M
M Maarten Steinbuch
Researcher at Eindhoven University of Technology
Publications - 631
Citations - 13231
M Maarten Steinbuch is an academic researcher from Eindhoven University of Technology. The author has contributed to research in topics: Control theory & Robust control. The author has an hindex of 51, co-authored 630 publications receiving 11892 citations. Previous affiliations of M Maarten Steinbuch include Nanyang Technological University & Delft University of Technology.
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Device for creating a local plasma at the location of an object
TL;DR: In this paper, a device for creating a local cold plasma at the location of an object, at least comprising a high-frequency power source, a plasma chamber, and a plasma discharge electrode disposed in said plasma chamber.
Proceedings ArticleDOI
Jerk derivative feedforward control for motion systems
TL;DR: In this paper, reference trajectory relevant model based feedforward design is discussed for motion systems which contain at least one rigid body mode and which are subject to reference trajectories with mostly low frequency energy.
Journal ArticleDOI
Modeling and Waveform Optimization of a Nano-motion Piezo Stage
TL;DR: In this paper, a model of the stage and motor is developed incorporating the switching behavior of the drive legs, the contact deformation, and stick-slip effects between the legs and the stage.
Journal ArticleDOI
Identification, control and hysteresis compensation of a 3 dof metrological afm
R. J. E. Merry,Mustafa Uyanik,René van de Molengraft,Richard Koops,Marijn van Veghel,M Maarten Steinbuch +5 more
TL;DR: In this article, the authors used a 3 degrees-of-freedom (DOF) stage, driven by piezo-stack actuators, for sample manipulation in combination with a fixed cantilever.
Journal ArticleDOI
Performance optimisation of the push-belt CVT by variator slip control
TL;DR: In this paper, a variator slip controller is proposed to improve the performance of a continuous variable transmission (CVT) by minimising variator clamping forces, which is accomplished by using slip control technology.