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Author

James K. Gillespie

Other affiliations: Wright-Patterson Air Force Base
Bio: James K. Gillespie is an academic researcher from Air Force Research Laboratory. The author has contributed to research in topics: High-electron-mobility transistor & Gallium nitride. The author has an hindex of 23, co-authored 67 publications receiving 1504 citations. Previous affiliations of James K. Gillespie include Wright-Patterson Air Force Base.


Papers
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TL;DR: In this paper, an empirically based physical model is presented to predict the expected extrinsic fT for many combinations of gate length and commonly used barrier layer thickness (tbar) on silicon nitride passivated T-gated AlGaN/GaN HEMTs.
Abstract: AlGaN/GaN high-electron mobility transistors (HEMTs) were fabricated on SiC substrates with epitaxial layers grown by multiple suppliers and methods. Devices with gate lengths varying from 0.50 to 0.09 mum were fabricated on each sample. We demonstrate the impact of varying the gate lengths and show that the unity current gain frequency response (fT) is limited by short-channel effects for all samples measured. We present an empirically based physical model that can predict the expected extrinsic fT for many combinations of gate length and commonly used barrier layer thickness (tbar) on silicon nitride passivated T-gated AlGaN/GaN HEMTs. The result is that even typical high-aspect-ratio (gate length to barrier thickness) devices show device performance limitations due to short-channel effects. We present the design tradeoffs and show the parameter space required to achieve optimal frequency performance for GaN technology. These design rules differ from the traditional GaAs technology by requiring a significantly higher aspect ratio to mitigate the short-channel effects.

293 citations

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TL;DR: In this paper, the authors demonstrated that Sc2O3 thin films deposited by plasma assisted molecular-beam epitaxy can be used simultaneously as a gate oxide and as a surface passivation layer on AlGaN/GaN high electron mobility transistors (HEMTs).
Abstract: We demonstrated that Sc2O3 thin films deposited by plasma-assisted molecular-beam epitaxy can be used simultaneously as a gate oxide and as a surface passivation layer on AlGaN/GaN high electron mobility transistors (HEMTs). The maximum drain source current, IDS, reaches a value of over 0.8 A/mm and is ∼40% higher on Sc2O3/AlGaN/GaN transistors relative to conventional HEMTs fabricated on the same wafer. The metal–oxide–semiconductor HEMTs (MOS–HEMTs) threshold voltage is in good agreement with the theoretical value, indicating that Sc2O3 retains a low surface state density on the AlGaN/GaN structures and effectively eliminates the collapse in drain current seen in unpassivated devices. The MOS-HEMTs can be modulated to +6 V of gate voltage. In particular, Sc2O3 is a very promising candidate as a gate dielectric and surface passivant because it is more stable on GaN than is MgO.

136 citations

Journal ArticleDOI
TL;DR: In this article, the first CW Ka-band RF power measurements at 35 GHz from a passivated Al0.82In0.18N/GaN high-electron mobility transistor on SiC with 9.8-nm-thin barrier were reported.
Abstract: We report the first CW Ka-band radio-frequency (RF) power measurements at 35 GHz from a passivated Al0.82In0.18N/GaN high-electron mobility transistor on SiC with 9.8-nm-thin barrier. This device delivered a maximum of 5.8 W/mm with a power-added efficiency of 43.6% biased at VDS = 20 V and 10% IDSS when matched for power at CW. The device was grown by metal-organic chemical vapor deposition with 2.8-?m source-drain spacing and a gate length of 160 nm. An excellent ohmic contact was obtained with an Rc of 0.62 ?·mm. The maximum extrinsic transconductance was 354 mS/mm with an IDSS of 1197 mA/mm at a VGS of 0 V, an ft of 79 GHz, and an fmax of 113.8 GHz.

96 citations

Journal ArticleDOI
TL;DR: In this paper, a two-stage digital etching technique for GaAs is presented, which uses hydrogen peroxide and an acid in a two step etching process to remove GaAs in approximately 15 A increments.
Abstract: A new room temperature wet chemical digital etching technique for GaAs is presented which uses hydrogen peroxide and an acid in a two‐step etching process to remove GaAs in approximately 15 A increments. In the first step, GaAs is oxidized by 30% hydrogen peroxide to form an oxide layer that is diffusion limited to a thickness of 14 to 17 A for time periods from 15 to 120 s. The second step removes this oxide layer with an acid that does not attack unoxidized GaAs. These steps are repeated in succession until the desired etch depth is obtained. Experimental results are presented for this digital etching technique demonstrating the etch rate and process invariability with respect to hydrogen peroxide and acid exposure times.

93 citations

Journal ArticleDOI
TL;DR: In this paper, the first conventionally processed AlGaN/GaN high electron mobility transistors (HEMTs) on free-standing chemical-vapor-deposited (CVD) diamond substrate wafers were reported.
Abstract: We report on electrical characterization and uniformity measurements of the first conventionally processed AlGaN/GaN high electron mobility transistors (HEMTs) on free-standing chemical-vapor-deposited (CVD) diamond substrate wafers. DC and RF device performance is reported on HEMTs fabricated on ~ 130-?m-thick and 30-mm round CVD diamond substrates without mechanical carrying wafers. A measured fT ·LG product of 12.5 GHz ·?m is the best reported data for all GaN-on-diamond technology. X-band power performance of AlGaN/GaN HEMTs on diamond is reported to be 2.08 W/mm and 44.1% power added efficiency. This letter demonstrates the potential for GaN HEMTs to be fabricated on CVD diamond substrates utilizing contact lithography process techniques. Further optimization of the epitaxy and diamond substrate attachment process could provide for improvements in thermal spreading while preserving the electrical properties.

68 citations


Cited by
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[...]

08 Dec 2001-BMJ
TL;DR: There is, I think, something ethereal about i —the square root of minus one, which seems an odd beast at that time—an intruder hovering on the edge of reality.
Abstract: There is, I think, something ethereal about i —the square root of minus one. I remember first hearing about it at school. It seemed an odd beast at that time—an intruder hovering on the edge of reality. Usually familiarity dulls this sense of the bizarre, but in the case of i it was the reverse: over the years the sense of its surreal nature intensified. It seemed that it was impossible to write mathematics that described the real world in …

33,785 citations

Journal ArticleDOI
TL;DR: The role of defects and impurities on the transport and optical properties of bulk, epitaxial, and nanostructures material, the difficulty in p-type doping, and the development of processing techniques like etching, contact formation, dielectrics for gate formation, and passivation are discussed in this article.
Abstract: Gallium oxide (Ga2O3) is emerging as a viable candidate for certain classes of power electronics, solar blind UV photodetectors, solar cells, and sensors with capabilities beyond existing technologies due to its large bandgap. It is usually reported that there are five different polymorphs of Ga2O3, namely, the monoclinic (β-Ga2O3), rhombohedral (α), defective spinel (γ), cubic (δ), or orthorhombic (e) structures. Of these, the β-polymorph is the stable form under normal conditions and has been the most widely studied and utilized. Since melt growth techniques can be used to grow bulk crystals of β-GaO3, the cost of producing larger area, uniform substrates is potentially lower compared to the vapor growth techniques used to manufacture bulk crystals of GaN and SiC. The performance of technologically important high voltage rectifiers and enhancement-mode Metal-Oxide Field Effect Transistors benefit from the larger critical electric field of β-Ga2O3 relative to either SiC or GaN. However, the absence of clear demonstrations of p-type doping in Ga2O3, which may be a fundamental issue resulting from the band structure, makes it very difficult to simultaneously achieve low turn-on voltages and ultra-high breakdown. The purpose of this review is to summarize recent advances in the growth, processing, and device performance of the most widely studied polymorph, β-Ga2O3. The role of defects and impurities on the transport and optical properties of bulk, epitaxial, and nanostructures material, the difficulty in p-type doping, and the development of processing techniques like etching, contact formation, dielectrics for gate formation, and passivation are discussed. Areas where continued development is needed to fully exploit the properties of Ga2O3 are identified.

1,535 citations

Journal ArticleDOI
TL;DR: The UWBG semiconductor materials, such as high Al‐content AlGaN, diamond and Ga2O3, advanced in maturity to the point where realizing some of their tantalizing advantages is a relatively near‐term possibility.
Abstract: J. Y. Tsao,* S. Chowdhury, M. A. Hollis,* D. Jena, N. M. Johnson, K. A. Jones, R. J. Kaplar,* S. Rajan, C. G. Van de Walle, E. Bellotti, C. L. Chua, R. Collazo, M. E. Coltrin, J. A. Cooper, K. R. Evans, S. Graham, T. A. Grotjohn, E. R. Heller, M. Higashiwaki, M. S. Islam, P. W. Juodawlkis, M. A. Khan, A. D. Koehler, J. H. Leach, U. K. Mishra, R. J. Nemanich, R. C. N. Pilawa-Podgurski, J. B. Shealy, Z. Sitar, M. J. Tadjer, A. F. Witulski, M. Wraback, and J. A. Simmons

785 citations

Journal ArticleDOI
20 May 2005-Science
TL;DR: A deterministic approach to the implementation of solid-state cavity quantum electrodynamics systems based on a precise spatial and spectral overlap between a single self-assembled quantum dot and a photonic crystal membrane nanocavity is demonstrated.
Abstract: We demonstrate a deterministic approach to the implementation of solid-state cavity quantum electrodynamics (QED) systems based on a precise spatial and spectral overlap between a single self-assembled quantum dot and a photonic crystal membrane nanocavity. By fine-tuning nanocavity modes with a high quality factor into resonance with any given quantum dot exciton, we observed clear signatures of cavity QED (such as the Purcell effect) in all fabricated structures. This approach removes the major hindrances that had limited the application of solid-state cavity QED and enables the realization of experiments previously proposed in the context of quantum information processing.

686 citations

Journal ArticleDOI
TL;DR: In this paper, a GaN metal-oxide-semiconductor high-electron-mobility-transistor (MOS-HEMT) using atomic layer-deposited (ALD) Al2O3 as the gate dielectric is presented.
Abstract: We report on a GaN metal-oxide-semiconductor high-electron-mobility-transistor (MOS-HEMT) using atomic-layer-deposited (ALD) Al2O3 as the gate dielectric. Compared to a conventional GaN high-electron-mobility-transistor (HEMT) of similar design, the MOS-HEMT exhibits several orders of magnitude lower gate leakage and several times higher breakdown voltage and channel current. This implies that the ALD Al2O3∕AlGaN interface is of high quality and the ALD Al2O3∕AlGaN∕GaN MOS-HEMT is of high potential for high-power rf applications. In addition, the high-quality ALD Al2O3 gate dielectric allows the effective two-dimensional (2D) electron mobility at the AlGaN∕GaN heterojunction to be measured under a high transverse field. The resulting effective 2D electron mobility is much higher than that typical of Si, GaAs or InGaAs metal-oxide-semiconductor field-effect-transistors (MOSFETs).

451 citations