L
Leon I Maissel
Researcher at IBM
Publications - 24
Citations - 2978
Leon I Maissel is an academic researcher from IBM. The author has contributed to research in topics: Sputtering & Thin film. The author has an hindex of 12, co-authored 24 publications receiving 2947 citations.
Papers
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Journal ArticleDOI
Application of RF discharges to sputtering
H. R. Koenig,Leon I Maissel +1 more
TL;DR: In this paper, the operation of rf discharges is described and the internal distribution of voltages is considered, and the significance of this with respect to sputtering, particularly of insulators, is then discussed.
Journal ArticleDOI
An introduction to array logic
Harold Fleisher,Leon I Maissel +1 more
TL;DR: In this paper, a detailed description of the nature of array logic is given, including general array structures and implementation, influence of decoder partitioning, design of logic arrays, output phase, "split" variables, feedback in logic arrays and reconfiguration.
Journal ArticleDOI
Re-emission of sputtered SiO 2 , during growth and its relation to film quality
TL;DR: In this paper, an improved technique for measuring re-emission coefficients is described and data on the effect of temperature on film growth during sputtering where in constant reemission of material throughout deposition occurs.