K
Kenneth Levy
Publications - 2
Citations - 316
Kenneth Levy is an academic researcher. The author has contributed to research in topics: Signal & Probe card. The author has an hindex of 2, co-authored 2 publications receiving 316 citations.
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Patent
Automatic photomask inspection system and apparatus
Kenneth Levy,Paul Sandland +1 more
TL;DR: Optical inspection apparatus for detecting differences between two dies in a photomask and including a carriage for supporting the objects to be inspected and for simultaneously moving such objects along an inspection path, an illuminator for illuminating corresponding portions of the objects as they are moved along the inspection path as discussed by the authors.
Patent
Electronic control of an automatic wafer inspection system
TL;DR: A system for automatic micro and macro inspection of patterned wafers, including a X-Y stage for supporting and positioning a wafer at a macro inspection station and a micro inspection station, is described in this article.