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Ilya V. Uvarov
Publications - 4
Citations - 12
Ilya V. Uvarov is an academic researcher. The author has contributed to research in topics: Cantilever & Surface micromachining. The author has an hindex of 2, co-authored 4 publications receiving 11 citations.
Papers
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Proceedings ArticleDOI
A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing
TL;DR: In this paper, an active contact breaking mechanism is proposed to detach the beam from the signal electrode in case of sticking, which is realized by the presence of two driving electrodes under the beam.
Proceedings ArticleDOI
Resonance properties of multilayer metallic nanocantilevers
TL;DR: In this article, the resonance properties of the three-layer metallic cantilevers with 40 nm thickness were investigated and the experimental data analysis and the comparison with the theoretical predictions were performed.
Proceedings ArticleDOI
Electrostatically actuated MEMS switch with resistive contact
TL;DR: In this article, a three-layer metallic cantilever having nanoscale thickness and high length-to-thickness ratio was fabricated using surface micromachining.
Journal ArticleDOI
Resonance properties of metallic nanocantilevers
TL;DR: In this article, the fundamental resonant frequency and Q-factor on the cantilever length, width and thickness were experimentally obtained and the experimental data analysis and the comparison with the theoretical predictions were performed.