The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon- and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection.

http://iopscience.iop.org/article/10.1088/0034-4885/74/3/036101/pdf

Cantilever-like micromechanical sensors

https://poggiolab.unibas.ch/full/2012PootPR.pdf

Mechanical systems in the quantum regime

http://people.bu.edu/parkhs/Papers/eomPR2011.pdf

Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

The advances in micro- and nanofabrication technologies enable the preparation of increasingly smaller mechanical transducers capable of detecting the forces, motion, mechanical properties and masses that emerge in biomolecular interactions and fundamental biological processes. Thus, biosensors based on nanomechanical systems have gained considerable relevance in the last decade. This review provides insight into the mechanical phenomena that occur in suspended mechanical structures when either biological adsorption or interactions take place on their surface. This review guides the reader through the parameters that change as a consequence of biomolecular adsorption: mass, surface stress, effective Young's modulus and viscoelasticity. The mathematical background needed to correctly interpret the output signals from nanomechanical biosensors is also outlined here. Other practical issues reviewed are the immobilization of biomolecular receptors on the surface of nanomechanical systems and methods to attain that in large arrays of sensors. We then describe some relevant realizations of biosensor devices based on nanomechanical systems that harness some of the mechanical effects cited above. We finally discuss the intrinsic detection limits of the devices and the limitation that arises from non-specific adsorption.

/pdf/biosensors-based-on-nanomechanical-systems-3cb1ie9fh4.pdf

Biosensors based on nanomechanical systems

Mechanical systems are ideal candidates for studying quantumbehavior of macroscopic objects. To this end, a mechanical resonator has to be cooled to its ground state and its position has to be measured with great accuracy. Currently, various routes to reach these goals are being explored. In this review, we discuss different techniques for sensitive position detection and we give an overview of the cooling techniques that are being employed. The latter include sideband cooling and active feedback cooling. The basic concepts that are important when measuring on mechanical systems with high accuracy and/or at very low temperatures, such as thermal and quantum noise, linear response theory, and backaction, are explained. From this, the quantum limit on linear position detection is obtained and the sensitivities that have been achieved in recent opto and nanoelectromechanical experiments are compared to this limit. The mechanical resonators that are used in the experiments range from meter-sized gravitational wave detectors to nanomechanical systems that can only be read out using mesoscopic devices such as single-electron transistors or superconducting quantum interference devices. A special class of nanomechanical systems are bottom-up fabricated carbon-based devices, which have very high frequencies and yet a large zero-point motion, making them ideal for reaching the quantum regime. The mechanics of some of the different mechanical systems at the nanoscale is studied. We conclude this review with an outlook of how state-of-the-art mechanical resonators can be improved to study quantum {\it mechanics}.

/pdf/mechanical-systems-in-the-quantum-regime-2g3p0kkzaq.pdf

A theoretical and experimental investigation is presented on the intermodal coupling between the flexural vibration modes of a single clamped-clamped beam. Nonlinear coupling allows an arbitrary flexural mode to be used as a self-detector for the amplitude of another mode, presenting a method to measure the energy stored in a specific resonance mode. The observed complex nonlinear dynamics are quantitatively captured by a model based on coupling of the modes via the beam extension; the same mechanism is responsible for the well-known Duffing nonlinearity in clamped-clamped beams.

/pdf/nonlinear-modal-interactions-in-clamped-clamped-mechanical-mg4y16nfcw.pdf

Nonlinear Modal Interactions in Clamped-Clamped Mechanical Resonators

The effective Young’s modulus of silicon nitride cantilevers is determined for thicknesses in the range of 20–684 nm by measuring resonance frequencies from thermal noise spectra. A significant deviation from the bulk value is observed for cantilevers thinner than 150 nm. To explain the observations we have compared the thickness dependence of the effective Young’s modulus for the first and second flexural resonance mode and measured the static curvature profiles of the cantilevers. We conclude that surface stress cannot explain the observed behavior. A surface elasticity model fits the experimental data consistently.

/pdf/size-dependent-effective-young-s-modulus-of-silicon-nitride-500rivsu5o.pdf

Size-dependent effective Young’s modulus of silicon nitride cantilevers

We investigate the nonlinear dynamics of microcantilevers. We demonstrate mechanical stiffening of the frequency response at large amplitudes, originating from the geometric nonlinearity. At strong driving the cantilever amplitude is bistable. We map the bistable regime as a function of drive frequency and amplitude, and suggest several applications for the bistable microcantilever, of which a mechanical memory is demonstrated.

/pdf/mechanical-stiffening-bistability-and-bit-operations-in-a-3pseti02jf.pdf

Mechanical stiffening, bistability, and bit operations in a microcantilever

We demonstrate the coupling between the fundamental and second flexural modes of a microcantilever. A mechanical analogue of cavity-optomechanics is then employed, where the mechanical cavity is formed by the second vibrational mode of the same cantilever, coupled to the fundamental mode via the geometric nonlinearity. By exciting the cantilever at the sum and difference frequencies between fundamental and second flexural modes, the motion of the fundamental mode of the cantilever is damped and amplified. This concept makes it possible to enhance or suppress the Q-factor over a wide range.

/pdf/q-factor-control-of-a-microcantilever-by-mechanical-sideband-5ekibkv2n9.pdf

Q-factor control of a microcantilever by mechanical sideband excitation

We demonstrate the coupling between the fundamental and second flexural mode of a microcantilever. A mechanical analogue of cavity-optomechanics is then employed, where the mechanical cavity is formed by the second vibrational mode of the same cantilever, coupled to the fundamental mode via the geometric nonlinearity. By exciting the cantilever at the sum and difference frequencies between fundamental and second flexural mode, the motion of the fundamental mode of the cantilever is amplified and damped. This concept makes it possible to enhance or suppress the Q-factor over a wide range.

H.J.R. Westra

Papers

Nonlinear Modal Interactions in Clamped-Clamped Mechanical Resonators

Size-dependent effective Young’s modulus of silicon nitride cantilevers

Mechanical stiffening, bistability, and bit operations in a microcantilever

Q-factor control of a microcantilever by mechanical sideband excitation

Q-factor control of a microcantilever by mechanical sideband excitation