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Jon Opsal

Researcher at Westinghouse Electric

Publications -  43
Citations -  2391

Jon Opsal is an academic researcher from Westinghouse Electric. The author has contributed to research in topics: Beam (structure) & Thin film. The author has an hindex of 21, co-authored 43 publications receiving 2374 citations.

Papers
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Journal ArticleDOI

Detection of thermal waves through optical reflectance

TL;DR: In this article, thermal wave detection and analysis can be performed, in a noncontact and highly sensitive manner, through the dependence of sample optical reflectance on temperature, which is demonstrated by an example of measuring the thickness of thin metal films.
Journal ArticleDOI

Thermal-wave detection and thin-film thickness measurements with laser beam deflection

TL;DR: A new technique has been developed that employs highly focused laser beams for both generating and detecting thermal waves in the megahertz frequency regime and includes a comprehensive 3-D depth-profiling theoretical model; it has been used to measure the thickness of both transparent and opaque thin films with high spatial resolution.
Patent

Thin film optical measurement system and method with calibrating ellipsometer

TL;DR: An optical measurement system for evaluating a reference sample that has at least a partially known composition is described in this paper, which includes a reference ellipsometer and at least one non-contact optical measurement device.
Patent

Apparatus for analyzing multi-layer thin film stacks on semiconductors

TL;DR: In this paper, a reference ellipsometer is used to calibrate the other optical measurement devices, which can be used to analyze multi-layer thin film stacks and to determine the total optical thickness of the stack.
Patent

Broadband spectroscopic rotating compensator ellipsometer

David E. Aspnes, +1 more
TL;DR: In this article, a rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardation of substantially 135° to 225°.