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L. Manin-Ferlazzo

Bio: L. Manin-Ferlazzo is an academic researcher from Centre national de la recherche scientifique. The author has contributed to research in topics: Reactive-ion etching & Electron-beam lithography. The author has an hindex of 4, co-authored 8 publications receiving 1011 citations.

Papers
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Journal ArticleDOI
TL;DR: In this article, the authors report on the resolution limits of EBL in the conventional polymethylmethacrylate (PMMA) organic resist and show that resolution can be pushed below 10 nm for isolated features and dense arrays of periodic structures can be fabricated at a pitch of 30 nm, leading to a density close to 700 Gbit/in2.

1,017 citations

Journal ArticleDOI
TL;DR: In this article, an optical investigation of GaN pillars using both micro-Raman and microphotoluminescence (μ-PL) spectroscopy is presented. But the authors do not consider the effect of the size of the pillars on their properties.
Abstract: We present an optical investigation of GaN pillars using both micro-Raman (μ-Raman) and microphotoluminescence (μ-PL) spectroscopy. GaN pillars of diameter ranging from 100 nm to 5 μm were fabricated by electron beam lithography and reactive ion etching (RIE) with SiCl4 plasma. Optical measurements of both μ-Raman and μ-PL on individual pillars show consistent variations in the properties of the fabricated GaN structures as a function of GaN pillar size. μ-PL mapping gives strong evidence for defect-induced donors and/or acceptors near the facets of the RIE etched pillars. RIE for the nanostructuration of GaN could be used in the future to allow spectroscopic studies of a few or single quantum objects such as GaN quantum dots.

30 citations

Journal ArticleDOI
TL;DR: In this article, an optimized process using very high resolution Electron Beam Lithography for the fabrication of high density nanostructures gratings, which can be used as molds for nanoimprint lithography, is presented.

24 citations

Journal ArticleDOI
TL;DR: In this article, a detailed study of GaN pillar arrays by atomic force microscopy (AFM), Raman spectroscopy, and photoluminescence (PL) was presented.
Abstract: We present a detailed study of GaN pillar arrays by atomic force microscopy (AFM), Raman spectroscopy, and photoluminescence (PL) spectroscopy. AFM is used to characterize the shape of the GaN pillars and revealed a large roughness of etched pillar surfaces. Raman scattering spectra of the pillars are well described by angular dispersion of polar optical phonons induced by the three-dimensional shape of the pillar. Additional Raman scattering has been tentatively assigned to the activation of the high frequency B1 silent mode by defects introduced during the ion etching. This result is well correlated with the appearance of donor and acceptor-related PL of the GaN pillars. N vacancy or/and Ga interstitials would be likely candidates for donors in the nonstoichiometric GaN near the surface of the etched pillars.

18 citations

22 Jul 2002
TL;DR: In this article, the equifrequency surfaces of the radiative Bloch modes for a photonic crystal etched in a GaN/sapphire film were measured using a scattering matrix method.
Abstract: Photonic crystals are a new class of materials where photonic band gaps, large dispersion and anisotropy occur. By exploiting these properties GaN photonic crystals should have important potential for optoelectronic applications, principally in the areas of high-efficiency light emitters and second-harmonic generators. We present measurements of the equifrequency surfaces of the radiative Bloch modes for a photonic crystal etched in a GaN/sapphire film. The photonic band structure is calculated by using a scattering matrix method that reproduces well the anisotropy of the equifrequency surfaces exhibited by the photonic crystal. (C) 2002 Elsevier Science B.V. All rights reserved.

3 citations


Cited by
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Journal ArticleDOI
TL;DR: The use of nanoscale disorder is demonstrated to stimulate human mesenchymal stem cells (MSCs) to produce bone mineral in vitro, in the absence of osteogenic supplements, which has implications for cell therapies.
Abstract: A key tenet of bone tissue engineering is the development of scaffold materials that can stimulate stem cell differentiation in the absence of chemical treatment to become osteoblasts without compromising material properties. At present, conventional implant materials fail owing to encapsulation by soft tissue, rather than direct bone bonding. Here, we demonstrate the use of nanoscale disorder to stimulate human mesenchymal stem cells (MSCs) to produce bone mineral in vitro, in the absence of osteogenic supplements. This approach has similar efficiency to that of cells cultured with osteogenic media. In addition, the current studies show that topographically treated MSCs have a distinct differentiation profile compared with those treated with osteogenic media, which has implications for cell therapies.

2,249 citations

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TL;DR: A comprehensive overview of the progress that has been made within the context of 1D ZnO nanostructures synthesized via wet chemical methods can be found in this paper, where the synthetic methodologies and corresponding growth mechanisms, different structures, doping and alloying, position-controlled growth on substrates, and finally, their functional properties as catalysts, hydrophobic surfaces, sensors, and in nanoelectronic, optical, optoelectronics, and energy harvesting devices.
Abstract: One-dimensional (1D) ZnO nanostructures have been studied intensively and extensively over the last decade not only for their remarkable chemical and physical properties, but also for their current and future diverse technological applications. This article gives a comprehensive overview of the progress that has been made within the context of 1D ZnO nanostructures synthesized via wet chemical methods. We will cover the synthetic methodologies and corresponding growth mechanisms, different structures, doping and alloying, position-controlled growth on substrates, and finally, their functional properties as catalysts, hydrophobic surfaces, sensors, and in nanoelectronic, optical, optoelectronic, and energy harvesting devices.

1,247 citations

Journal ArticleDOI
25 Jan 2007-Nature
TL;DR: A 160,000-bit molecular electronic memory circuit, fabricated at a density of 1011 bits cm-2 (pitch 33 nm; memory cell size 0.0011 μm2), that is, roughly analogous to the dimensions of a DRAM circuit projected to be available by 2020.
Abstract: The primary metric for gauging progress in the various semiconductor integrated circuit technologies is the spacing, or pitch, between the most closely spaced wires within a dynamic random access memory (DRAM) circuit. Modern DRAM circuits have 140 nm pitch wires and a memory cell size of 0.0408 mum(2). Improving integrated circuit technology will require that these dimensions decrease over time. However, at present a large fraction of the patterning and materials requirements that we expect to need for the construction of new integrated circuit technologies in 2013 have 'no known solution'. Promising ingredients for advances in integrated circuit technology are nanowires, molecular electronics and defect-tolerant architectures, as demonstrated by reports of single devices and small circuits. Methods of extending these approaches to large-scale, high-density circuitry are largely undeveloped. Here we describe a 160,000-bit molecular electronic memory circuit, fabricated at a density of 10(11) bits cm(-2) (pitch 33 nm; memory cell size 0.0011 microm2), that is, roughly analogous to the dimensions of a DRAM circuit projected to be available by 2020. A monolayer of bistable, [2]rotaxane molecules served as the data storage elements. Although the circuit has large numbers of defects, those defects could be readily identified through electronic testing and isolated using software coding. The working bits were then configured to form a fully functional random access memory circuit for storing and retrieving information.

1,116 citations

Journal ArticleDOI
04 Apr 2003-Science
TL;DR: A general method for producing ultrahigh-density arrays of aligned metal and semiconductor nanowires and nanowire circuits based on translating thin film growth thickness control into planar wire arrays is described.
Abstract: We describe a general method for producing ultrahigh-density arrays of aligned metal and semiconductor nanowires and nanowire circuits. The technique is based on translating thin film growth thickness control into planar wire arrays. Nanowires were fabricated with diameters and pitches (center-to-center distances) as small as 8 nanometers and 16 nanometers, respectively. The nanowires have high aspect ratios (up to 106), and the process can be carried out multiple times to produce simple circuits of crossed nanowires with a nanowire junction density in excess of 1011 per square centimeter. The nanowires can also be used in nanomechanical devices; a high-frequency nanomechanical resonator is demonstrated.

950 citations

Journal ArticleDOI
TL;DR: How cell adhesions interact with nanotopography is discussed, and insight is provided as to how materials scientists can exploit these interactions to direct stem cell fate and to understand how the behaviour of stem cells in their niche can be controlled.
Abstract: Stem cells respond to nanoscale surface features, with changes in cell growth and differentiation mediated by alterations in cell adhesion. The interaction of nanotopographical features with integrin receptors in the cells' focal adhesions alters how the cells adhere to materials surfaces, and defines cell fate through changes in both cell biochemistry and cell morphology. In this Review, we discuss how cell adhesions interact with nanotopography, and we provide insight as to how materials scientists can exploit these interactions to direct stem cell fate and to understand how the behaviour of stem cells in their niche can be controlled. We expect knowledge gained from the study of cell-nanotopography interactions to accelerate the development of next-generation stem cell culture materials and implant interfaces, and to fuel discovery of stem cell therapeutics to support regenerative therapies.

879 citations