than 15 dB for a 40-mm long waveguide. The buried optical waveguide provides a built-in detection source for cell counting. Preliminary results indicated that a multi-cell-line flow cytometer with built-in detection system could be realized.

http://ieeexplore.ieee.org/iel5/7726/21214/00984319.pdf

Guan-Liang Chang

Papers

A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist

A fast prototyping process for fabrication of microfluidic systems on soda-lime glass

Micro flow cytometers with buried SU-8/SOG optical waveguides

Multi-cell-line micro flow cytometers with buried SU-8/SOG optical waveguides