Proceedings of SPIE - The International Society for Optical Engineering

Introduction-Surface and Nanometrology General Surface Metrology Background to Surface Metrology Nanometrology Book Structure Characterization The Nature of Surfaces Surface Geometry Assessment and Parameters Characterization Waviness Errors of Form Characterization of Structured and Free Form Surfaces Characterization of Defects on the Surface Discussion Processing, Operations, and Simulations Digital Methods Discrete (Digital) Properties of Random Surfaces Digital Form of Statistical Analysis Parameters Digital Estimation of References for Surface Metrology Algorithms and Mathematical Techniques Basic Concepts in Linear Programming Fourier Transforms and the Fast Fourier Transform Transformations in Surface Metrology Space-Frequency Functions Surface Generation Atomistic Considerations and Simulations Summary Measurement Techniques Background Measurement Systems Stylus-Micro Measuring Instruments Stylus-Nano/Atomic Scale Optical Techniques Capacitance and Other Techniques Electron Microscopy, Photon Microscopy, Raman Spectrometry Comparison of Techniques-General Summary Some Design Considerations Standardization-Traceability-Uncertainty Introduction Nature of Errors Basic Error Theory Propagation of Errors Statistical Tests for Surface Metrology Uncertainty in Instruments-Calibration in General The Calibration of Stylus and Other Instruments Calibration of Form Instruments Variability of Surface Parameters Gps System-International and National Standards Specification for CAD and on Drawings Summary Surfaces and Manufacture Introduction Manufacturing Processes Cutting Abrasive Processes Unconventional Processes Forming Processes Effect of Scale of Size in Manufacture: Macro to Nano to Atomic Processes Structured Surface Manufacture Manufacture of Free-Form Surfaces Mathematical Processing of Manufacture-Finite Element Analysis (Fe), Md, Nurbs The Subsurface and the Interface Surface Integrity Surface Geometry-A Fingerprint of Manufacture Surface Finish Effects in Manufacture of Microchip Electronic Components Discussion and Conclusions Surface Geometry and Its Importance in Function Introduction Two-Body Interaction-The Static Situation Macro to Nanoscale, Contact, Adhesion Corrosion Two-Body Interactions-Dynamic Behavior Macro to Nanoscale, Friction, Wear, Lubrication One-Body Interactions- Optical Scatter, Diffraction System Function Multi-Surfaces Assembly Discussion Conclusions Surface Geometry, Scale of Size Effects, Nanometrology Introduction Effect of Scale of Size on Surface Geometry Scale of Size, Surface Geometry, and Function Scale of Size and Surfaces in Manufacture Nano Instrumentation Operation and Design Considerations Standards, Traceability, and Uncertainty at the Nanoscale Measurement of Typical Nanofeatures Measuring Length to Nanoscale with Interferometers and Other Devices Nano Geometry in Macro Situations Discussion and Conclusions General Comments Introduction Characterization Processing, Operations, and Simulations Measurement Techniques Traceability Standardization Uncertainty Surfaces and Manufacture Surface Geometry and Performance Nanometrology Overview Glossary Index References appear at the end of each chapter.

Handbook of Surface and Nanometrology

Engineering surfaces are comprised of a range of spatial wavelengths. Filtering techniques are commonly adopted to separate the different wavelength components into well-defined bandwidths. Filtering is done prior to numerical characterization and it is also essential for extracting information needed to provide process feedback and establish functional correlation. This paper reviews commonly used filters in surface metrology like the 2RC, Gaussian and several new ones currently under research such as the spline, morphological, wavelets, regression filters and robust regression filters. The need for these new filters and examples illustrating the features of these filters are also presented.

Recent advances in separation of roughness, waviness and form

Recent trends in surface metrology

Quantitative Characterisation of Surface Texture

The plateau honing operation is being widely used for finishing of cylinder liners for internal combustion engines Plateau honing has been shown to significantly reduce the costly running-in period due to the fact that very little further modification of the texture is required once the liner is put into operation In order to better understand, control, and ultimately “engineer” plateau honed surfaces, a comprehensive means of characterizing this texture is required In this paper the techniques currently used are briefly reviewed and an alternate approach is proposed The proposed approach is based on analyzing the cumulative distribution plot on a normal probability graph

Characterization of Surface Texture Generated by Plateau Honing Process

Internet-based surface metrology algorithm testing system

Analysis of surface profile generally involves filtering to separate short wavelengths from medium and long wavelengths. This is usually accomplished using digital filters. The wavelet filter is an ideal means to separate the profile into different bands. The space frequency localization and multiscale presentation of different wavelength components is useful in manufacturing process control and in establishing relationship between surface texture and function. The use of wavelet filter to analyze surface is explored in this paper. This paper deals with the evaluation of suitable wavelet basis for analyzing surface texture of machined surfaces using wavelet filter. The multiscale surface features are analyzed using wavelet filter to explore the potential use of wavelet filter in monitoring of manufacturing process and feature detection in engineering surfaces.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Analyzing engineering surface texture using wavelet filter

In the recent years there has been an increasing interest in designing surfaces to meet a particular functional requirement. Examples include surfaces generated using microreplication and micro-structure technology. The surface analysis techniques currently available only deals with the two-dimensional characterization of the three-dimensional surfaces. There is a growing need to develop an intelligent surface analysis and inspection system that deals with the dimensional aspect of the three-dimensional features. This paper describes the methodology for numerical characterization of surfaces that have repeated or non-repeated features at different scales using image processing techniques. This includes development of an intelligent surface-scanning algorithm and methods for three-dimensional surfaces to identify shape geometries and for stable extraction of significant surface features. Geometric fitting algorithms have been used to calculate the dimensions of the feature.

https://iopscience.iop.org/article/10.1088/1742-6596/13/1/002/pdf

Jay Raja

Papers

Characterization of Surface Texture Generated by Plateau Honing Process

Internet-based surface metrology algorithm testing system

Analyzing engineering surface texture using wavelet filter

Characterization of engineered surfaces

Inference engine for process diagnostics and functional correlation in surface metrology