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Kinyip Phoa

Bio: Kinyip Phoa is an academic researcher from Intel. The author has contributed to research in topics: Transistor & Gate dielectric. The author has an hindex of 3, co-authored 9 publications receiving 287 citations.

Papers
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Proceedings ArticleDOI
01 Dec 2012
TL;DR: In this paper, a leading edge 22nm 3-D tri-gate transistor technology has been optimized for low power SoC products for the first time, and a low standby power 380Mb SRAM capable of operating at 2.6GHz with 10pA/cell standby leakages.
Abstract: A leading edge 22nm 3-D tri-gate transistor technology has been optimized for low power SoC products for the first time. Low standby power and high voltage transistors exploiting the superior short channel control, < 65mV/dec subthreshold slope and <40mV DIBL, of the Tri-Gate architecture have been fabricated concurrently with high speed logic transistors in a single SoC chip to achieve industry leading drive currents at record low leakage levels. NMOS/PMOS Idsat=0.41/0.37mA/um at 30pA/um Ioff, 0.75V, were used to build a low standby power 380Mb SRAM capable of operating at 2.6GHz with 10pA/cell standby leakages. This technology offers mix-and-match flexibility of transistor types, high-density interconnect stacks, and RF/mixed-signal features for leadership in mobile, handheld, wireless and embedded SoC products.

284 citations

Patent
20 Jun 2014
TL;DR: In this paper, a gate stack may be disposed over a high voltage channel region separating a pair of fins with each of the fins serving as part of a source/drain for the high voltage device.
Abstract: High voltage transistors spanning multiple non-planar semiconductor bodies, such as fins or nanowires, are monolithically integrated with non-planar transistors utilizing an individual non-planar semiconductor body. The non-planar FETs may be utilized for low voltage CMOS logic circuitry within an IC, while high voltage transistors may be utilized for high voltage circuitry within the IC. A gate stack may be disposed over a high voltage channel region separating a pair of fins with each of the fins serving as part of a source/drain for the high voltage device. The high voltage channel region may be a planar length of substrate recessed relative to the fins. A high voltage gate stack may use an isolation dielectric that surrounds the fins as a thick gate dielectric. A high voltage transistor may include a pair of doped wells formed into the substrate that are separated by the high voltage gate stack with one or more fin encompassed within each well.

11 citations

Patent
22 Jun 2015
TL;DR: In this article, through-body-vias (TBV) have been used to provide on-chip capacitance using throughbody materials, such as the dielectric body of a TBV capacitor.
Abstract: Techniques are disclosed for providing on-chip capacitance using through-body-vias (TBVs). In accordance with some embodiments, a TBV may be formed within a semiconductor layer, and a dielectric layer may be formed between the TBV and the surrounding semiconductor layer. The TBV may serve as one electrode (e.g., anode) of a TBV capacitor, and the dielectric layer may serve as the dielectric body of that TBV capacitor. In some embodiments, the semiconductor layer serves as the other electrode (e.g., cathode) of the TBV capacitor. To that end, in some embodiments, the entire semiconductor layer may comprise a low-resistivity material, whereas in some other embodiments, low-resistivity region(s) may be provided just along the sidewalls local to the TBV, for example, by selective doping in those location(s). In other embodiments, a conductive layer formed between the dielectric layer and the semiconductor layer serves as the other electrode (e.g., cathode) of the TBV capacitor.

4 citations

Patent
Kinyip Phoa1, Nidhi Nidhi1, Chia-Hong Jan1, Mac M. Hafez1, Vincent Chen1 
27 Jun 2014
TL;DR: In this paper, the authors describe an apparatus consisting of a first photovoltaic cell, a first through silicon via (TSV) and a second TSV, where the first and second contacts each include conductive material that is substantially transparent.
Abstract: An embodiment includes an apparatus comprising: a first photovoltaic cell; a first through silicon via (TSV) included in the first photovoltaic cell and passing through at least a portion of a doped silicon substrate, the first TSV comprising (a)(i) a first sidewall, which is doped oppositely to the doped silicon substrate, and (a)(ii) a first contact substantially filling the first TSV; and a second TSV included in the first photovoltaic cell and passing through at least another portion of the doped silicon substrate, the second TSV comprising (b)(i) a second sidewall, which comprises the doped silicon substrate, and (b)(ii) a second contact substantially filling the second TSV; wherein the first and second contacts each include a conductive material that is substantially transparent. Other embodiments are described herein.

3 citations

Patent
11 Dec 2015
TL;DR: In this paper, metal-oxide-polysilicon tunable resistors and methods of fabricating metaloxide polysilicon (MOPS) tunable resistor are described, where a gate oxide layer is disposed on the poly-silicon resistor structure.
Abstract: Metal-oxide-polysilicon tunable resistors and methods of fabricating metal-oxide-polysilicon tunable resistors are described. In an example, a tunable resistor includes a polysilicon resistor structure disposed above a substrate. A gate oxide layer is disposed on the polysilicon resistor structure. A metal gate layer is disposed on the gate oxide layer.

1 citations


Cited by
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Journal ArticleDOI
TL;DR: A review of electronic devices based on two-dimensional materials, outlining their potential as a technological option beyond scaled complementary metal-oxide-semiconductor switches and the performance limits and advantages, when exploited for both digital and analog applications.
Abstract: The compelling demand for higher performance and lower power consumption in electronic systems is the main driving force of the electronics industry's quest for devices and/or architectures based on new materials. Here, we provide a review of electronic devices based on two-dimensional materials, outlining their potential as a technological option beyond scaled complementary metal-oxide-semiconductor switches. We focus on the performance limits and advantages of these materials and associated technologies, when exploited for both digital and analog applications, focusing on the main figures of merit needed to meet industry requirements. We also discuss the use of two-dimensional materials as an enabling factor for flexible electronics and provide our perspectives on future developments.

2,531 citations

Journal ArticleDOI
TL;DR: In this article, a mathematical framework to evaluate the performance of FETs and describe the challenges for improving the performances of short-channel FET in relation to the properties of 2D materials, including graphene, transition metal dichalcogenides, phosphorene and silicene.
Abstract: In the quest for higher performance, the dimensions of field-effect transistors (FETs) continue to decrease. However, the reduction in size of FETs comprising 3D semiconductors is limited by the rate at which heat, generated from static power, is dissipated. The increase in static power and the leakage of current between the source and drain electrodes that causes this increase, are referred to as short-channel effects. In FETs with channels made from 2D semiconductors, leakage current is almost eliminated because all electrons are confined in atomically thin channels and, hence, are uniformly influenced by the gate voltage. In this Review, we provide a mathematical framework to evaluate the performance of FETs and describe the challenges for improving the performances of short-channel FETs in relation to the properties of 2D materials, including graphene, transition metal dichalcogenides, phosphorene and silicene. We also describe tunnelling FETs that possess extremely low-power switching behaviour and explain how they can be realized using heterostructures of 2D semiconductors. Field-effect transistors (FETs) with semiconducting channels made from 2D materials are known to have fewer problems with short-channel effects than devices comprising 3D semiconductors. In this Review, a mathematical framework to evaluate the performance of FETs is outlined with a focus on the properties of 2D materials, such as graphene, transition metal dichalcogenides, phosphorene and silicene.

983 citations

Proceedings ArticleDOI
06 Mar 2014
TL;DR: An in-situ PUF hardening by leveraging directed NBTI aging to improve stability during field operation, and ultra-low energy consumption is presented.
Abstract: Physically unclonable function (PUF) circuits are low-cost cryptographic primitives used for generation of unique, stable and secure keys or chip IDs for device authentication and data security in high-performance microprocessors [1][2][3][7]. The volatile nature of PUFs provides a high level of security and tamper resistance against invasive probing attacks compared to conventional fuse-based key storage technologies [4]. A process-voltage-temperature (PVT) variation-tolerant all-digital PUF array targeted for on-die generation of 100% stable, device-specific, high-entropy keys is fabricated in 22nm tri-gate high-κ metal-gate CMOS technology [5], featuring: i) a hybrid delay/cross-coupled PUF circuit where interaction of 16 minimum-sized, variation-impacted transistors determines resolution dynamics, ii) a temporal majority voting (TMV) circuit to stabilize occasionally unstable bits, resulting in 53% reduction in instability, iii) burn-in hardening to reinforce manufacturing-time PUF bias, resulting in 22% reduction in bit-errors, iv) soft dark bits for run-time identification and sequestration of highly unstable bits during field operation, resulting in 78% lower bit-errors, v) 19× separation between inter- and intra-PUF Hamming distance, enabling die-specific keys, vi) autocorrelation factor≈0 and entropy=0.9997, while passing NIST randomness tests, vii) high tolerance to voltage and temperature variation with 82% reduction in average Hamming-distance using a 100-cycle dark bit window, viii) in-situ PUF hardening by leveraging directed NBTI aging to improve stability during field operation, and ix) ultra-low energy consumption of 0.19pJ/b with compact bitcell layout of 4.66μm2 (Fig. 16.2.7a).

214 citations

Journal ArticleDOI
TL;DR: The implementation details and silicon results of a 3 GHz dual-core ARM Cortex TM -A9 (A9) manufactured in the 28 nm planar Ultra-Thin Box and Body Fully-Depleted CMOS (UTBB FD-SOI) technology are presented.
Abstract: This paper presents the implementation details and silicon results of a 3 GHz dual-core ARM Cortex TM -A9 (A9) manufactured in the 28 nm planar Ultra-Thin Box and Body Fully-Depleted CMOS (UTBB FD-SOI) technology. The implementation is based on a fully synthesizable standard design flow. The design exploits the important flexibility provided by the FD-SOI technology, notably a wide Dynamic Voltage and Frequency Scaling (DVFS) range, from 0.52 V to 1.37 V, and Forward Body Bias (FBB) techniques up to 1.3 V. Detailed explanations of the body-biasing techniques specific to this technology are largely presented, in the context of a multi- VT co-integration, which enable this energy efficient silicon implementation. The system integrates all the advanced IPs for energy efficiency as well as the body bias generator and a fast (μs range) dynamic body bias management capability. The measured dual core CPU maximum operation frequency is 3 GHz (for 1.37 V) and it can be operated down to 300 MHz (for 0.52 V) in full continuous DVFS. The obtained relative performance, with respect to an equivalent planar 28 nm bulk CMOS chip, shows an improvement of +237% at 0.6 V, or +544% at 0.61 V with 1.3 V FBB.

138 citations

Journal ArticleDOI
TL;DR: The current status of High K dielectrics in Very Large Scale Integrated circuit (VLSI) manufacturing for leading edge Dynamic Random Access Memory (DRAM) and Complementary Metal Oxide Semiconductor (CMOS) applications is summarized along with the deposition methods and general equipment types employed.
Abstract: The current status of High K dielectrics in Very Large Scale Integrated circuit (VLSI) manufacturing for leading edge Dynamic Random Access Memory (DRAM) and Complementary Metal Oxide Semiconductor (CMOS) applications is summarized along with the deposition methods and general equipment types employed. Emerging applications for High K dielectrics in future CMOS are described as well for implementations in 10 nm and beyond nodes. Additional emerging applications for High K dielectrics include Resistive RAM memories, Metal-Insulator-Metal (MIM) diodes, Ferroelectric logic and memory devices, and as mask layers for patterning. Atomic Layer Deposition (ALD) is a common and proven deposition method for all of the applications discussed for use in future VLSI manufacturing.

121 citations