L
Lionel Rousseau
Researcher at ESIEE
Publications - 49
Citations - 1041
Lionel Rousseau is an academic researcher from ESIEE. The author has contributed to research in topics: Diamond & Microelectrode. The author has an hindex of 14, co-authored 47 publications receiving 965 citations. Previous affiliations of Lionel Rousseau include Commissariat à l'énergie atomique et aux énergies alternatives & Centre national de la recherche scientifique.
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Journal ArticleDOI
Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures
Frederic Marty,Lionel Rousseau,Bassam Saadany,Bruno Mercier,Olivier Français,Yoshio Mita,Tarik Bourouina +6 more
TL;DR: Different processes involving an inductively coupled plasma reactor either for deep reactive ion etching or for isotropic etching of silicon for photonic MEMS application is presented.
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High-sensitivity optical monitoring of a micromechanical resonator with a quantum-limited optomechanical sensor
Olivier Arcizet,P. F. Cohadon,Tristan Briant,Michel Pinard,Antoine Heidmann,J. M. Mackowski,Christine Michel,L. Pinard,Olivier Français,Lionel Rousseau +9 more
TL;DR: The high-sensitivity optical monitoring of a micromechanical resonator and its cooling by active control and an optomechanical sensor based on a very high-finesse cavity are experimentally demonstrated.
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Vortex density spectrum of quantum turbulence
Philippe-Emmanuel Roche,Pantxo Diribarne,Thomas Didelot,Olivier Français,Olivier Français,Lionel Rousseau,Hervé Willaime +6 more
TL;DR: In this paper, the second-sound attenuation measurements were performed with a micromachined open-cavity resonator inserted across a flow of turbulent He-II near 1.6 K and the frequency power spectrum of the measured vortex line density was compatible with a (−5/3) power law.
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3D shaped mechanically flexible diamond microelectrode arrays for eye implant applications: The MEDINAS project
Philippe Bergonzo,Alexandre Bongrain,Emmanuel Scorsone,Amel Bendali,Lionel Rousseau,Gaelle Lissorgues,Pascal Mailley,Y. Li,Y. Li,T. Kauffmann,F. Goy,Blaise Yvert,Blaise Yvert,José-Alain Sahel,Serge Picaud +14 more
TL;DR: The MEDINAS project aims at the fabrication of micro-electrode arrays (MEA) that take advantage of a novel electrode material, namely synthetic conducting diamond, as the bio-interface material.
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Selective nucleation in silicon moulds for diamond MEMS fabrication
Alexandre Bongrain,Emmanuel Scorsone,Lionel Rousseau,Gaelle Lissorgues,Céline Gesset,Samuel Saada,Philippe Bergonzo +6 more
TL;DR: In this article, a new and original approach for the fabrication of diamond MEMS using MPCVD was presented, which does not rely on diamond etching using conventional techniques such as e.g. RIE.