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Author

Joost Conrad Lötters

Other affiliations: University of Twente
Bio: Joost Conrad Lötters is an academic researcher from MESA+ Institute for Nanotechnology. The author has contributed to research in topics: Flow measurement & Mass flow sensor. The author has an hindex of 15, co-authored 134 publications receiving 2130 citations. Previous affiliations of Joost Conrad Lötters include University of Twente.


Papers
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Journal ArticleDOI
TL;DR: Polydimethylsiloxane (PDMS) is a commercially available physically and chemically stable silicone rubber as mentioned in this paper, which has a unique flexibility with a shear elastic modulus due to one of the lowest glass transition temperatures of any polymer.
Abstract: Polydimethylsiloxane (PDMS) is a commercially available physically and chemically stable silicone rubber. It has a unique flexibility with a shear elastic modulus due to one of the lowest glass transition temperatures of any polymer . Further properties of PDMS are a low change in the shear elastic modulus versus temperature , virtually no change in G versus frequency and a high compressibility. Because of its clean room processability, its low curing temperature, its high flexibility, the possibility to change its functional groups and the very low drift of its properties with time and temperature, PDMS is very well suited for micromachined mechanical and chemical sensors, such as accelerometers (as the spring material) and ISFETs (as the ion selective membrane). It can also be used as an adhesive in wafer bonding, as a cover material in tactile sensors and as the mechanical decoupling zone in sensor packagings.

868 citations

Journal ArticleDOI
TL;DR: Paired t-tests indicated that the accelerometer measurements were able to distinguish between the different test conditions as well as or better than simultaneous AMTI force platform measurements (P < or = 0.05).

252 citations

Journal ArticleDOI
TL;DR: In this paper, a calibration procedure for triaxial accelerometers is proposed, which uses the fact that the modulus of the acceleration vector measured with a triaxis accelerometer equals 1g under quasi-static conditions.
Abstract: In the medical field triaxial accelerometers are used for the monitoring of movements. Unfortunately, the long-term use of accelerometers is limited by drift of the sensitivities and the offsets. Therefore, a calibration procedure is designed which allows in-use calibration of a triaxial accelerometer. This procedure uses the fact that the modulus of the acceleration vector measured with a triaxial accelerometer equals 1g under quasi-static conditions. The calibration procedure requires no explicit knowledge of the actual orientation of the triaxial accelerometer with respect to gravity and requires only quasi-static random movements. The procedure can be performed within several minutes. Considering practical applications, it is found possible to obtain an average error smaller than 3% (of 1 [g]) with the calibration procedure for inputs caused by ‘standing straight and moving slightly’ when the offsets only are estimated. For the input caused by the sequence that occurs when going to bed, it is found possible to obtain errors smaller than 3% for estimating all parameters.

208 citations

Journal ArticleDOI
TL;DR: The CVC proposed is based on a symmetrical structure containing two half ac bridges, is intrinsically immune to parasitic capacitances and resistances, is capable of detecting capacitance changes from dc up to at least 10 kHz, is able to handle both single and differential capacitance, and can easily be realized with discrete components.
Abstract: There is a need for capacitance to voltage converters (CVC's) for differential capacitive sensors like pressure sensors and accelerometers which can measure both statically and dynamically. A suitable CVC is described in this paper. The CVC proposed is based on a symmetrical structure containing two half ac bridges, is intrinsically immune to parasitic capacitances and resistances, is capable of detecting capacitance changes from dc up to at least 10 kHz, is able to handle both single and differential capacitances, and can easily be realized with discrete components. Its sensitivity is very high: detectable capacitance changes of the order of 2 ppm of the nominal value (24 aF with respect to a nominal capacitance of 12 pF) result in a measured output voltage of 1.5 mV. However, due to drift the absolute accuracy and resolution of the CVC is limited to 3.5 ppm. A differential accelerometer for biomedical purposes was connected to the CVC and showed a sensitivity of 4 V/g. The measured rms output voltage noise in the frequency range of 2-50 Hz is 750 /spl mu/V, resulting in a signal to noise ratio of 75 dB at an acceleration of 1 g in the frequency range of 2-50 Hz.

126 citations

Journal ArticleDOI
TL;DR: In this paper, a micromachined Coriolis mass flow sensor was designed and realized using semi-circular channels just beneath the surface of a silicon wafer, which have thin silicon nitride walls to minimize the channel mass with respect to the mass of moving fluid.
Abstract: This paper discusses the modeling, design and realization of micromachined Coriolis mass flow sensors. A lumped element model is used to analyze and predict the sensor performance. The model is used to design a sensor for a flow range of 0–1.2 g h−1 with a maximum pressure drop of 1 bar. The sensor was realized using semi-circular channels just beneath the surface of a silicon wafer. The channels have thin silicon nitride walls to minimize the channel mass with respect to the mass of the moving fluid. Special comb-shaped electrodes are integrated on the channels for capacitive readout of the extremely small Coriolis displacements. The comb-shaped electrode design eliminates the need for multiple metal layers and sacrificial layer etching methods. Furthermore, it prevents squeezed film damping due to a thin layer of air between the capacitor electrodes. As a result, the sensor operates at atmospheric pressure with a quality factor in the order of 40 and does not require vacuum packaging like other micro Coriolis flow sensors. Measurement results using water, ethanol, white gas and argon are presented, showing that the sensor measures true mass flow. The measurement error is currently in the order of 1% of the full scale of 1.2 g h−1.

79 citations


Cited by
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Journal ArticleDOI
07 Apr 2000-Science
TL;DR: An extension to the soft lithography paradigm, multilayersoft lithography, with which devices consisting of multiple layers may be fabricated from soft materials is described, to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer.
Abstract: Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer soft lithography, with which devices consisting of multiple layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer. The softness of these materials allows the device areas to be reduced by more than two orders of magnitude compared with silicon-based devices. The other advantages of soft lithography, such as rapid prototyping, ease of fabrication, and biocompatibility, are retained.

4,218 citations

PatentDOI
24 Sep 2003-Science
TL;DR: The fluidic multiplexor as discussed by the authors is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs.
Abstract: High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

2,292 citations

Journal ArticleDOI
TL;DR: In this article, the authors report an investigation of the variation in the mechanical properties of bulk polydimethylsiloxane (PDMS) elastomers with curing temperature, over the range 25 ◦ C to 200 ¼ C, over a range up to 40% strain and hardness of 44−54 ShA.
Abstract: Polydimethylsiloxane (PDMS) elastomers are extensively used for soft lithographic replication of microstructures in microfluidic and micro-engineering applications. Elastomeric microstructures are commonly required to fulfil an explicit mechanical role and accordingly their mechanical properties can critically affect device performance. The mechanical properties of elastomers are known to vary with both curing and operational temperatures. However, even for the elastomer most commonly employed in microfluidic applications, Sylgard 184, only a very limited range of data exists regarding the variation in mechanical properties of bulk PDMS with curing temperature. We report an investigation of the variation in the mechanical properties of bulk Sylgard 184 with curing temperature, over the range 25 ◦ C to 200 ◦ C. PDMS samples for tensile and compressive testing were fabricated according to ASTM standards. Data obtained indicates variation in mechanical properties due to curing temperature for Young’s modulus of 1.32‐2.97 MPa, ultimate tensile strength of 3.51‐7.65 MPa, compressive modulus of 117.8‐186.9 MPa and ultimate compressive strength of 28.4‐51.7 GPa in a range up to 40% strain and hardness of 44‐54 ShA.

1,218 citations

Journal ArticleDOI
TL;DR: PDMS surface hydrophilicity and micro-textures were generally unaffected when exposed to the different chemicals, except for micro-texture changes after immersion in potassium hydroxide and buffered hydrofluoric, nitric, sulfuric, and hydrofluic acids.
Abstract: Polydimethylsiloxane (PDMS Sylgard® 184, Dow Corning Corporation) pre-polymer was combined with increasing amounts of cross-linker (5.7, 10.0, 14.3, 21.4, and 42.9 wt.%) and designated PDMS1, PDMS2, PDMS3, PDMS4, and PDMS5, respectively. These materials were processed by spin coating and subjected to common microfabrication, micromachining, and biomedical processes: chemical immersion, oxygen plasma treatment, sterilization, and exposure to tissue culture media. The PDMS formulations were analyzed by gravimetry, goniometry, tensile testing, nanoindentation, scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR), and X-ray photoelectron spectroscopy (XPS). Spin coating of PDMS was formulation dependent with film thickness ranging from 308 μm on PDMS1 to 171 μm on PDMS5 at 200 revolutions per minute (rpm). Ultimate tensile stress (UTS) increased from 3.9 MPa (PDMS1) to 10.8 MPa (PDMS3), and then decreased down to 4.0 MPa (PDMS5). Autoclave sterilization (AS) increased the storage modulus (σ) and UTS in all formulations, with the highest increase in UTS exhibited by PDMS5 (218%). PDMS surface hydrophilicity and micro-textures were generally unaffected when exposed to the different chemicals, except for micro-texture changes after immersion in potassium hydroxide and buffered hydrofluoric, nitric, sulfuric, and hydrofluoric acids; and minimal changes in contact angle after immersion in hexane, hydrochloric acid, photoresist developer, and toluene. Oxygen plasma treatment decreased the contact angle of PDMS2 from 109∘ to 60∘. Exposure to tissue culture media resulted in increased PDMS surface element concentrations of nitrogen and oxygen.

1,127 citations

Journal ArticleDOI
20 Aug 2010-Sensors
TL;DR: This paper reviews and compares existing commercial products to provide a comprehensive outlook of current development status and possible emerging technologies of wearable accelerometry-based motion detectors.
Abstract: Characteristics of physical activity are indicative of one's mobility level, latent chronic diseases and aging process. Accelerometers have been widely accepted as useful and practical sensors for wearable devices to measure and assess physical activity. This paper reviews the development of wearable accelerometry-based motion detectors. The principle of accelerometry measurement, sensor properties and sensor placements are first introduced. Various research using accelerometry-based wearable motion detectors for physical activity monitoring and assessment, including posture and movement classification, estimation of energy expenditure, fall detection and balance control evaluation, are also reviewed. Finally this paper reviews and compares existing commercial products to provide a comprehensive outlook of current development status and possible emerging technologies.

937 citations