The application of metal-organic frameworks (MOFs) as a sensing layer has been attracting great interest over the last decade, due to their uniform properties in terms of high porosity and tunability, which provides a large surface area and/or centers for trapping/binding a targeted analyte. Here we report the fabrication of a highly sensitive humidity sensor that is based on composite thin films of HKUST-1 MOF and carbon nanotubes (CNT). The composite sensing films were fabricated by spin coating technique on a quartz-crystal microbalance (QCM) and a comparison of their shift in resonance frequencies to adsorbed water vapor (5–75% relative humidity) is presented. Through optimization of the CNT and HKUST-1 composition, we could demonstrate a 230% increase in sensitivity compared to plain HKUST-1 film. The optimized CNT-HKUST-1 composite thin films are stable, reliable, and have an average sensitivity of about 2.5 × 10−5 (Δf/f) per percent of relative humidity, which is up to ten times better than previously reported QCM-based humidity sensors. The approach presented here is facile and paves a promising path towards enhancing the sensitivity of MOF-based sensors.

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The quest for highly sensitive QCM humidity sensors: the coating of CNT/MOF composite sensing films as case study

The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electromechanical systems. The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener’s well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.

Thermoelastic Damping in Micro- and Nano-Mechanical Systems.

Gas safety has penetrated into every corner of life. As such, detection and control of hazardous gases or humidity will always be indispensable. Quartz crystal microbalance (QCM) platform modified by various sensing materials is a novel and high performance sensing device. As functional materials, metal-organic frameworks (MOFs) with unique physical and chemical properties show promise in gas sensing. In this review, we overviewed the application of MOFs and MOF-based materials in gas monitoring based on QCM. A variety of harmful gases (including formaldehyde, toluene, acetone, etc.) and humidity are mentioned. Future perspectives and challenges faced by MOFs in gas sensing will also be discussed. This review tries to summarize the development of MOF science and application in the research field of QCM-based gas sensor, and provide guidance to scientists who have just come into contact with this field.

Metal-organic frameworks for QCM-based gas sensors: A review

Micro and nanoelectromechanical systems M/NEMS have been extensively investigated and exploited in the past few decades for various applications and for probing fundamental physical phenomena. Understanding the linear and nonlinear dynamical behaviors of the movable structures in these systems is crucial for their successful implementation in various novel technologies and to meet the long list of new sophisticated requirements. This paper presents a review for some of the recent topics pertaining to the dynamical behaviors, linear and nonlinear, of M/NEMS resonating structures. First, an overview is presented of the various used dynamical approaches to enhance the sensitivity of resonators for sensing applications. Then a summary is presented of the recent works on the linear and nonlinear mode coupling in M/NEMS resonator. Next, recent research is reviewed on coupled M/NEMS resonators, mechanically and electrically, leading to collective behaviors like mode localization. The final part of the paper discusses analytical approaches that have been developed to better understand and investigate the dynamical behavior of M/NEMS resonators focusing on the perturbation method the multiple time scales.

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Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Advances of metal–organic frameworks for gas sensing

In modern computing, the Boolean logic operations are set by interconnect schemes between the transistors. As the miniaturization in the component level to enhance the computational power is rapidly approaching physical limits, alternative computing methods are vigorously pursued. One of the desired aspects in the future computing approaches is the provision for hardware reconfigurability at run time to allow enhanced functionality. Here we demonstrate a reprogrammable logic device based on the electrothermal frequency modulation scheme of a single microelectromechanical resonator, capable of performing all the fundamental 2-bit logic functions as well as n-bit logic operations. Logic functions are performed by actively tuning the linear resonance frequency of the resonator operated at room temperature and under modest vacuum conditions, reprogrammable by the a.c.-driving frequency. The device is fabricated using complementary metal oxide semiconductor compatible mass fabrication process, suitable for on-chip integration, and promises an alternative electromechanical computing scheme.

/pdf/microelectromechanical-reprogrammable-logic-device-2vkvbqadwk.pdf

Microelectromechanical reprogrammable logic device.

We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped-clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening behavior that creates hysteresis and co-existing states of motion. Since it is independent of the electrostatic force, this nonlinearity gives more flexibility in the operating conditions and allows for lower actuation voltages. Experimental results are generated through electrical characterization setup. Results are shown demonstrating the switching between the two vibrational states with the change of the direct current (DC) bias voltage, thereby proving the memory concept.

https://www.mdpi.com/2072-666X/7/10/191/pdf

In-Plane MEMS Shallow Arch Beam for Mechanical Memory

Quartz crystal microbalance (QCM) coated with poly-4-vinylpyridine (PVP) and metal organic framework HKUST-1 are investigated and compared for humidity sensing. Drop casting method is employed to coat the PVP and HKUST-1 solutions onto the surface of a quartz crystal microbalance. The resonance frequencies of these sensors with varying relative humidity (RH) from 22% RH to 69% RH are measured using impedance analysis method. The sensitivity, humidity hysteresis, response, and recovery times of these sensors are studied. The sensitivities of uncoated, PVP, and HKUST-1 coated QCM sensors are 7 Hz, 48 Hz, and 720 Hz, respectively, in the range of 22% RH–69% RH. The extraction of desorption rate and adsorption energy associated with the adsorption and desorption of water molecules on these surfaces reveals that HKUST-1 has better sensing properties than PVP and uncoated QCM sensors. In this work, the HKUST-1 coated QCM is shown to be a promising material for moisture detection.

/pdf/humidity-detection-using-metal-organic-framework-coated-on-3owmuks2po.pdf

Humidity Detection Using Metal Organic Framework Coated on QCM

In this paper, we experimentally demonstrate a mechanical memory device based on the nonlinear dynamics of an electrostatically actuated microelectromechanical resonator utilizing an electrothermal frequency modulation scheme. The microstructure is deliberately fabricated as an in-plane shallow arch to achieve geometric quadratic nonlinearity. We exploit this inherent nonlinearity of the arch and drive it at resonance with minimal actuation voltage into the nonlinear regime, thereby creating softening behavior, hysteresis, and coexistence of states. The hysteretic frequency band is controlled by the electrothermal actuation voltage. Binary values are assigned to the two allowed dynamical states on the hysteretic response curve of the arch resonator with respect to the electrothermal actuation voltage. Set-and-reset operations of the memory states are performed by applying controlled dc pulses provided through the electrothermal actuation scheme, while the read-out operation is performed simultaneously by measuring the motional current through a capacitive detection technique. This novel memory device has the advantages of operating at low voltages and under room temperature. [2016-0043]

Electrothermal Frequency Modulated Resonator for Mechanical Memory

Electromechanical computing based on micro/nano resonators has recently attracted significant attention. However, full implementation of this technology has been hindered by the difficulty in realizing complex logic circuits. We report here an alternative approach to realize complex logic circuits based on multiple MEMS resonators. As case studies, we report the construction of a single-bit binary comparator, a single-bit 4-to-2 encoder, and parallel XOR/XNOR and AND/NOT logic gates. Toward this, several microresonators are electrically connected and their resonance frequencies are tuned through an electrothermal modulation scheme. The microresonators operating in the linear regime do not require large excitation forces, and work at room temperature and at modest air pressure. This study demonstrates that by reconfiguring the same basic building block, tunable resonator, several essential complex logic functions can be achieved.

/pdf/towards-electromechanical-computation-an-alternative-3y0bz8q4hb.pdf

Lakshmoji Kosuru

Papers

Microelectromechanical reprogrammable logic device.

In-Plane MEMS Shallow Arch Beam for Mechanical Memory

Humidity Detection Using Metal Organic Framework Coated on QCM

Electrothermal Frequency Modulated Resonator for Mechanical Memory

Towards electromechanical computation: An alternative approach to realize complex logic circuits