M. Silberstein

Bio: M. Silberstein is an academic researcher. The author has contributed to research in topics: Salicide & Strained silicon. The author has an hindex of 1, co-authored 1 publications receiving 709 citations.

A 90nm high volume manufacturing logic technology featuring novel 45nm gate length strained silicon CMOS transistors

Abstract: This paper describes the details of a novel strained transistor architecture which is incorporated into a 90nm logic technology on 300mm wafers The unique strained PMOS transistor structure features an epitaxially grown strained SiGe film embedded in the source drain regions Dramatic performance enhancement relative to unstrained devices are reported These transistors have gate length of 45nm and 50nm for NMOS and PMOS respectively, 12nm physical gate oxide and Ni salicide World record PMOS drive currents of 700/spl mu/A//spl mu/m (high V/sub T/) and 800/spl mu/A//spl mu/m (low V/sub T/) at 12V are demonstrated NMOS devices exercise a highly tensile silicon nitride capping layer to induce tensile strain in the NMOS channel region High NMOS drive currents of 126mA//spl mu/m (high VT) and 145mA//spl mu/m (low VT) at 12V are reported The technology is mature and is being ramped into high volume manufacturing to fabricate next generation Pentium/spl reg/ and Intel/spl reg/ Centrino/spl trade/ processor families

A 90-nm logic technology featuring strained-silicon

Abstract: A leading-edge 90-nm technology with 1.2-nm physical gate oxide, 45-nm gate length, strained silicon, NiSi, seven layers of Cu interconnects, and low-/spl kappa/ CDO for high-performance dense logic is presented. Strained silicon is used to increase saturated n-type and p-type metal-oxide-semiconductor field-effect transistors (MOSFETs) drive currents by 10% and 25%, respectively. Using selective epitaxial Si/sub 1-x/Ge/sub x/ in the source and drain regions, longitudinal uniaxial compressive stress is introduced into the p-type MOSEFT to increase hole mobility by >50%. A tensile silicon nitride-capping layer is used to introduce tensile strain into the n-type MOSFET and enhance electron mobility by 20%. Unlike all past strained-Si work, the hole mobility enhancement in this paper is present at large vertical electric fields in nanoscale transistors making this strain technique useful for advanced logic technologies. Furthermore, using piezoresistance coefficients it is shown that significantly less strain (/spl sim/5 /spl times/) is needed for a given PMOS mobility enhancement when applied via longitudinal uniaxial compression versus in-plane biaxial tension using the conventional Si/sub 1-x/Ge/sub x/ substrate approach.

Uniaxial-process-induced strained-Si: extending the CMOS roadmap

Abstract: This paper reviews the history of strained-silicon and the adoption of uniaxial-process-induced strain in nearly all high-performance 90-, 65-, and 45-nm logic technologies to date. A more complete data set of n- and p-channel MOSFET piezoresistance and strain-altered gate tunneling is presented along with new insight into the physical mechanisms responsible for hole mobility enhancement. Strained-Si hole mobility data are analyzed using six band k/spl middot/p calculations for stresses of technological importance: uniaxial longitudinal compressive and biaxial stress on [001] and [110] wafers. The calculations and experimental data show that low in-plane and large out-of-plane conductivity effective masses and a high density of states in the top band are all important for large hole mobility enhancement. This work suggests longitudinal compressive stress on [001] or [110] wafers and channel direction offers the most favorable band structure for holes. The maximum Si inversion-layer hole mobility enhancement is estimated to be /spl sim/ 4 times higher for uniaxial stress on (100) wafer and /spl sim/ 2 times higher for biaxial stress on (100) wafer and for uniaxial stress on a [110] wafer.

Considerations for Ultimate CMOS Scaling

Abstract: This review paper explores considerations for ultimate CMOS transistor scaling Transistor architectures such as extremely thin silicon-on-insulator and FinFET (and related architectures such as TriGate, Omega-FET, Pi-Gate), as well as nanowire device architectures, are compared and contrasted Key technology challenges (such as advanced gate stacks, mobility, resistance, and capacitance) shared by all of the architectures will be discussed in relation to recent research results

Low-subthreshold-swing tunnel transistors

Abstract: A formula is derived, which shows that the subthreshold swing of field-effect interband tunnel transistors is not limited to 60 mV/dec as in the MOSFET. This formula is consistent with two recent reports of interband tunnel transistors, which show lower than 60-mV/dec subthreshold swings and provides two simple design principles for configuring these transistors. One of these principles suggests placing the gate adjacent to the tunnel junction. Modeling of this configuration verifies that sub-60-mV/dec swing is possible.

Scalable energy-efficient magnetoelectric spin-orbit logic.

Abstract: Since the early 1980s, most electronics have relied on the use of complementary metal–oxide–semiconductor (CMOS) transistors. However, the principles of CMOS operation, involving a switchable semiconductor conductance controlled by an insulating gate, have remained largely unchanged, even as transistors are miniaturized to sizes of 10 nanometres. We investigated what dimensionally scalable logic technology beyond CMOS could provide improvements in efficiency and performance for von Neumann architectures and enable growth in emerging computing such as artifical intelligence. Such a computing technology needs to allow progressive miniaturization, reduce switching energy, improve device interconnection and provide a complete logic and memory family. Here we propose a scalable spintronic logic device that operates via spin–orbit transduction (the coupling of an electron’s angular momentum with its linear momentum) combined with magnetoelectric switching. The device uses advanced quantum materials, especially correlated oxides and topological states of matter, for collective switching and detection. We describe progress in magnetoelectric switching and spin–orbit detection of state, and show that in comparison with CMOS technology our device has superior switching energy (by a factor of 10 to 30), lower switching voltage (by a factor of 5) and enhanced logic density (by a factor of 5). In addition, its non-volatility enables ultralow standby power, which is critical to modern computing. The properties of our device indicate that the proposed technology could enable the development of multi-generational computing. A scalable spintronic device operating via spin–orbit transduction and magnetoelectric switching and using advanced quantum materials shows non-volatility and improved performance and energy efficiency compared with CMOS devices.