K
Kathryn W. Guarini
Researcher at IBM
Publications - 79
Citations - 7784
Kathryn W. Guarini is an academic researcher from IBM. The author has contributed to research in topics: Silicon on insulator & Silicon. The author has an hindex of 37, co-authored 79 publications receiving 7648 citations. Previous affiliations of Kathryn W. Guarini include GlobalFoundries.
Papers
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Journal ArticleDOI
Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates
Thomas Thurn-Albrecht,Joerg Schotter,G. A. Kästle,N. Emley,Takasada Shibauchi,Takasada Shibauchi,Lia Krusin-Elbaum,Kathryn W. Guarini,Charles T. Black,Mark T. Tuominen,Thomas P. Russell +10 more
TL;DR: A simple, robust, chemical route to the fabrication of ultrahigh-density arrays of nanopores with high aspect ratios using the equilibrium self-assembled morphology of asymmetric diblock copolymers is shown.
Proceedings ArticleDOI
Stable SRAM cell design for the 32 nm node and beyond
Leland Chang,David M. Fried,John M. Hergenrother,Jeffrey W. Sleight,R.H. Dennard,Robert K. Montoye,Lidija Sekaric,Sharee J. McNab,Anna W. Topol,C.D. Adams,Kathryn W. Guarini,Wilfried Haensch +11 more
TL;DR: This work demonstrates the smallest 6T and full 8T-SRAM cells to date and provides a much greater enhancement in stability by eliminating cell disturbs during a read access, thus facilitating continued technology scaling.
Journal ArticleDOI
Polymer self assembly in semiconductor microelectronics
Charles T. Black,Ricardo Ruiz,Gregory Breyta,Joy Cheng,Matthew E. Colburn,Kathryn W. Guarini,Hyungjun Kim,Y. Zhang +7 more
TL;DR: Target applications including surface-roughening for on-chip decoupling capacitors, patterning nanocrystal floating gates for FLASH devices, and defining FET channel arrays are discussed.
Journal ArticleDOI
Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
Charles T. Black,Kathryn W. Guarini,Keith Raymond Milkove,Shenda M. Baker,Thomas P. Russell,Mark T. Tuominen +5 more
TL;DR: In this article, a self-organizing diblock copolymer system with semiconductor processing is combined to produce silicon capacitors with increased charge storage capacity over planar structures.
Proceedings ArticleDOI
High performance CMOS fabricated on hybrid substrate with different crystal orientations
Min Yang,Meikei Ieong,Leathen Shi,K.K. Chan,Victor Chan,Anthony I. Chou,Evgeni Gusev,Keith A. Jenkins,Diane C. Boyd,Y. Ninomiya,D. Pendleton,Y. Surpris,D. Heenan,John A. Ott,Kathryn W. Guarini,Christopher P. D'Emic,Michael A. Cobb,Patricia M. Mooney,B. To,Nivo Rovedo,J. Benedict,R. Mo,H. Ng +22 more
TL;DR: In this paper, a novel structure and technology has been developed for high performance CMOS using hybrid silicon substrates with different crystal orientations (namely pFET on [110]-oriented surface and nFETs on (100) surface) through wafer bonding and selective epitaxy devices with physical gate oxide thickness of 12 nm.