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Author

M.E. Burnham

Bio: M.E. Burnham is an academic researcher from Motorola. The author has contributed to research in topic(s): Gate oxide & Oxide. The author has an hindex of 2, co-authored 2 publication(s) receiving 171 citation(s).
Topics: Gate oxide, Oxide

Papers
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Kuntal Joardar1, K.K. Gullapalli1, Colin C. McAndrew1, M.E. Burnham1, A. Wild1 
TL;DR: A new MOSFET model is presented that overcomes the errors present in state-of-the-art models and comparison with measured data is presented to validate the new model.
Abstract: Problems that have continued to remain in some of the recently published MOSFET compact models are demonstrated in this paper. Of particular interest are discontinuities observed in these models at the boundary between forward and reverse mode operation. A new MOSFET model is presented that overcomes the errors present in state-of-the-art models. Comparison with measured data is also presented to validate the new model.

135 citations

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TL;DR: In this paper, the authors correlate the higher n-well Q/sub bd/ to smooth capacitor oxide/substrate interfaces and minimized grain boundary cusps at the poly-Si gate/oxide interfaces, confirming that Fowler-Nordheim tunneling is the dominant current conduction mechanism through the oxide.
Abstract: Electrical time-to-breakdown (TTB) measurements have shown the charge to breakdown Q/sub bd/ of gate oxide capacitors fabricated on n-type well (n-well) substrates always to be higher than that of capacitors on p-type well (p-well) substrates on the same wafer when both are biased into accumulation under normal test conditions. Here the authors correlate the higher n-well Q/sub bd/ to smooth capacitor oxide/substrate interfaces and minimized grain boundary cusps at the poly-Si gate/oxide interfaces, confirming that Fowler-Nordheim tunneling is the dominant current conduction mechanisms through the oxide. They correlate higher Q/sub bd/ to higher barrier height for a given substrate type and observe that the slope of the barrier height versus temperature plot is lower for both p-well and n-well cases with electrons tunneling from the silicon substrate. This is attributed to surface roughness at the poly-Si gate/SiO/sub 2/ interface. A poly-Si gate deposition and annealing process with clean, smooth oxide/substrate interfaces will improve the p-well breakdown characteristics and allow higher Q/sub bd/ to be achieved. >

36 citations


Cited by
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TL;DR: In this paper, the authors describe the latest and most advanced surface potential-based model jointly developed by The Pennsylvania State University and Philips, which includes model structure, mobility and velocity saturation description, further development and verification of symmetric linearization method, recent advances in the computational techniques for the surface potential, modeling of gate tunneling current, inclusion of the retrograde impurity profile, and noise sources.
Abstract: This paper describes the latest and most advanced surface-potential-based model jointly developed by The Pennsylvania State University and Philips. Specific topics include model structure, mobility and velocity saturation description, further development and verification of symmetric linearization method, recent advances in the computational techniques for the surface potential, modeling of gate tunneling current, inclusion of the retrograde impurity profile, and noise sources. The emphasis of this paper is on incorporating the recent advances in MOS device physics and modeling within the compact modeling context

334 citations

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TL;DR: In this article, the implications of inversion charge linearization in compact MOS transistor modeling are discussed, and an improvement to the EKV charge-based model is proposed in the form of a more accurate charge-voltage relationship.
Abstract: In this paper, the implications of inversion charge linearization in compact MOS transistor modeling are discussed. The charge-sheet model provides the basic relation among inversion charge and applied potentials, via the implicit surface potential. A rigorous derivation of simpler relations among inversion charge and applied external potentials is provided, using the technique of inversion charge linearization versus surface potential. The new concept of the pinch-off surface potential and a new definition of the inversion charge linearization factor are introduced. In particular, we show that the EKV charge-based model can be considered as an approximation to the more general approach presented here. An improvement to the EKV charge-based model is proposed in the form of a more accurate charge–voltage relationship. This model is analyzed in detail and shows an excellent agreement with the charge sheet model. The normalization of voltages, current and charges, as motivated by the inversion charge linearization, results in a major simplification in compact modeling in static as well as non-quasi-static derivations.

123 citations

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G. Gildenblat1, H. Wang1, Ten-Lon Chen1, Xin Gu1, Xiaowen Cai1 
TL;DR: In this paper, an advanced physics-based compact MOSFET model (SP) is described, which includes the accumulation region, small-geometry effects, and a consistent current and charge formulation.
Abstract: This work describes an advanced physics-based compact MOSFET model (SP). Both the quasistatic and nonquasi-static versions of SP are surface-potential-based. The model is symmetric, includes the accumulation region, small-geometry effects, and has a consistent current and charge formulation. The surface potential is computed analytically and there are no iterative loops anywhere in the model. Availability of the surface potential in the source-drain overlap regions enables a physics-based formulation of the extrinsic model (e.g., gate tunneling current) and allows for a noise model free of discontinuities or unphysical interpolation schemes. Simulation results are used to illustrate the interplay between the model structure and circuit design.

118 citations

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TL;DR: In this article, the degradation of thin tunnel gate oxide under constant Fowler-Nordheim (FN) current stress was studied using flash EEPROM structures and the degradation is a strong function of the amount of injected charge density (Q/sub inj/), oxide thickness, and the direction of stress.
Abstract: The degradation of thin tunnel gate oxide under constant Fowler-Nordheim (FN) current stress was studied using flash EEPROM structures. The degradation is a strong function of the amount of injected charge density (Q/sub inj/), oxide thickness, and the direction of stress. Positive charge trapping is usually dominant at low Q/sub inj/ followed by negative charge trapping at high Q/sub inj/, causing a turnaround of gate voltage and threshold voltage. Interface trap generation continues to increase with increasing stress, as evidenced by subthreshold slope and transconductance. Gate injection stress creates more positive charge traps and interface traps than does substrate injection stress. Oxide degradation gets more severe for thicker oxide, due to more oxide charge trapping and interface trap generation by impact ionization. A simple model of oxide degradation and breakdown was established based on the experimental results. It indicates that the damage in the oxide is more serious near the anode interface by impact ionization and oxide breakdown is also closely related to surface roughness at the cathode interface. When all the damage sites in the oxide connect and a conductive path between cathode and anode is formed, oxide breakdown occurs. The damage is more serious for thicker oxide because a thicker oxide is more susceptible to impact ionization.

118 citations

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TL;DR: This work presents and verify an extremely accurate and computationally efficient closed-form approximation, which can serve as a basis for advanced surface-potential-based MOSFET models.
Abstract: Surface-potential-based models are among the most accurate and physically based compact MOSFET models available today. However, the need for iterative computations of the surface potential limits their computational efficiency, which is critical in CAD applications. The existing closed-form approximations for the surface potential are based on empirical smoothing functions and have the accuracy of about 2–3 mV which is not always adequate for an accurate modeling of MOSFET characteristics, especially transconductances and transcapacitances. In this work, we present and verify an extremely accurate and computationally efficient closed-form approximation, which can serve as a basis for advanced surface-potential-based MOSFET models.

112 citations