Ivan Petrov

TL;DR: In this paper, the authors review the present understanding of film growth processes and their role in microstructural evolution as a function of deposition variables including temperature, the presence of reactive species, and the use of low-energy ion irradiation during growth.

TL;DR: This work introduces a set of materials and design concepts for a rechargeable lithium ion battery technology that exploits thin, low modulus silicone elastomers as substrates, with a segmented design in the active materials, and unusual 'self-similar' interconnect structures between them.

TL;DR: In this paper, the potential for high-aspect-ratio trench filling applications by high power pulsed magnetron sputtering is demonstrated by deposition in via-structures.

TL;DR: The preferred orientation of polycrystalline TiN films grown by ultrahigh-vacuum reactive magnetron sputter deposition on amorphous SiO2 at 350°C in pure N2 discharges was controllably varied from (111) to completely (002) by varying the incident ion/metal flux ratio Ji/JTi from 1 to ≥5 with the N+2 ion energy Ei maintained constant at ≂20 eV (≂10 eV per incident accelerated N) as mentioned in this paper.

TL;DR: In this paper, the binding and diffusion energies of adatoms, molecules, and small clusters on polycrystalline TiN layers were calculated using density functional methods, and it was shown that growth of 111-oriented grains is favored under conditions typical for reactive sputter deposition, while the presence of excess atomic N leads to a reduced Ti diffusion length, an enhanced surface island nucleation rate, and a lower chemical potential on the (001) surface.