H
Hubert Lorenz
Researcher at École Polytechnique Fédérale de Lausanne
Publications - 19
Citations - 2853
Hubert Lorenz is an academic researcher from École Polytechnique Fédérale de Lausanne. The author has contributed to research in topics: Resist & Photoresist. The author has an hindex of 15, co-authored 19 publications receiving 2778 citations.
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Journal ArticleDOI
SU-8: a low-cost negative resist for MEMS
TL;DR: In this paper, the characterization of a home-made negative photoresist developed by IBM is described, called SU-8, which can be produced with commercially available materials and has an outstanding aspect ratio near 15 for lines and 10 for trenches, combined with the electroplating of copper allow the fabrication of highly integrated electromagnetic coils.
Journal ArticleDOI
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
TL;DR: The IBM SU-8 resist as discussed by the authors is an epoxy-based resist designed specifically for ultrathick, high-aspect-ratio MEMS-type applications and it has been shown that with single-layer coatings, thicknesses of more than 500 μm can be achieved reproducibly.
Journal ArticleDOI
Mechanical characterization of a new high-aspect-ratio near UV-photoresist
TL;DR: In this article, the mechanical and thermal properties of the SU-8 resist have been analyzed using a single spin process with a UV aligner, which produces outstanding aspect ratios, 15 for lines and trenches.
Journal ArticleDOI
3D microfabrication by combining microstereolithography and thick resist UV lithography
TL;DR: In this article, a new approach for the realization of true 3D polymer structures is presented, which consists in adding, in a post-processing microstereolithography step, threeD polymer microstructures on top of a micropart patterned by means of planar processes such as thin films, bulk silicon etching or high aspect ratio structuration (LIGA, RIE, thick resist).
Proceedings ArticleDOI
High-aspect-ratio, ultrathick, negative-tone near-uv photoresist for MEMS applications
TL;DR: The IBM SU-8 resist material as mentioned in this paper is an epoxy-based resist designed specifically for ultrathick, high-aspect-ratio MEMS-type applications and it has been shown that with single-layer coatings, thicknesses of more than 500 /spl mu/m can be achieved reproducibly.