This article presents a fully depleted monolithic active pixel sensor technology compatible with a standard deep submicrometer 110-nm CMOS process. Passive test pixels structures, produced in various flavors, have proved the feasibility of 100- and 300- $\mu \text{m}$ -thick active substrates. Active pixel sensors with monolithically integrated analog and digital electronics, consisting of a 24 $\times $ 24 array of pixels with 50- $\mu \text{m}$ pitch, have been shown to be fully functional when operating in the full depletion mode. Characterization results obtained with a proton microbeam and a 55Fe radiation source are presented and discussed.

Fully Depleted MAPS in 110-nm CMOS Process With 100–300-μm Active Substrate

PERCIVAL ("Pixelated Energy Resolving CMOS Imager, Versatile And Large") is a monolithic active pixel sensor (MAPS) based on CMOS technology. Is being developed by DESY, RAL/STFC, Elettra, DLS, and ...

https://iopscience.iop.org/article/10.1088/1748-0221/11/02/C02090/pdf

Characterisation of a PERCIVAL monolithic active pixel prototype using synchrotron radiation

New accelerator-based photon sources require pixel detectors with fast readout rate and large dynamic range. When the development is focused on detecting soft x-ray single photons then low noise is another competing requirement of the detector. FLORA, conceived to exploit the high repetition rate operation at LCLS-II with focus on soft X-rays, is being developed to address these needs. It targets single photon sensitivity at 250 eV, a dynamic range of 104 photons per pixel per frame, a continuous readout of more than 40k frames per second (kfps), and a pixel of 50 um × 50 um. We present and discuss technical choices and test results of the first prototypes.

Hybridized MAPS with an in-pixel A-to-D conversion readout ASIC

Our goal is to provide the scientific community with a large (10cm × 10cm) pixellated detector featuring a large dynamic range (1–105 photons), good spatial resolution (27µm), good Quantum Efficiency (QE) in the low energy range (250eV–1keV), variable readout speed (up to 120 frames/s), i.e. with characteristics compatible with user needs at today's of low-energy Free Electron Lasers (FEL) and synchrotron sources.

PERCIVAL soft X-ray imager

High brilliance synchrotrons and Free Electron Lasers (FELs) require high performing detector systems to realise their full potential. High dynamic range, low noise and high frame rate are all of great importance. In this paper we describe the P2M CMOS sensor, designed for soft X-ray detection at such facilities. We refer to previous work on test devices demonstrating a noise of 5Me- and quantum efficiency of >80% at 400eV (and with good sensitivity even below this value). Initial test results on the first Front Side Illuminated (FSI) 2 Megapixel device are also presented, and an outline of future work is described.

/pdf/p2m-a-2mpixel-cmos-image-sensor-for-soft-x-ray-detection-b8ucu1ifbe.pdf

I. Sedgwick

Papers

PERCIVAL soft X-ray imager

P2M: A 2MPixel CMOS Image Sensor for Soft X-Ray Detection