Showing papers by "Leigh T. Canham published in 1989"
TL;DR: In this article, room temperature proton implantation with subsequent annealing is shown to produce similar photoluminescence from silicon to that previously observed from both plasma-etched and hydrogenated crystalline material.
Abstract: Room temperature proton implantation with subsequent annealing is shown to produce similar photoluminescence from silicon to that previously observed from both plasma-etched and hydrogenated crystalline material. The dominant radiative recombination channels in the near infrared are quite unusual. The interpretation of photoluminescence data on 1 × 10 14 − 1 × 10 17 (35 keV H+) cm−2 implants is supported by secondary ion mass spectroscopy, transmission electron microscopy and deep level transient spectroscopy on selected samples.
35 citations