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M Maarten Steinbuch

Researcher at Eindhoven University of Technology

Publications -  631
Citations -  13231

M Maarten Steinbuch is an academic researcher from Eindhoven University of Technology. The author has contributed to research in topics: Control theory & Robust control. The author has an hindex of 51, co-authored 630 publications receiving 11892 citations. Previous affiliations of M Maarten Steinbuch include Nanyang Technological University & Delft University of Technology.

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Device for creating a local plasma at the location of an object

TL;DR: In this paper, a device for creating a local cold plasma at the location of an object, at least comprising a high-frequency power source, a plasma chamber, and a plasma discharge electrode disposed in said plasma chamber.
Proceedings ArticleDOI

Jerk derivative feedforward control for motion systems

TL;DR: In this paper, reference trajectory relevant model based feedforward design is discussed for motion systems which contain at least one rigid body mode and which are subject to reference trajectories with mostly low frequency energy.
Journal ArticleDOI

Modeling and Waveform Optimization of a Nano-motion Piezo Stage

TL;DR: In this paper, a model of the stage and motor is developed incorporating the switching behavior of the drive legs, the contact deformation, and stick-slip effects between the legs and the stage.
Journal ArticleDOI

Identification, control and hysteresis compensation of a 3 dof metrological afm

TL;DR: In this article, the authors used a 3 degrees-of-freedom (DOF) stage, driven by piezo-stack actuators, for sample manipulation in combination with a fixed cantilever.
Journal ArticleDOI

Performance optimisation of the push-belt CVT by variator slip control

TL;DR: In this paper, a variator slip controller is proposed to improve the performance of a continuous variable transmission (CVT) by minimising variator clamping forces, which is accomplished by using slip control technology.