M
M Maarten Steinbuch
Researcher at Eindhoven University of Technology
Publications - 631
Citations - 13231
M Maarten Steinbuch is an academic researcher from Eindhoven University of Technology. The author has contributed to research in topics: Control theory & Robust control. The author has an hindex of 51, co-authored 630 publications receiving 11892 citations. Previous affiliations of M Maarten Steinbuch include Nanyang Technological University & Delft University of Technology.
Papers
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Proceedings ArticleDOI
Mask side wall clamping
TL;DR: In this article, a reticle clamping concept is presented for larger reticle stage accelerations than 400 m/s with a pattern deformation of < 0.12 nm on wafer stage level.
Journal Article
Micrometer-precision penetration motion in robot-assisted vitreoretinal surgery
Proceedings ArticleDOI
Frequency domain iterative learning control for direct-drive robots
TL;DR: In this paper, an iterative learning control algorithm for direct-drive robots is presented, which assumes linear dynamics, which is created using a nonlinear model-based compensator.
Proceedings ArticleDOI
Closed loop l/sub 1/ scaling for fixed-point digital control implementation
TL;DR: In this paper, the effects of quantization can be reduced by proper scaling of the controller parameters, which is only possible if the controller is asymptotically stable, and a solution is to calculate the scaling transformation on the basis of the closed-loop impulse responses.
Modal decoupling of a lightweight motion stage using algebraic constraints on the decoupling matrices
TL;DR: In this article, a method to compute decoupling matrices Fu and Fy that decouple the system in its rigid body(RB) modes and a number of non-rigid body(NRB) modes is presented.