Ildar I. Amirov

Bio: Ildar I. Amirov is an academic researcher from Russian Academy of Sciences. The author has contributed to research in topics: Resistive touchscreen & Cantilever. The author has an hindex of 3, co-authored 6 publications receiving 17 citations.

A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing

Abstract: Electrostatically actuated MEMS switch with the resistive contact is presented. Design of the switch includes the active contact breaking mechanism, which allows to detach the beam from the signal electrode in case of sticking. The mechanism is realized by the presence of two driving electrodes under the beam. The switch is fabricated by the surface micromachining. Finite element simulation and experimental investigation of the switch in a cold regime are performed.

Resonance properties of multilayer metallic nanocantilevers

Abstract: Resonant properties of the three-layer metallic cantilevers with 40 nm thickness are investigated. Two types of the nanocantilevers were fabricated: Cr-Al-Cr and Ti-Al-Ti. Resonant frequencies of the nanocantilevers were determined from the experimentally obtained resonant curves. Cantilever oscillations were excited by the electric force, the registration of the cantilever motion was performed by the optical lever method. Dependencies of the first and the second resonant frequencies on the cantilever length and width were experimentally obtained. The experimental data analysis and the comparison with the theoretical predictions were performed. Relations between the cantilever resonance properties and its dimensions and material are discussed.

Influence of ion-plasma treatment on residual stress in the microcantilever

Abstract: The influence of ion-plasma treatment on residual stress in the microcantilever is investigated. The ability of treatment with energy below the sputtering threshold to affect the mechanical stress is shown. It is also demonstrated that a preliminary vacuum thermal annealing of samples reduces the influence of ion bombardment on the residual stress. With the increase of the annealing temperature the effect of ion bombardment disappears.

Resonance properties of metallic nanocantilevers

Abstract: Resonant properties of the three-layer metallic cantilevers with 40-120 nm thickness were investigated. Two types of cantilevers were fabricated: Cr/Al/Cr and Ti/Al/Ti. Dependencies of the fundamental resonant frequency and Q-factor on the cantilever length, width and thickness were experimentally obtained. The experimental data analysis and the comparison with the theoretical predictions were performed. Dependence of material properties on the cantilever thickness was not observed. Energy losses in the surface layer of the cantilever were the dominant energy loss mechanism.

A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Abstract: Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

Stiction-protected MEMS switch with low actuation voltage

Abstract: Commercial success of microelectromechanical systems (MEMS) switches is limited by several issues. A high actuation voltage requires special circuitry solutions that increase size and cost of the switch. Another problem is the lack of reliability due to the stiction phenomenon. This paper presents a single-pole double-throw MEMS switch with electrostatic actuation and resistive contact. The device is based on an aluminum beam suspended by the torsion springs over the driving and signal electrodes. The design provides the pull-in voltage as low as 4.9 V. At the same time, the switch is equipped with the mechanism that protects it from stiction. The device is able to operate in the passive and active opening regimes. Recovery of the device after stiction in the hot switching conditions is demonstrated. In the cold mode, stiction is not observed at the transmitted DC power up to 25 mW. The resonant properties and response time of the switch are investigated. The on-resistance and the lifecycle are discussed. The proposed design is characterized by the high mechanical reliability. The main reason of failure is an increase of the on-resistance because of carbon accumulation on the platinum contacts.

Time-dependent motion of 3D-printed soft thermal actuators for switch application in electric circuits

Abstract: We present a reversible and three-dimensional (3D)-printed soft thermal actuator (3-STA) and transient analysis for electrical switch applications. The actuating performance as a switch was numerically modeled to predict the transient motion of the 3-STA. For simple fabrication, polylactic acid (PLA) filaments were directly printed onto a paper substrate. An electrical connection through the filament/paper composite was implemented to create the thermo-responsive soft actuator, which served as a switch. As a result, the 3-STA with 0.45 mm-thick PLA layer exhibited the most rapid (an average response time of 35.68 s) and stable actuation under 500 cycle tests. In addition, the developed model predicted the position of an actuator body well at a specific time and was comparable with the experimental results. The step current was successfully generated by delayed contacts between the actuators and pin headers, thereby controlling the electric power, which can be used for electrical components (e.g., a cooling fan). These results support the simple fabrication of an electrical switch through 3D printing and the development of transient analysis to estimate the position of soft actuators at a specific time.

Nonlocal Mechanical Behavior of Layered Nanobeams

Abstract: The research at hand deals with the mechanical behavior of beam-like nanostructures. Nanobeams are assembled of multiple layers of different materials and geometry giving a layered nanobeam. To properly address experimentally noticed size effects in structures of this type, an adequate nonlocal elasticity formulation must be applied. The present model relies on the stress-driven integral methodology that effectively circumvents known deficiencies of other approaches. As a main contribution, a set of differential equations and boundary conditions governing the underlaying mechanics is proposed and applied to two benchmark examples. The obtained results show the expected stiffening nonlocal behavior exhibiting most of smaller and smaller structures and modern devices.