Lin Zhou

Bio: Lin Zhou is an academic researcher from National University of Defense Technology. The author has contributed to research in topics: Figuring & Ion beam. The author has an hindex of 14, co-authored 39 publications receiving 474 citations. Previous affiliations of Lin Zhou include Brookhaven National Laboratory & ULTra.

Microscopic morphology evolution during ion beam smoothing of Zerodur® surfaces.

Abstract: Ion sputtering of Zerodur material often results in the formation of nanoscale microstructures on the surfaces, which seriously influences optical surface quality. In this paper, we describe the microscopic morphology evolution during ion sputtering of Zerodur surfaces through experimental researches and theoretical analysis, which shows that preferential sputtering together with curvature-dependent sputtering overcomes ion-induced smoothing mechanisms leading to granular nanopatterns formation in morphology and the coarsening of the surface. Consequently, we propose a new method for ion beam smoothing (IBS) of Zerodur optics assisted by deterministic ion beam material adding (IBA) technology. With this method, Zerodur optics with surface roughness down to 0.15 nm root mean square (RMS) level is obtained through the experimental investigation, which demonstrates the feasibility of our proposed method.

Morphology evolution of fused silica surface during ion beam figuring of high-slope optical components.

Abstract: Ultra-precision and ultra-smooth surfaces are vitally important for some high performance optical systems Ion beam figuring (IBF) is a well-established, highly deterministic method for the final precision figuring of extremely high quality optical surfaces, whereas ion sputtering induced smoothing, or roughening for nanoscale surface morphology, strongly depends on the processing conditions Usually, an improper machining method would arouse the production of nanoscale patterns leading to the coarsening of the optical surface In this paper, the morphology evolution mechanism on a fused silica surface during IBF of high-slope optical components has been investigated by means of atomic force microscopy Figuring experiments are implemented on two convex spherical surfaces by using different IBF methods Both of their surface errors are rapidly reduced to 12 nm root mean square (RMS) after removing similar deep material, but their surfaces are characterized with obviously different nanoscale morphologies The experimental results indicate that the ion incidence angle dominates the microscopic morphology during the IBF process At near-normal incidence, fused silica achieves an ultra-smooth surface with an RMS roughness value R(q) down to 01 nm, whereas nanoscale ripple patterns are observed at a large incidence angle with an R(q) value increasing to more than 09 nm Additionally, the difference of incidence angles on various machined areas would influence the uniformity of surface quality, resulting from the interplay between the smoothing and roughening effects induced by ion sputtering

Research on temperature field of KDP crystal under ion beam cleaning.

Abstract: KH2PO4 (KDP) crystal is a kind of excellent nonlinear optical component used as a laser frequency conversion unit in a high-power laser system. However, KDP crystal has raised a huge challenge in regards to its fabrication for high precision: KDP crystal has special physical and chemical characteristics. Abrasive-free water-dissolution magnetorheological finishing is used in KDP figuring in our lab. But the iron powders of MRF fluid are easily embedded into the soft surface of KDP crystal, which will greatly decrease the laser-induced damage resistance. This paper proposes to utilize ion beam figuring (IBF) technology to figure and clean the surface of a KDP component. Although IBF has many good performances, the thermal effect control is a headachy problem for the KDP process. To solve this problem, we have established its thermal effect models, which are used to calculate a component's surface temperature and thermal gradient in the whole process. By this way, we can understand how to control a temperature map and its gradient in the IBF process. Many experiments have been done to validate and optimize this method. Finally, a KDP component with the size of 200×200×12 mm is successfully processed by this method.

Morphology of Ion-Sputtered Surfaces

Abstract: We derive a stochastic nonlinear continuum theory to describe the morphological evolution of amorphous surfaces eroded by ion bombardment. Starting from Sigmund's theory of sputter erosion, we calculate the coefficients appearing in the continuum equation in terms of the physical parameters characterizing the sputtering process. We analyze the morphological features predicted by the continuum theory, comparing them with the experimentally reported morphologies. We show that for short time scales, where the effect of nonlinear terms is negligible, the continuum theory predicts ripple formation. We demonstrate that in addition to relaxation by thermal surface diffusion, the sputtering process can also contribute to the smoothing mechanisms shaping the surface morphology. We explicitly calculate an effective surface diffusion constant characterizing this smoothing effect, and show that it is responsible for the low temperature ripple formation observed in various experiments. At long time scales the nonlinear terms dominate the evolution of the surface morphology. The nonlinear terms lead to the stabilization of the ripple wavelength and we show that, depending on the experimental parameters such as angle of incidence and ion energy, different morphologies can be observed: asymptotically, sputter eroded surfaces could undergo kinetic roughening, or can display novel ordered structures with rotated ripples. Finally, we discuss in detail the existing experimental support for the proposed theory, and uncover novel features of the surface morphology and evolution, that could be directly tested experimentally.

What Is the Range of Surface Reconstructions from a Gradient Field

Abstract: We propose a generalized equation to represent a continuum of surface reconstruction solutions of a given non-integrable gradient field. We show that common approaches such as Poisson solver and Frankot-Chellappa algorithm are special cases of this generalized equation. For a N x N pixel grid, the subspace of all integrable gradient fields is of dimension N 2 - 1. Our framework can be applied to derive a range of meaningful surface reconstructions from this high dimensional space. The key observation is that the range of solutions is related to the degree of anisotropy in applying weights to the gradients in the integration process. While common approaches use isotropic weights, we show that by using a progression of spatially varying anisotropic weights, we can achieve significant improvement in reconstructions. We propose (a) α-surfaces using binary weights, where the parameter a allows trade off between smoothness and robustness, (b) M-estimators and edge preserving regularization using continuous weights and (c) Diffusion using affine transformation of gradients. We provide results on photometric stereo, compare with previous approaches and show that anisotropic treatment discounts noise while recovering salient features in reconstructions.

Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Abstract: The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing. Among the various fabrication techniques, focused ion beam (FIB) nanofabrication has been established as a well-suited and promising technique in nearly all fields of nanotechnology for the fabrication of 3D nanostructures and devices because of increasing demands from industry and research. In this article, a series of FIB nanofabrication factors related to the fabrication of 3D nanostructures and devices, including mechanisms, instruments, processes, and typical applications of FIB nanofabrication, are systematically summarized and analyzed in detail. Additionally, current challenges and future development trends of FIB nanofabrication in this field are also given. This work intends to provide guidance for practitioners, researchers, or engineers who wish to learn more about the FIB nanofabrication technology that is driving the revolution in 3D nanostructures and devices.