Lionel Buchaillot

Bio: Lionel Buchaillot is an academic researcher from Centre national de la recherche scientifique. The author has contributed to research in topics: Resonator & Microelectromechanical systems. The author has an hindex of 26, co-authored 121 publications receiving 2078 citations. Previous affiliations of Lionel Buchaillot include University of Valenciennes and Hainaut-Cambresis.

Gallium Nitride as an Electromechanical Material

Abstract: Gallium nitride (GaN) is a wide bandgap semiconductor material and is the most popular material after silicon in the semiconductor industry. The prime movers behind this trend are LEDs, microwave, and more recently, power electronics. New areas of research also include spintronics and nanoribbon transistors, which leverage some of the unique properties of GaN. GaN has electron mobility comparable with silicon, but with a bandgap that is three times larger, making it an excellent candidate for high-power applications and high-temperature operation. The ability to form thin-AlGaN/GaN heterostructures, which exhibit the 2-D electron gas phenomenon leads to high-electron mobility transistors, which exhibit high Johnson's figure of merit. Another interesting direction for GaN research, which is largely unexplored, is GaN-based micromechanical devices or GaN microelectromechanical systems (MEMS). To fully unlock the potential of GaN and realize new advanced all-GaN integrated circuits, it is essential to cointegrate passive devices (such as resonators and filters), sensors (such as temperature and gas sensors), and other more than Moore functional devices with GaN active electronics. Therefore, there is a growing interest in the use of GaN as a mechanical material. This paper reviews the electromechanical, thermal, acoustic, and piezoelectric properties of GaN, and describes the working principle of some of the reported high-performance GaN-based microelectromechanical components. It also provides an outlook for possible research directions in GaN MEMS.

Fabrication and characterization of an SU-8 gripper actuated by a shape memory alloy thin film

Abstract: In this paper, we present the fabrication process of a shape memory alloy (SMA) thin film in both monolithic and hybrid configurations. This provides an effective actuation part for a gripper made of SU-8 thick photoresist. We also extensively describe and discuss the assembly of the SMA thin film with the SU-8 mechanism. Measurements show that the SU-8 gripper is able to achieve an opening action of 500 μm in amplitude at a frequency of 1 Hz. Finite element model simulations indicate that a force of 50 mN, corresponding to 400 μm of opening amplitude, should be produced by the SMA actuator. Although the assembly of the TiNi SMA thin film with the SU-8 mechanism is demonstrated, the bond reliability needs further development in order to improve the thermal behavior of the interface. In this paper, we show that SU-8 is well suited as a structural material for microelectromechanical systems (MEMS) applications. An attractive feature in the MEMS design is that the SMA generated force is well matched with the elastic properties of SU-8. From the application point of view, a SMA-actuated SU-8 high-aspect-ratio microgripper can serve as a secure means to transport microelectronics device, because it provides good grasping and safe insulation. This is also a preliminary result for the future development of biogrippers.

Electrostatic actuated micro gripper using an amplification mechanism

Abstract: This paper presents a microgripper using an amplification mechanism coupled to an electrostatic linear motor. The gripper design, particularly the principle of the amplification mechanism based on the combination of ground-links and moving pin-joints, is explained. The linear motor is composed of scratch drive actuator inducing the use of electrostatic forces to obtain quasi-static motion for high accuracy in micropositioning. To corroborate the design, the gripper mechanism has been modeled by finite elements method with different mesh elements via the simulator CASTEM 2000™. Then, the amplification ratio of displacement, the critical buckling load and the force applied to the grasped object are determined. Moreover, the fabrication process requiring four levels of polysilicon are presented and notices based on visual observations of the realized actuator are given. Based on video observations, kinematics characterization of different topologies of the microgripper is performed and a discussion concerning the comparison with the simulation results and the influence of the geometric shapes of jaws/arms on the kinematics parameters is done. Finally, reliability aspects are stated consisting in the determination of the brittleness areas.

Silicon Nitride Thin Films Young's Modulus Determination by an Optical Non Destructive Method

Abstract: The purpose of our study is to determine the Young's modulus of silicon nitride ( Si3N4) thin films. With respect to the experimental material, we use commercially available atomic force microscopy (AFM) microcantilevers. The novelty lies in the procedure used to compare and therefore to validate the experimental results. First, the fundamental mode of Si3N4 thin film microcantilevers is detected by means of the optical beam deflection (OBD) method. The resulting resonant frequency is subsequently introduced into the mechanical theoretical model to extract the value of the Young's modulus. A numerical modal analysis is performed to validate the experimental results using the same approach as that of the experiment. Finally, the Young's modulus obtained in this study is compared with those of other studies. The outcome shows that we have obtained a reliable protocol for Young's modulus estimation.

Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm

Abstract: The absorption coefficient of thick-films of the negative photoresist SU-8 is observed to be time dependent during photolithographic exposure by I-line ultraviolet light (λ=365nm); varying linearly from 38±1cm−1 to 49±1cm−1 for a surface exposure dose of 415mJ∕cm2. We develop a general model which enables the exposure dose to be calculated at a given photoresist depth for a given exposure time. We determine the critical exposure dose for the subsequent polymerization of SU-8 having an arbitrary thickness to be 49.4±3.9mJcm−2.

Monolithic microfabricated valves and pumps by multilayer soft lithography

Abstract: Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer soft lithography, with which devices consisting of multiple layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of elastomer. The softness of these materials allows the device areas to be reduced by more than two orders of magnitude compared with silicon-based devices. The other advantages of soft lithography, such as rapid prototyping, ease of fabrication, and biocompatibility, are retained.

Microfluidic large scale integration

Abstract: High-density microfluidic chips contain plumbing networks with thousands of micromechanical valves and hundreds of individually addressable chambers. These fluidic devices are analogous to electronic integrated circuits fabricated using large scale integration (LSI). A component of these networks is the fluidic multiplexor, which is a combinatorial array of binary valve patterns that exponentially increases the processing power of a network by allowing complex fluid manipulations with a minimal number of inputs. These integrated microfluidic networks can be used to construct a variety of highly complex microfluidic devices, for example the microfluidic analog of a comparator array, and a microfluidic memory storage device resembling electronic random access memories.

Soft robotics for chemists

Abstract: In areas from assembly of machines to surgery, and from deactivation of improvised explosive devices (IEDs) to unmanned flight, robotics is an important and rapidly growing field of science and technology. It is currently dominated by robots having hard body plans—constructions largely of metal structural elements and conventional joints—and actuated by electrical motors, or pneumatic or hydraulic systems. Handling fragile objects—from the ordinary (fruit) to the important (internal organs)—is a frequent task whose importance is often overlooked and is difficult for conventional hard robots; moving across unknown, irregular, and shifting terrain is also. Soft robots may provide solutions to both of these classes of problems, and to others. Methods of designing and fabricating soft robots are, however, much less developed than those for hard robots. We wish to expand the methods and materials of chemistry and soft-materials science into applications in fully soft robots. A robot is an automatically controlled, programmable machine. The limbs of animals or insects—structures typically based on rigid segments connected by joints with constrained ranges of motion—often serve as models for mobile elements of robots. Although mobile hard robots sometimes have limb-like structures similar to those of animals (an example is “Big Dog” by Boston Robotics), more often, robots use structures not found in organisms—for example, wheels and treads. The robotics community defines “soft robots” as: 1) machines made of soft—often elastomeric—materials, or 2) machines composed of multiple hard-robotic actuators that operate in concert, and demonstrate soft-robot-like properties; here, we consider only the former. Soft animals offer new models for manipulation and mobility not found, or generated only with difficulty and expense, using hard robots. Because materials from which this class of devices will be fabricated will usually be polymers (especially elastomers), they fall into the realm of organic materials science. The use of soft materials allows for continuous deformation. This type of deformation, in turn, enables structures with ranges of motion limited only by the properties of the materials. Soft robots have the potential to exploit types of structures found, for example, in marine organisms, and in non-skeletal parts of land animals. The tentacles of squid, trunks of elephants, and tongues of lizards and mammals are such examples; their structures are muscular hydrostats. Squid and starfish 14] are highly adept locomotors; their modes of movement have not been productively used, and permit solutions of problems in manipulation, locomotion, and navigation, that are different from those used in conventional hard robotics. The prototypical soft actuator—muscle—developed through the course of evolution. There is currently no technology that can replicate the balanced performance of muscle: it is simultaneously strong and fast, and enables a remarkable range of movements (such as those of a tongue). Muscle-like contraction and dilation occur in ionic polymeric gels on changes in the acidity or salinity of a surrounding ionic solution, but actuation in macroscopic structures is masstransport limited, and typically slow. Other electroactive polymers (EAPs) include dielectric elastomers, electrolytically active polymers, polyelectrolyte gels, and gel-metal composites. Pneumatically-driven McKibben-type actuators are among the most highly developed soft actuators, and have existed for more than fifty years; they consist of a bladder covered in a shell of braided, strong, inextensible fibers. These actuators can be fast, and have a length-load dependence similar to that of muscle but possess only one actuation mode—contraction and extension when pressurization changes. They are, in a sense, an analogue to a single muscle fibril ; using them for complex movements requires multiple actuators acting in series or parallel. Pneumaticallydriven flexible microactuators (FMAs) have been shown to be capable of bending, gripping, and manipulating objects. Roboticists have explored scalable methods for gripping and manipulating objects at the micro and nano scales. The use of compliant materials allows grippers to manipulate objects such as fruit with varied geometry. The field of robotics has not yet caught the attention of soft-materials scientists and chemists. Developing new materials, techniques for fabrication, and principles of design will create new types of soft robots. The objective of this work is to demonstrate a type of design that provides a range of behaviors, and that offers chemists a test bed for new materials and methods of fabrication for soft robots. Our designs use embedded pneumatic networks (PneuNets) of channels in elastomers [*] Prof. G. M. Whitesides Wyss Institute for Biologically Inspired Engineering Harvard University, 3 Blackfan Circle, Boston, MA 02115 (USA) Fax: (+ 1)617-495-9857 and Kavli Institute for Bionano Science & Technology 29 Oxford Street, Cambridge MA (USA) E-mail: gwhitesides@gmwgroup.harvard.edu Homepage: http://gmwgroup.harvard.edu/

The MEMS Handbook

Abstract: Part I: Background and Fundamentals Introduction, Mohamed Gad-el-Hak, University of Notre Dame Scaling of Micromechanical Devices, William Trimmer, Standard MEMS, Inc., and Robert H. Stroud, Aerospace Corporation Mechanical Properties of MEMS Materials, William N. Sharpe, Jr., Johns Hopkins University Flow Physics, Mohamed Gad-el-Hak, University of Notre Dame Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains, Robert M. Kirby and George Em Karniadakis, Brown University, and Oleg Mikulchenko and Kartikeya Mayaram, Oregon State University Liquid Flows in Microchannels, Kendra V. Sharp and Ronald J. Adrian, University of Illinois at Urbana-Champaign, Juan G. Santiago and Joshua I. Molho, Stanford University Burnett Simulations of Flows in Microdevices, Ramesh K. Agarwal and Keon-Young Yun, Wichita State University Molecular-Based Microfluidic Simulation Models, Ali Beskok, Texas A&M University Lubrication in MEMS, Kenneth S. Breuer, Brown University Physics of Thin Liquid Films, Alexander Oron, Technion, Israel Bubble/Drop Transport in Microchannels, Hsueh-Chia Chang, University of Notre Dame Fundamentals of Control Theory, Bill Goodwine, University of Notre Dame Model-Based Flow Control for Distributed Architectures, Thomas R. Bewley, University of California, San Diego Soft Computing in Control, Mihir Sen and Bill Goodwine, University of Notre Dame Part II: Design and Fabrication Materials for Microelectromechanical Systems Christian A. Zorman and Mehran Mehregany, Case Western Reserve University MEMS Fabrication, Marc J. Madou, Nanogen, Inc. LIGA and Other Replication Techniques, Marc J. Madou, Nanogen, Inc. X-Ray-Based Fabrication, Todd Christenson, Sandia National Laboratories Electrochemical Fabrication (EFAB), Adam L. Cohen, MEMGen Corporation Fabrication and Characterization of Single-Crystal Silicon Carbide MEMS, Robert S. Okojie, NASA Glenn Research Center Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide, Glenn M. Beheim, NASA Glenn Research Center Microfabricated Chemical Sensors for Aerospace Applications, Gary W. Hunter, NASA Glenn Research Center, Chung-Chiun Liu, Case Western Reserve University, and Darby B. Makel, Makel Engineering, Inc. Packaging of Harsh-Environment MEMS Devices, Liang-Yu Chen and Jih-Fen Lei, NASA Glenn Research Center Part III: Applications of MEMS Inertial Sensors, Paul L. Bergstrom, Michigan Technological University, and Gary G. Li, OMM, Inc. Micromachined Pressure Sensors, Jae-Sung Park, Chester Wilson, and Yogesh B. Gianchandani, University of Wisconsin-Madison Sensors and Actuators for Turbulent Flows. Lennart Loefdahl, Chalmers University of Technology, and Mohamed Gad-el-Hak, University of Notre Dame Surface-Micromachined Mechanisms, Andrew D. Oliver and David W. Plummer, Sandia National Laboratories Microrobotics Thorbjoern Ebefors and Goeran Stemme, Royal Institute of Technology, Sweden Microscale Vacuum Pumps, E. Phillip Muntz, University of Southern California, and Stephen E. Vargo, SiWave, Inc. Microdroplet Generators. Fan-Gang Tseng, National Tsing Hua University, Taiwan Micro Heat Pipes and Micro Heat Spreaders, G. P. "Bud" Peterson, Rensselaer Polytechnic Institute Microchannel Heat Sinks, Yitshak Zohar, Hong Kong University of Science and Technology Flow Control, Mohamed Gad-el-Hak, University of Notre Dame) Part IV: The Future Reactive Control for Skin-Friction Reduction, Haecheon Choi, Seoul National University Towards MEMS Autonomous Control of Free-Shear Flows, Ahmed Naguib, Michigan State University Fabrication Technologies for Nanoelectromechanical Systems, Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider, University of Notre Dame Index

Microfabricated elastomeric valve and pump systems

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.