Ludwig Reimer

Bio: Ludwig Reimer is an academic researcher. The author has contributed to research in topics: Electron beam-induced deposition & Energy filtered transmission electron microscopy. The author has an hindex of 1, co-authored 1 publications receiving 966 citations.

Scanning Electron Microscopy: Physics of Image Formation and Microanalysis

Abstract: Electron Optics of a Scanning Electron Microscope.- Electron Scattering and Diffusion.- Emission of Backscattered and Secondary Electrons.- Electron Detectors and Spectrometers.- Image Contrast and Signal Processing.- Electron-Beam-Induced Current and Cathodoluminescence.- Special Techniques in SEM.- Crystal Structure Analysis by Diffraction.- Elemental Analysis and Imaging with X-Rays.

Gas-assisted focused electron beam and ion beam processing and fabrication

Abstract: Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer range. Since the beams can be used to locally alter material at the point where they are incident on a surface, they represent direct nanofabrication tools. The authors will focus here on direct fabrication rather than lithography, which is indirect in that it uses the intermediary of resist. In the case of both ions and electrons, material addition or removal can be achieved using precursor gases. In addition ions can also alter material by sputtering (milling), by damage, or by implantation. Many material removal and deposition processes employing precursor gases have been developed for numerous practical applications, such as mask repair, circuit restructuring and repair, and sample sectioning. The authors will also discuss structures that are made for research purposes or for demonstration of the processing capabilities. In many cases the minimum dimensions at which these processes can be realized are considerably larger than the beam diameters. The atomic level mechanisms responsible for the precursor gas activation have not been studied in detail in many cases. The authors will review the state of the art and level of understanding of direct ion and electron beam fabrication and point out some of the unsolved problems.

Transmission EBSD from 10 nm domains in a scanning electron microscope

Abstract: Summary The spatial resolution of electron diffraction within the scanning electron microscope (SEM) has progressed from channelling methods capable of measuring crystallographic characteristics from 10 μm regions to electron backscatter diffraction (EBSD) methods capable of measuring 120 nm particles Here, we report a new form of low-energy transmission Kikuchi diffraction, performed in the SEM Transmission-EBSD (t-EBSD) makes use of an EBSD detector and software to capture and analyse the angular intensity variation in large-angle forward scattering of electrons in transmission, without postspecimen coils We collected t-EBSD patterns from Fe–Co nanoparticles of diameter 10 nm and from 40 nm-thick Ni films with in-plane grain size 15 nm The patterns exhibited contrast similar to that seen in EBSD, but are formed in transmission Monte Carlo scattering simulations showed that in addition to the order of magnitude improvement in spatial resolution from isolated particles, the energy width of the scattered electrons in t-EBSD is nearly two orders of magnitude narrower than that of conventional EBSD This new low-energy transmission diffraction approach builds upon recent progress in achieving unprecedented levels of imaging resolution for materials characterization in the SEM by adding high-spatial-resolution analytical capabilities

Single Molecule Arrays for Genetic and Chemical Analysis

Abstract: Random arrays of single molecules are provided for carrying out large scale analyses, particularly of biomolecules, such as genomic DNA, cDNAs, proteins, and the like. In one aspect, arrays of the invention comprise concatemers of DNA fragments that are randomly disposed on a regular array of discrete spaced apart regions, such that substantially all such regions contain no more than a single concatemer. Preferably, such regions have areas substantially less than 1 μm 2 and have nearest neighbor distances that permit optical resolution of on the order of 10 9 single molecules per cm 2 . Many analytical chemistries can be applied to random arrays of the invention, including sequencing by hybridization chemistries, sequencing by synthesis chemistries, SNP detection chemistries, and the like, to greatly expand the scale and potential applications of such techniques.