Author
Guifu Ding
Bio: Guifu Ding is an academic researcher from Shanghai Jiao Tong University. The author has contributed to research in topics: Surface micromachining & Heat sink. The author has an hindex of 23, co-authored 294 publications receiving 2132 citations.
Papers published on a yearly basis
Papers
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TL;DR: In this article, a novel micropump actuated by NiTi/Si composite diaphragm was described, which is composed of a deformable chamber and two silicon flap check valves.
Abstract: A novel micropump actuated by NiTi/Si composite diaphragm was described in this paper. The driving principle, microfabrication processes and characteristics of the pump were reported. The pump is composed of a deformable chamber and two silicon flap check valves. The outer dimension of the pump is 6 mm ×6 mm ×1.5 mm , with the diaphragm size of 3 mm ×3 mm ×20 μm. The fabrication processes include silicon micromachining and AuSi eutectic bonding. By using the recoverable force of NiTi thin-film and biasing force of silicon membrane, the actuation diaphragm realized reciprocating motion effectively. Experimental results show that the pump has superior performance, such as high pumping yield (up to 340 μl/min), high working frequency (up to 100 Hz), and long fatigue life time (more than 4×107 working cycles).
145 citations
TL;DR: In this article, the heat transfer performance of the micro-channel heat sinks with five different pin-fin configurations were investigated numerically and experimentally, and the computational fluid dynamics simulations showed that the pin fin shape changes the thermo-fluid characteristics of a microchannel heat sink inducing the lowest thermal resistance and uniformity of the chip's top surface (UCTS).
117 citations
TL;DR: In this paper, the heat transfer and flow characteristics of the microchannel heat sink (MCHS) with bidirectional ribs (BRs) are experimentally and numerically studied.
109 citations
TL;DR: In this article, the influence of maskant, gas pressure and the composition of reactive gas on the etch rate and the etched surface of diamond is studied, and the etching result reveals that increase in argon always leads to the rate going down, thus it is not necessary.
58 citations
TL;DR: In this article, an inertial switch based on a micro-electro-mechanical system (MEMS) was designed, which consists of three main parts: a proof mass as the movable electrode, a cross beam as the stationary electrode and a movable contact point to prolong the contact time.
Abstract: A novel inertial switch based on a micro-electro-mechanical system (MEMS) was designed, which consists of three main parts: a proof mass as the movable electrode, a cross beam as the stationary electrode and a movable contact point to prolong the contact time. A MATLAB/Simulink model, which had been verified by comparison with ANSYS transient simulation, was built to simulate the dynamic response, based on which the contact-enhancing mechanism was confirmed and the dependence of threshold acceleration on the proof mass thickness was studied. The simulated dynamic responses under various accelerations exhibit satisfactory device behaviors: the switch-on time is prolonged under transient acceleration; the switch-on state is more continuous than the conventional design under long lasting acceleration. The inertial micro-switch was fabricated by multilayer electroplating technology and then tested by a drop hammer experiment. The test results indicate that the contact effect was improved significantly and a steady switch-on time of over 50 µs was observed under half-sine wave acceleration with 1 ms duration, in agreement with the dynamic simulation.
51 citations
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Journal Article•
28,685 citations
IBM1
TL;DR: Damascene copper electroplating for on-chip interconnections, a process that was conceived and developed in the early 1990s, makes it possible to fill submicron trenches and vias with copper without creating a void or a seam and has thus proven superior to other technologies of copper deposition as discussed by the authors.
Abstract: Damascene copper electroplating for on-chip interconnections, a process that we conceived and developed in the early 1990s, makes it possible to fill submicron trenches and vias with copper without creating a void or a seam and has thus proven superior to other technologies of copper deposition. We discuss here the relationship of additives in the plating bath to superfilling, the phenomenon that results in superconformal coverage, and we present a numerical model which accounts for the experimentally observed profile evolution of the plated metal.
1,006 citations
TL;DR: Different strategies to achieve ice repellency on various hydrophilic and hydrophobic surfaces are reviewed with a focus on the recent development of superhydrophobic and lubricant-infused surfaces.
Abstract: Ice repellency can be achieved on various hydrophilic and hydrophobic surfaces, although a surface that repels ice under all environmental scenarios remains elusive. Different strategies are reviewed with a focus on the recent development of superhydrophobic and lubricant-infused surfaces.
979 citations
TL;DR: A brief overview of microvalves can be found in this paper, where the authors focus on the actuation mechanisms and their applications, including flow regulation, on/off switching and sealing of liquids, gases or vacuums.
Abstract: This review gives a brief overview of microvalves, and focuses on the actuation mechanisms and their applications. One of the stumbling blocks for successful miniaturization and commercialization of fully integrated microfluidic systems was the development of reliable microvalves. Applications of the microvalves include flow regulation, on/off switching and sealing of liquids, gases or vacuums. Microvalves have been developed in the form of active or passive microvalves employing mechanical, non-mechanical and external systems. Even though great progress has been made during the last 20 years, there is plenty of room for further improving the performance of existing microvalves.
908 citations
TL;DR: In this article, the authors focus on the recent development in the synthesis, property characterization and application of aluminum, magnesium, and transition metal-based composites reinforced with carbon nanotubes and graphene nanosheets.
Abstract: One-dimensional carbon nanotubes and two-dimensional graphene nanosheets with unique electrical, mechanical and thermal properties are attractive reinforcements for fabricating light weight, high strength and high performance metal-matrix composites. Rapid advances of nanotechnology in recent years enable the development of advanced metal matrix nanocomposites for structural engineering and functional device applications. This review focuses on the recent development in the synthesis, property characterization and application of aluminum, magnesium, and transition metal-based composites reinforced with carbon nanotubes and graphene nanosheets. These include processing strategies of carbonaceous nanomaterials and their composites, mechanical and tribological responses, corrosion, electrical and thermal properties as well as hydrogen storage and electrocatalytic behaviors. The effects of nanomaterial dispersion in the metal matrix and the formation of interfacial precipitates on these properties are also addressed. Particular attention is paid to the fundamentals and the structure–property relationships of such novel nanocomposites.
877 citations